Inventor · disambiguated record
Tetsuya Hanagata
Also filed as: HANAGATA TETSUYA
3 granted patents·95 citations·filing 1997–1997
75Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0186USD424024SQuartz process tubeTOKYO ELECTRON LTD·Filed 1997·Granted May 2, 2000·34 cites·1 claims
- 0285USD405429SProcessing tube for use in a semiconductor wafer heat processing apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Feb 9, 1999·32 cites·1 claims
- 0383USD406113SProcessing tube for use in a semiconductor wafer heat processing apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Feb 23, 1999·29 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →