Inventor · disambiguated record
Stefan Barzen
Also filed as: BARZEN STEFAN
46 granted patents·4 pending applications·280 citations·filing 2004–2023
98Inventor score
Top patents by PatentIndex Score
50 records- 0196US10689250B2MEMS component and production method for a MEMS componentINFINEON TECHNOLOGIES AG·Filed 2018·Granted Jun 23, 2020·12 cites·16 claims
- 0296US7912236B2Sound transducer structure and method for manufacturing a sound transducer structureINFINEON TECHNOLOGIES AG·Filed 2006·Granted Mar 22, 2011·41 cites·15 claims
- 0395US9002037B2MEMS structure with adjustable ventilation openingsDEHE ALFONS·Filed 2012·Granted Apr 7, 2015·24 cites·30 claims
- 0495US8461655B2Micromechanical sound transducer having a membrane support with tapered surfaceKLEIN WOLFGANG·Filed 2011·Granted Jun 11, 2013·30 cites·26 claims
- 0594US9628886B2MEMS deviceINFINEON TECHNOLOGIES AG·Filed 2014·Granted Apr 18, 2017·8 cites·23 claims
- 0694US9540226B2System and method for a MEMS transducerINFINEON TECHNOLOGIES AG·Filed 2015·Granted Jan 10, 2017·9 cites·36 claims
- 0793US9843862B2System and method for a pumping speakerINFINEON TECHNOLOGIES AG·Filed 2015·Granted Dec 12, 2017·9 cites·30 claims
- 0893US7502482B2Membrane and method for the production of the sameINFINEON TECHNOLOGIES AG·Filed 2005·Granted Mar 10, 2009·23 cites·18 claims
- 0992US9745188B1Microelectromechanical device and method for forming a microelectromechanical deviceINFINEON TECHNOLOGIES AG·Filed 2016·Granted Aug 29, 2017·5 cites·33 claims
- 1091US8723277B2Tunable MEMS device and method of making a tunable MEMS deviceDEHE ALFONS·Filed 2012·Granted May 13, 2014·14 cites·30 claims
- 1190US9668056B2Sound transducer structure and method for manufacturing a sound transducer structureINFINEON TECHNOLOGIES AG·Filed 2013·Granted May 30, 2017·9 cites·3 claims
- 1290US9179221B2MEMS devices, interface circuits, and methods of making thereofINFINEON TECHNOLOGIES AG·Filed 2014·Granted Nov 3, 2015·14 cites·25 claims
- 1390US8975107B2Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regionsDEHE ALFONS·Filed 2011·Granted Mar 10, 2015·11 cites·28 claims
- 1489US9902612B2Method for forming a microelectromechanical deviceINFINEON TECHNOLOGIES AG·Filed 2017·Granted Feb 27, 2018·3 cites·9 claims
- 1589US9458009B2Semiconductor devices and methods of forming thereofINFINEON TECHNOLOGIES AG·Filed 2015·Granted Oct 4, 2016·4 cites·23 claims
- 1689US8542853B2Sound transducer structure and method for manufacturing a sound transducer structureDEHE ALFONS·Filed 2011·Granted Sep 24, 2013·9 cites·4 claims
- 1783US9102519B2Semiconductor devices and methods of forming thereofINFINEON TECHNOLOGIES AG·Filed 2013·Granted Aug 11, 2015·4 cites·26 claims
- 1881US11905167B2Dual membrane transducerINFINEON TECHNOLOGIES AG·Filed 2022·Granted Feb 20, 2024·0 cites·20 claims
- 1981US10034100B2Sound transducer structure and method for manufacturing a sound transducer structureINFINEON TECHNOLOGIES AG·Filed 2016·Granted Jul 24, 2018·2 cites·16 claims
- 2079US10981780B2Membrane support for dual backplate transducersINFINEON TECHNOLOGIES AG·Filed 2019·Granted Apr 20, 2021·1 cites·21 claims
- 2179US9503823B2Capacitive microphone with insulated conductive plateINFINEON TECHNOLOGIES AG·Filed 2014·Granted Nov 22, 2016·5 cites·9 claims
- 2279US7348646B2Micromechanical capacitive transducer and method for manufacturing the sameINFINEON TECHNOLOGIES AG·Filed 2006·Granted Mar 25, 2008·8 cites·14 claims
- 2378US7882612B2Method for producing a membraneINFINEON TECHNOLOGIES AG·Filed 2009·Granted Feb 8, 2011·7 cites·17 claims
- 2477US12297102B2Membrane support for dual backplate transducersINFINEON TECHNOLOGIES AG·Filed 2023·Granted May 13, 2025·0 cites·12 claims
- 2577US10462579B2System and method for a multi-electrode MEMS deviceINFINEON TECHNOLOGIES AG·Filed 2018·Granted Oct 29, 2019·2 cites·20 claims
- 2676US2023224657A1Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereofINFINEON TECHNOLOGIES AG·Filed 2023·Application pending·0 cites
- 2775US10469958B2MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducerINFINEON TECHNOLOGIES AG·Filed 2018·Granted Nov 5, 2019·2 cites·27 claims
- 2875US7253016B2Micromechanical capacitive transducer and method for producing the sameINFINEON TECHNOLOGIES AG·Filed 2004·Granted Aug 7, 2007·15 cites·14 claims
- 2973US11524891B2Membrane support for dual backplate transducersINFINEON TECHNOLOGIES AG·Filed 2021·Granted Dec 13, 2022·0 cites·10 claims
- 3073US10779101B2MEMS deviceINFINEON TECHNOLOGIES AG·Filed 2020·Granted Sep 15, 2020·0 cites·20 claims
- 3169US11115755B2Sound transducer structure and method for manufacturing a sound transducer structureINFINEON TECHNOLOGIES AG·Filed 2020·Granted Sep 7, 2021·0 cites·23 claims
- 3268US10602290B2MEMS deviceINFINEON TECHNOLOGIES AG·Filed 2018·Granted Mar 24, 2020·0 cites·12 claims
- 3368US10464807B2Semiconductor device, microphone and method for producing a semiconductor deviceINFINEON TECHNOLOGIES AG·Filed 2017·Granted Nov 5, 2019·1 cites·20 claims
- 3468US9673785B2Packaged MEMS device comprising adjustable ventilation openingINFINEON TECHNOLOGIES AG·Filed 2015·Granted Jun 6, 2017·1 cites·22 claims
- 3566US9210516B2Packaged MEMS device and method of calibrating a packaged MEMS deviceHERZUM CHRISTIAN·Filed 2012·Granted Dec 8, 2015·2 cites·7 claims
- 3663US11053117B2MEMS component and production method for a MEMS componentINFINEON TECHNOLOGIES AG·Filed 2020·Granted Jul 6, 2021·0 cites·19 claims
- 3761US2019297441A1Semiconductor Devices Having a Membrane Layer with Smooth Stress-Relieving Corrugations and Methods of Fabrication ThereofINFINEON TECHNOLOGIES AG·Filed 2019·Application pending·0 cites
- 3860US11039248B2System and method for a pumping speakerINFINEON TECHNOLOGIES AG·Filed 2019·Granted Jun 15, 2021·0 cites·20 claims
- 3959US11470426B2MEMS devicesINFINEON TECHNOLOGIES AG·Filed 2019·Granted Oct 11, 2022·0 cites·20 claims
- 4059US10567886B2Sound transducer structure and method for manufacturing a sound transducer structureINFINEON TECHNOLOGIES AG·Filed 2017·Granted Feb 18, 2020·0 cites·20 claims
- 4158US10405118B2Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereofINFINEON TECHNOLOGIES AG·Filed 2015·Granted Sep 3, 2019·0 cites·5 claims
- 4257US10244316B2System and method for a pumping speakerINFINEON TECHNOLOGIES AG·Filed 2017·Granted Mar 26, 2019·0 cites·20 claims
- 4357US10171925B2MEMS deviceINFINEON TECHNOLOGIES AG·Filed 2017·Granted Jan 1, 2019·0 cites·20 claims
- 4457US2024017986A1MEMS Device and Method for Manufacturing a MEMS DeviceINFINEON TECHNOLOGIES AG·Filed 2023·Application pending·0 cites
- 4556US11505453B2Sensor with a membrane electrode, a counterelectrode, and at least one springINFINEON TECHNOLOGIES AG·Filed 2020·Granted Nov 22, 2022·0 cites·18 claims
- 4655US7001828B2Method and apparatus for manufacturing a device having a moveable structureINFINEON TECHNOLOGIES AG·Filed 2004·Granted Feb 21, 2006·5 cites·11 claims
- 4754US9875934B2Semiconductor device and a method for forming a semiconductor deviceINFINEON TECHNOLOGIES AG·Filed 2016·Granted Jan 23, 2018·0 cites·16 claims
- 4853US11668683B2Thermal emitter with embedded heating elementINFINEON TECHNOLOGIES AG·Filed 2021·Granted Jun 6, 2023·0 cites·17 claims
- 4952US2018108567A1Semiconductor device and a method for forming a semiconductor deviceINFINEON TECHNOLOGIES AG·Filed 2017·Application pending·0 cites
- 5051US10003889B2System and method for a multi-electrode MEMS deviceINFINEON TECHNOLOGIES AG·Filed 2015·Granted Jun 19, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →