Inventor · disambiguated record
Srinivasa Rao Yedla
Also filed as: YEDLA SRINIVASA · YEDLA SRINIVASA RAO
21 granted patents·14 pending applications·51 citations·filing 2015–2025
92Inventor score
Files withAPPLIED MATERIALS INC35
Top patents by PatentIndex Score
35 records- 0197US12080571B2Substrate processing module and method of moving a workpieceAPPLIED MATERIALS INC·Filed 2020·Granted Sep 3, 2024·5 cites·9 claims
- 0294US11749542B2Apparatus, system, and method for non-contact temperature monitoring of substrate supportsAPPLIED MATERIALS INC·Filed 2020·Granted Sep 5, 2023·3 cites·12 claims
- 0393USD937329SSputter target for a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2020·Granted Nov 30, 2021·19 cites·1 claims
- 0492US12347719B2Floating pin for substrate transferAPPLIED MATERIALS INC·Filed 2021·Granted Jul 1, 2025·3 cites·17 claims
- 0590USD970566SSputter target for a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2021·Granted Nov 22, 2022·12 cites·1 claims
- 0689US11817331B2Substrate holder replacement with protective disk during pasting processAPPLIED MATERIALS INC·Filed 2020·Granted Nov 14, 2023·2 cites·17 claims
- 0789US11600507B2Pedestal assembly for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·2 cites·20 claims
- 0886US11610799B2Electrostatic chuck having a heating and chucking capabilitiesAPPLIED MATERIALS INC·Filed 2020·Granted Mar 21, 2023·2 cites·20 claims
- 0984US11955355B2Isolated volume seals and method of forming an isolated volume within a processing chamberAPPLIED MATERIALS INC·Filed 2021·Granted Apr 9, 2024·1 cites·20 claims
- 1080US12043896B2Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressureAPPLIED MATERIALS INC·Filed 2023·Granted Jul 23, 2024·0 cites·20 claims
- 1180US10998209B2Substrate processing platforms including multiple processing chambersAPPLIED MATERIALS INC·Filed 2019·Granted May 4, 2021·2 cites·19 claims
- 1276US12506020B2Substrate processing module and method of moving a workpieceAPPLIED MATERIALS INC·Filed 2024·Granted Dec 23, 2025·0 cites·20 claims
- 1375US12266551B2Apparatus, system, and method for non-contact temperature monitoring of substrate supportsAPPLIED MATERIALS INC·Filed 2023·Granted Apr 1, 2025·0 cites·20 claims
- 1473US12217982B2Isolated volume seals and method of forming an isolated volume within a processing chamberAPPLIED MATERIALS INC·Filed 2024·Granted Feb 4, 2025·0 cites·21 claims
- 1571US2025145431A1Cathode exchange mechanism to improve preventative maintenance time for cluster systemAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1670US11674227B2Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressureAPPLIED MATERIALS INC·Filed 2021·Granted Jun 13, 2023·0 cites·20 claims
- 1767US12195314B2Cathode exchange mechanism to improve preventative maintenance time for cluster systemAPPLIED MATERIALS INC·Filed 2021·Granted Jan 14, 2025·0 cites·20 claims
- 1866US2025236947A1Dielectric Deposition Ring with Fins for Physical Vapor DepositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1958US12509756B2Reduced substrate process chamber cavity volumeAPPLIED MATERIALS INC·Filed 2021·Granted Dec 30, 2025·0 cites·20 claims
- 2058US2023212735A1Substrate processing systemAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 2155US2021358797A1Floating pin for substrate transferAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2255US2021381101A1Substrate processing systemAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2354US11646217B2Transfer apparatus and substrate-supporting memberAPPLIED MATERIALS INC·Filed 2021·Granted May 9, 2023·0 cites·14 claims
- 2454US11492697B2Apparatus for improved anode-cathode ratio for rf chambersAPPLIED MATERIALS INC·Filed 2020·Granted Nov 8, 2022·0 cites·17 claims
- 2552US12002668B2Thermal management hardware for uniform temperature control for enhanced bake-out for cluster toolAPPLIED MATERIALS INC·Filed 2021·Granted Jun 4, 2024·0 cites·12 claims
- 2648US2023032146A1Simultaneous in process metrology for cluster tool architectureAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 2746US2022076978A1Alignment of an electrostatic chuck with a substrate supportAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2845US2022013382A1Transfer carousel with detachable chucksAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2945US2022076971A1Self aligning wafer carrier pedestal element with power contactsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3044US2022051918A1Transfer chamber with integrated substrate pre-process chamberAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3143US10199204B2Target retaining apparatusAPPLIED MATERIALS INC·Filed 2015·Granted Feb 5, 2019·0 cites·20 claims
- 3243US2022235453A1Common vacuum shutter and pasting mechanism for a multistation cluster platformAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3342US2022068690A1Substrate transfer devicesAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3442US2021375650A1High temperature and vacuum isolation processing mini-environmentsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3540US2020381276A1Multisubstrate process systemAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →