Inventor · disambiguated record
Steven W. Meeks
Also filed as: MEEKS STEVEN · MEEKS STEVEN W · MEEKS STEVEN WAYNE
72 granted patents·3 pending applications·1,443 citations·filing 1995–2023
99Inventor score
Top patents by PatentIndex Score
75 records- 0197US11852592B2Time domain multiplexed defect scannerLUMINA INSTR INC·Filed 2023·Granted Dec 26, 2023·8 cites·21 claims
- 0297US11733173B1Time domain multiplexed defect scannerLUMINA INSTR INC·Filed 2023·Granted Aug 22, 2023·8 cites·21 claims
- 0397US11255796B2Region prober optical inspectorLUMINA INSTR INC·Filed 2020·Granted Feb 22, 2022·10 cites·21 claims
- 0497US10767977B1Scattered radiation defect depth detectionLUMINA INSTR INC·Filed 2020·Granted Sep 8, 2020·8 cites·20 claims
- 0597US6392749B1High speed optical profilometer for measuring surface height variationCANDELA INSTR·Filed 2000·Granted May 21, 2002·123 cites·28 claims
- 0696US6757056B1Combined high speed optical profilometer and ellipsometerCANDELA INSTR·Filed 2001·Granted Jun 29, 2004·91 cites·72 claims
- 0795US7656519B2Wafer edge inspectionKLA TENCOR CORP·Filed 2007·Granted Feb 2, 2010·26 cites·35 claims
- 0895US7161668B2Wafer edge inspectionKLA TENCOR TECH CORP·Filed 2005·Granted Jan 9, 2007·24 cites·16 claims
- 0994US7907269B2Scattered light separationKLA TENCOR CORP·Filed 2010·Granted Mar 15, 2011·16 cites·20 claims
- 1094US7161667B2Wafer edge inspectionKLA TENCOR TECH CORP·Filed 2005·Granted Jan 9, 2007·22 cites·18 claims
- 1194US6956660B2System and method for measuring properties of an object using a phase difference between two reflected light signalsKLA TENCOR TECHNOLOGIES·Filed 2004·Granted Oct 18, 2005·43 cites·52 claims
- 1294US6031615ASystem and method for simultaneously measuring lubricant thickness and degradation, thin film thickness and wear, and surface roughnessCANDELA INSTR·Filed 1998·Granted Feb 29, 2000·74 cites·93 claims
- 1392US7362425B2Wide spatial frequency topography and roughness measurementMEEKS STEVEN W·Filed 2006·Granted Apr 22, 2008·42 cites·14 claims
- 1492US6956658B2System and method for measuring object characteristics using phase differences in polarized light reflectionsKLA TENCOR TECH CORP·Filed 2003·Granted Oct 18, 2005·42 cites·32 claims
- 1592US5777815ADisk drive with shock detection based on thermoresistive signal from magnetoresistive headIBM·Filed 1996·Granted Jul 7, 1998·75 cites·11 claims
- 1691US8848181B1Multi-surface scattered radiation differentiationMEEKS STEVEN W·Filed 2013·Granted Sep 30, 2014·10 cites·19 claims
- 1791US7274445B1Confocal scatterometer and method for single-sided detection of particles and defects on a transparent wafer or diskKLA TENCOR TECH CORP·Filed 2005·Granted Sep 25, 2007·17 cites·23 claims
- 1891US7161669B2Wafer edge inspectionKLA TENCOR TECH CORP·Filed 2006·Granted Jan 9, 2007·18 cites·26 claims
- 1990US10094787B2Multi-surface specular reflection inspectorZETA INSTR INC·Filed 2016·Granted Oct 9, 2018·4 cites·20 claims
- 2090US9921169B2Method of detecting defect location using multi-surface specular reflectionZETA INSTR INC·Filed 2016·Granted Mar 20, 2018·4 cites·16 claims
- 2190US8836935B1Optical inspector with selective scattered radiation blockerMEEKS STEVEN W·Filed 2013·Granted Sep 16, 2014·9 cites·19 claims
- 2290US8830457B1Multi-surface optical inspectorZETA INSTR INC·Filed 2013·Granted Sep 9, 2014·9 cites·13 claims
- 2390US5586040AProcess and apparatus for controlled laser texturing of magnetic recording diskIBM·Filed 1995·Granted Dec 17, 1996·68 cites·20 claims
- 2489US7286229B1Detecting multi-domain states in perpendicular magnetic mediaKLA TENCOR TECH CORP·Filed 2005·Granted Oct 23, 2007·14 cites·18 claims
- 2589US6717671B1System for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic patternCANDELA INSTR·Filed 1999·Granted Apr 6, 2004·48 cites·37 claims
- 2688US7397553B1Surface scanningKLA TENCOR TECH CORP·Filed 2005·Granted Jul 8, 2008·13 cites·15 claims
- 2788US7190447B2Double sided optical inspection of thin film disks or wafersKLA TENCOR TECH CORP·Filed 2006·Granted Mar 13, 2007·11 cites·19 claims
- 2888US6268919B1System and method for measuring thin film properties and analyzing two-dimensional histograms using and/not operationsCANDELA INSTR·Filed 1999·Granted Jul 31, 2001·47 cites·36 claims
- 2987US7397621B2Servo pattern characterization on magnetic disksKLA TENCOR TECH CORP·Filed 2006·Granted Jul 8, 2008·8 cites·17 claims
- 3086US7532318B2Wafer edge inspectionKLA TENCOR CORP·Filed 2006·Granted May 12, 2009·10 cites·29 claims
- 3186US6130749ASystem and method for measuring thin film properties and analyzing two-dimensional histograms using a symmetry operationCANDELA INSTR·Filed 1999·Granted Oct 10, 2000·40 cites·29 claims
- 3285US7684032B1Multi-wavelength system and method for detecting epitaxial layer defectsKLA TENCOR CORP·Filed 2005·Granted Mar 23, 2010·10 cites·24 claims
- 3384US6781103B1Method of automatically focusing an optical beam on transparent or reflective thin film wafers or disksCANDELA INSTR·Filed 2003·Granted Aug 24, 2004·42 cites·41 claims
- 3482US8823935B1Detecting and classifying surface defects with multiple radiation collectorsMEEKS STEVEN W·Filed 2009·Granted Sep 2, 2014·12 cites·10 claims
- 3582US7630086B2Surface finish roughness measurementKLA TENCOR CORP·Filed 2007·Granted Dec 8, 2009·17 cites·16 claims
- 3682US7554654B2Surface characteristic analysisKLA TENCOR CORP·Filed 2007·Granted Jun 30, 2009·12 cites·2 claims
- 3782US7061601B2System and method for double sided optical inspection of thin film disks or wafersKLA TENCOR TECH CORP·Filed 2004·Granted Jun 13, 2006·22 cites·20 claims
- 3882US6229610B1System and method for measuring thin film properties and analyzing two-dimensional histograms using substraction operationCANDELA INSTR·Filed 1999·Granted May 8, 2001·33 cites·36 claims
- 3982US6198533B1High temperature thin film property measurement system and methodCANDELA INSTR INC·Filed 1999·Granted Mar 6, 2001·36 cites·111 claims
- 4080US10648928B1Scattered radiation optical scannerLUMINA INSTR INC·Filed 2019·Granted May 12, 2020·1 cites·20 claims
- 4180US5539213AProcess and apparatus for laser analysis of surface having a repetitive texture patternIBM·Filed 1995·Granted Jul 23, 1996·39 cites·13 claims
- 4279US6624884B1Surface inspection toolIBM·Filed 1997·Granted Sep 23, 2003·54 cites·15 claims
- 4378US7714995B2Material independent profilerKLA TENCOR CORP·Filed 2007·Granted May 11, 2010·9 cites·26 claims
- 4478US7110097B2Combined high speed optical profilometer and ellipsometerKLA TENCOR TECH CORP·Filed 2005·Granted Sep 19, 2006·4 cites·29 claims
- 4577US8896825B2Optical inspectorMEEKS STEVEN W·Filed 2013·Granted Nov 25, 2014·4 cites·17 claims
- 4677US7218391B2Material independent optical profilometerKLA TENCOR TECH CORP·Filed 2005·Granted May 15, 2007·8 cites·24 claims
- 4777US6751044B1Method and apparatus for reading a clock track with a magneto-optical clock head using the transverse Kerr effectMAXTOR CORP·Filed 1999·Granted Jun 15, 2004·35 cites·43 claims
- 4877US6665078B1System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern in thin film magnetic disks and silicon wafersCANDELA INSTR·Filed 1999·Granted Dec 16, 2003·36 cites·34 claims
- 4975US7075630B2Combined high speed optical profilometer and ellipsometerKLA TENCOR TECH CORP·Filed 2004·Granted Jul 11, 2006·13 cites·13 claims
- 5074US8736831B2Substrate inspectionRAMACHANDRAN MAHENDRA PRABHU·Filed 2012·Granted May 27, 2014·4 cites·26 claims
Showing the top 50 of 75 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →