Inventor · disambiguated record
Thomas Sutton
Also filed as: SUTTON THOMAS R · SUTTON THOMAS ROBERT
11 granted patents·1 pending application·369 citations·filing 1986–2004
93Inventor score
Top patents by PatentIndex Score
12 records- 0190US6736149B2Method and apparatus for supercritical processing of multiple workpiecesSUPERCRITICAL SYSTEMS INC·Filed 2002·Granted May 18, 2004·45 cites·3 claims
- 0289US6921456B2High pressure processing chamber for semiconductor substrateTOKYO ELECTRON LTD·Filed 2001·Granted Jul 26, 2005·43 cites·19 claims
- 0388US6926798B2Apparatus for supercritical processing of a workpieceTOKYO ELECTRON LTD·Filed 2003·Granted Aug 9, 2005·37 cites·16 claims
- 0487US6722642B1High pressure compatible vacuum chuck for semiconductor wafer including lift mechanismTOKYO ELECTRON LTD·Filed 2002·Granted Apr 20, 2004·70 cites·29 claims
- 0584US7060422B2Method of supercritical processing of a workpieceTOKYO ELECTRON LTD·Filed 2003·Granted Jun 13, 2006·27 cites·21 claims
- 0677US6926012B2Method for supercritical processing of multiple workpiecesTOKYO ELECTRON LTD·Filed 2002·Granted Aug 9, 2005·15 cites·16 claims
- 0776US4755356ALocking microcentrifuge tubeROBBINS SCIENT CORP·Filed 1986·Granted Jul 5, 1988·79 cites·3 claims
- 0875US7255772B2High pressure processing chamber for semiconductor substrateTOKYO ELECTRON LTD·Filed 2004·Granted Aug 14, 2007·15 cites·24 claims
- 0970US6748960B1Apparatus for supercritical processing of multiple workpiecesTOKYO ELECTRON LTD·Filed 2000·Granted Jun 15, 2004·10 cites·27 claims
- 1060US6263542B1Tolerance resistant and vacuum compliant door hinge with open-assist featureLAM RES CORP·Filed 1999·Granted Jul 24, 2001·24 cites·20 claims
- 1154US6487792B2Method and apparatus for agitation of workpiece in high pressure environmentTOKYO ELECTRON LTD·Filed 2001·Granted Dec 3, 2002·4 cites·12 claims
- 1237US2002189543A1High pressure processing chamber for semiconductor substrate including flow enhancing featuresFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →