Inventor · disambiguated record
Taketo Ueno
Also filed as: UENO TAKETO
22 granted patents·1 pending application·130 citations·filing 2002–2015
94Inventor score
Top patents by PatentIndex Score
23 records- 0195US7369223B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2005·Granted May 6, 2008·25 cites·5 claims
- 0288US6897956B2Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor deviceHITACHI HIGH TECH ELECT ENG CO·Filed 2002·Granted May 24, 2005·37 cites·21 claims
- 0387US8830465B2Defect inspecting apparatus and defect inspecting methodTANIGUCHI ATSUSHI·Filed 2011·Granted Sep 9, 2014·7 cites·14 claims
- 0486US7881520B2Defect inspection systemHITACHI HIGH TECH CORP·Filed 2006·Granted Feb 1, 2011·9 cites·4 claims
- 0584US8660336B2Defect inspection systemUENO TAKETO·Filed 2012·Granted Feb 25, 2014·5 cites·16 claims
- 0682US9683946B2Method and device for detecting defects and method and device for observing defectsHITACHI HIGH TECH CORP·Filed 2013·Granted Jun 20, 2017·4 cites·6 claims
- 0782US9535013B2Method and apparatus for inspecting defectMATSUMOTO SHUNICHI·Filed 2011·Granted Jan 3, 2017·5 cites·22 claims
- 0881US10228332B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2015·Granted Mar 12, 2019·2 cites·14 claims
- 0981US8681328B2Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatusTANIGUCHI ATSUSHI·Filed 2010·Granted Mar 25, 2014·4 cites·18 claims
- 1079US8289507B2Method of apparatus for detecting particles on a specimenHAMAMATSU AKIRA·Filed 2011·Granted Oct 16, 2012·2 cites·12 claims
- 1179US7817261B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2008·Granted Oct 19, 2010·4 cites·14 claims
- 1279US7643140B2Method and apparatus for inspecting a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2008·Granted Jan 5, 2010·6 cites·14 claims
- 1378US7952700B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2010·Granted May 31, 2011·2 cites·12 claims
- 1477US7271908B2Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor deviceHITACHI HIGH TECH CORP·Filed 2005·Granted Sep 18, 2007·6 cites·22 claims
- 1576US8970836B2Defect inspecting apparatus and defect inspecting methodTANIGUCHI ATSUSHI·Filed 2012·Granted Mar 3, 2015·2 cites·19 claims
- 1673US9019492B2Defect inspection device and defect inspection methodTANIGUCHI ATSUSHI·Filed 2011·Granted Apr 28, 2015·2 cites·11 claims
- 1772US8275189B2Defect inspection systemUENO TAKETO·Filed 2010·Granted Sep 25, 2012·2 cites·8 claims
- 1868US8885037B2Defect inspection method and apparatus thereforTANIGUCHI ATSUSHI·Filed 2010·Granted Nov 11, 2014·1 cites·10 claims
- 1968US8804112B2Method of defect inspection and device of defect inspectionSHIBATA YUKIHIRO·Filed 2010·Granted Aug 12, 2014·2 cites·8 claims
- 2062US9255793B2Defect inspection method and device thereofSHIBATA YUKIHIRO·Filed 2011·Granted Feb 9, 2016·1 cites·7 claims
- 2162US9182592B2Optical filtering device, defect inspection method and apparatus thereforUENO TAKETO·Filed 2012·Granted Nov 10, 2015·2 cites·11 claims
- 2252US9588055B2Defect inspection apparatus and defect inspection methodHITACHI HIGH TECH CORP·Filed 2014·Granted Mar 7, 2017·0 cites·8 claims
- 2348US2008068593A1Method and apparatus for detecting defectsNAKANO HIROYUKI·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →