Inventor · disambiguated record

Steven Chang

Also filed as: CHANG STEVEN · CHANG STEVEN S · CHANG STEVEN SHIH-YI

15 granted patents·1 pending application·232 citations·filing 20032016

92Inventor score
Technology areasG06FH05GC02FH01SH04L
Files withCHANG STEVEN S5SENNO TECHNOLOGY INC3ASML NETHERLANDS BV2CYMER INC1Cymer LLC1

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16 records

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →