Inventor · disambiguated record
Stephen Biellak
Also filed as: BIELLAK STEPHEN · BIELLAK STEPHEN A
36 granted patents·366 citations·filing 1995–2020
97Inventor score
Top patents by PatentIndex Score
36 records- 0196US9891177B2TDI sensor in a darkfield systemKLA TENCOR CORP·Filed 2014·Granted Feb 13, 2018·56 cites·41 claims
- 0296US9355440B1Detection of selected defects in relatively noisy inspection dataKLA TENCOR CORP·Filed 2012·Granted May 31, 2016·28 cites·35 claims
- 0396US8629384B1Photomultiplier tube optimized for surface inspection in the ultravioletBIELLAK STEPHEN·Filed 2010·Granted Jan 14, 2014·42 cites·4 claims
- 0494US9279774B2Wafer inspectionROMANOVSKY ANATOLY·Filed 2012·Granted Mar 8, 2016·29 cites·19 claims
- 0593US7463349B1Systems and methods for determining a characteristic of a specimenKLA TENCOR TECH CORP·Filed 2006·Granted Dec 9, 2008·24 cites·22 claims
- 0692US8582094B1Systems and methods for inspecting specimens including specimens that have a substantially rough uppermost layerSHORTT DAVID·Filed 2005·Granted Nov 12, 2013·28 cites·23 claims
- 0792US8169613B1Segmented polarizer for optimizing performance of a surface inspection systemBIELLAK STEPHEN·Filed 2009·Granted May 1, 2012·23 cites·18 claims
- 0892US7623229B1Systems and methods for inspecting wafersKLA TENCOR CORP·Filed 2008·Granted Nov 24, 2009·22 cites·21 claims
- 0991US8294887B1Fast laser power control with improved reliability for surface inspectionBIELLAK STEPHEN·Filed 2010·Granted Oct 23, 2012·11 cites·19 claims
- 1091US7912658B2Systems and methods for determining two or more characteristics of a waferKLA TENCOR CORP·Filed 2008·Granted Mar 22, 2011·19 cites·25 claims
- 1191US7489393B2Enhanced simultaneous multi-spot inspection and imagingKLA TENCOR TECH CORP·Filed 2005·Granted Feb 10, 2009·19 cites·36 claims
- 1290US10488348B2Wafer inspectionKLA TENCOR CORP·Filed 2018·Granted Nov 26, 2019·3 cites·57 claims
- 1389US8520208B1Segmented polarizer for optimizing performance of a surface inspection systemBIELLAK STEPHEN·Filed 2012·Granted Aug 27, 2013·9 cites·20 claims
- 1488US8269960B2Computer-implemented methods for inspecting and/or classifying a waferREICH JUERGEN·Filed 2008·Granted Sep 18, 2012·19 cites·38 claims
- 1586US10462391B2Dark-field inspection using a low-noise sensorKLA TENCOR CORP·Filed 2016·Granted Oct 29, 2019·5 cites·21 claims
- 1686US7554656B2Methods and systems for inspection of a waferKLA TENCOR TECH CORP·Filed 2005·Granted Jun 30, 2009·11 cites·21 claims
- 1781US9841512B2System and method for reducing radiation-induced false counts in an inspection systemKLA TENCOR CORP·Filed 2015·Granted Dec 12, 2017·2 cites·32 claims
- 1880US7746459B2Systems configured to inspect a waferKLA TENCOR TECH CORP·Filed 2007·Granted Jun 29, 2010·7 cites·29 claims
- 1977US10690599B1Radiation-induced false count mitigation and detector coolingKLA TENCOR CORP·Filed 2018·Granted Jun 23, 2020·2 cites·42 claims
- 2075US9460886B2High resolution high quantum efficiency electron bombarded CCD or CMOS imaging sensorKLA TENCOR CORP·Filed 2015·Granted Oct 4, 2016·2 cites·21 claims
- 2169US7796805B1Defect detectionKLA TENCOR CORP·Filed 2005·Granted Sep 14, 2010·2 cites·16 claims
- 2267US9182358B2Multi-spot defect inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 10, 2015·1 cites·31 claims
- 2362US9194812B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2014·Granted Nov 24, 2015·0 cites·26 claims
- 2462US9086389B2Sample inspection system detectorKLA TENCOR CORP·Filed 2013·Granted Jul 21, 2015·0 cites·20 claims
- 2560US9915622B2Wafer inspectionKLA TENCOR CORP·Filed 2015·Granted Mar 13, 2018·0 cites·20 claims
- 2659US10241217B2System and method for reducing radiation-induced false counts in an inspection systemKLA TENCOR CORP·Filed 2017·Granted Mar 26, 2019·0 cites·21 claims
- 2757US10734438B2Spread-spectrum clock-signal adjustment for image sensorsKLA TENCOR CORP·Filed 2019·Granted Aug 4, 2020·0 cites·19 claims
- 2856US8786850B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2012·Granted Jul 22, 2014·0 cites·28 claims
- 2954US9646379B1Detection of selected defects in relatively noisy inspection dataKLA TENCOR CORP·Filed 2016·Granted May 9, 2017·0 cites·33 claims
- 3051US10923526B2Multi-pass imaging using image sensors with variably biased channel-stop contacts for identifying defects in a semiconductor dieKLA TENCOR CORP·Filed 2019·Granted Feb 16, 2021·0 cites·18 claims
- 3151US9678350B2Laser with integrated multi line or scanning beam capabilityKLA TENCOR CORP·Filed 2013·Granted Jun 13, 2017·0 cites·20 claims
- 3250US10903258B2Image sensors with grounded or otherwise biased channel-stop contactsKLA TENCOR CORP·Filed 2018·Granted Jan 26, 2021·0 cites·23 claims
- 3348US11181484B1Systems and methods for advanced defect ablation protectionKLA CORP·Filed 2020·Granted Nov 23, 2021·0 cites·20 claims
- 3447US9666419B2Image intensifier tube design for aberration correction and ion damage reductionKLA TENCOR CORP·Filed 2013·Granted May 30, 2017·0 cites·40 claims
- 3547US9404873B2Wafer inspection with multi-spot illumination and multiple channelsKLA TENCOR CORP·Filed 2013·Granted Aug 2, 2016·0 cites·18 claims
- 3630US5627852ASemiconductor laser geometry for broad-angle far-field addressingUNIV LELAND STANFORD JUNIOR·Filed 1995·Granted May 6, 1997·2 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →