Inventor · disambiguated record
Steven R. A. Van Aerde
Also filed as: VAN AERDE STEVEN · VAN AERDE STEVEN R A
17 granted patents·7 pending applications·497 citations·filing 2006–2025
91Inventor score
Top patents by PatentIndex Score
24 records- 0197US9812320B1Method and apparatus for filling a gapASM IP HOLDING BV·Filed 2016·Granted Nov 7, 2017·475 cites·38 claims
- 0292US11501968B2Method for providing a semiconductor device with silicon filled gapsASM IP HOLDING BV·Filed 2020·Granted Nov 15, 2022·4 cites·16 claims
- 0382US11594450B2Method for forming a structure with a holeASM IP HOLDING BV·Filed 2020·Granted Feb 28, 2023·1 cites·32 claims
- 0482US11230766B2Substrate processing apparatus and methodASM IP HOLDING BV·Filed 2018·Granted Jan 25, 2022·3 cites·13 claims
- 0581US10460932B2Semiconductor device with amorphous silicon filled gaps and methods for formingASM IP HOLDING BV·Filed 2017·Granted Oct 29, 2019·3 cites·23 claims
- 0675US9837271B2Process for forming silicon-filled openings with a reduced occurrence of voidsASM IP HOLDING BV·Filed 2015·Granted Dec 5, 2017·2 cites·26 claims
- 0773US12040229B2Method for forming a structure with a holeASM IP HOLDING BV·Filed 2022·Granted Jul 16, 2024·0 cites·28 claims
- 0870US7718518B2Low temperature doped silicon layer formationASM INT·Filed 2006·Granted May 18, 2010·4 cites·31 claims
- 0969US7645486B2Method of manufacturing a silicon dioxide layerSOITEC SILICON ON INSULATOR·Filed 2007·Granted Jan 12, 2010·3 cites·20 claims
- 1067US11646204B2Method for forming a layer provided with siliconASM IP HOLDING BV·Filed 2021·Granted May 9, 2023·0 cites·20 claims
- 1167US2023230833A1Method for forming a layer provided with siliconASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 1264US9443730B2Process for forming silicon-filled openings with a reduced occurrence of voidsASM IP HOLDING BV·Filed 2014·Granted Sep 13, 2016·1 cites·25 claims
- 1361US2025079159A1Method for improved silicon depositionASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1458US11610775B2Method and apparatus for filling a gapASM IP HOLDING BV·Filed 2017·Granted Mar 21, 2023·0 cites·38 claims
- 1557US12387930B2Method and wafer processing furnace for forming an epitaxial stack of semiconductor epitaxial layers on a plurality of substratesASM IP HOLDING BV·Filed 2023·Granted Aug 12, 2025·0 cites·16 claims
- 1656US2024339359A1Methods for depositing gap-filling fluids and related systems and devicesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1755US2025290203A1Wafer boatASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1852US2023220588A1Method of forming an epitaxial stack on a plurality of substratesASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 1951US8507388B2Prevention of oxidation of substrate surfaces in process chambersVAN AERDE STEVEN R A·Filed 2010·Granted Aug 13, 2013·1 cites·24 claims
- 2050US12362174B2Method and wafer processing furnace for forming an epitaxial stack on a plurality of substratesASM IP HOLDING BV·Filed 2023·Granted Jul 15, 2025·0 cites·19 claims
- 2147US9343304B2Method for depositing films on semiconductor wafersASM IP HOLDING BV·Filed 2014·Granted May 17, 2016·0 cites·18 claims
- 2245US2016020094A1Process for forming silicon-filled openings with a reduced occurrence of voidsASM IP HOLDING BV·Filed 2014·Application pending·0 cites
- 2341US10453685B2Forming semiconductor device by providing an amorphous silicon core with a hard mask layerASM IP HOLDING BV·Filed 2017·Granted Oct 22, 2019·0 cites·21 claims
- 2432US2013269615A1Vertical wafer boatVAN AERDE STEVEN R A·Filed 2012·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Steven R. A. Van Aerde files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →