Inventor · disambiguated record
Sungchul Yoo
Also filed as: YOO SUNGCHUL
4 granted patents·2 pending applications·52 citations·filing 2004–2024
74Inventor score
Top patents by PatentIndex Score
6 records- 0190US9412673B2Multi-model metrologyKLA TENCOR CORP·Filed 2014·Granted Aug 9, 2016·10 cites·25 claims
- 0287US7349079B2Methods for measurement or analysis of a nitrogen concentration of a specimenKLA TENCOR TECH CORP·Filed 2004·Granted Mar 25, 2008·37 cites·17 claims
- 0375US9311431B2Secondary target design for optical measurementsKLA TENCOR CORP·Filed 2012·Granted Apr 12, 2016·5 cites·32 claims
- 0448US11990380B2Methods and systems for combining x-ray metrology data sets to improve parameter estimationKLA CORP·Filed 2020·Granted May 21, 2024·0 cites·17 claims
- 0548US2024302301A1X-Ray Scatterometry Based Measurements Of Memory Array Structures Stacked With Complex Logic StructuresKLA CORP·Filed 2024·Application pending·0 cites
- 0647US2016322267A1Multi-model metrologyKLA TENCOR CORP·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →