Inventor · disambiguated record
Tirunelveli S. Ravi
Also filed as: RAVI TIRUNELVELI S · RAVI TIRUNELVELI SUBRAMAMAM
8 granted patents·1 pending application·422 citations·filing 1995–2006
90Inventor score
Top patents by PatentIndex Score
9 records- 0193US5807785ALow dielectric constant silicon dioxide sandwich layerAPPLIED MATERIALS INC·Filed 1996·Granted Sep 15, 1998·163 cites·8 claims
- 0289US7941237B2Flat panel display substrate testing systemMULTIBEAM CORP·Filed 2006·Granted May 10, 2011·13 cites·27 claims
- 0386US6051284AChamber monitoring and adjustment by plasma RF metrologyAPPLIED MATERIALS INC·Filed 1996·Granted Apr 18, 2000·53 cites·49 claims
- 0485US6060397AGas chemistry for improved in-situ cleaning of residue for a CVD apparatusAPPLIED MATERIALS INC·Filed 1995·Granted May 9, 2000·107 cites·32 claims
- 0568US6638886B1Plasma fluorine resistant alumina ceramic material and method of makingAPPLIED MATERIALS INC·Filed 1998·Granted Oct 28, 2003·19 cites·6 claims
- 0666US6083451AMethod of producing a polycrystalline alumina ceramic which is resistant to a fluorine-comprising plasmaAPPLIED MATERIALS INC·Filed 1995·Granted Jul 4, 2000·18 cites·12 claims
- 0762US6132517AMultiple substrate processing apparatus for enhanced throughputAPPLIED MATERIALS INC·Filed 1997·Granted Oct 17, 2000·27 cites·36 claims
- 0860US6376391B1Pulsed or tailored bias for filling gaps with low dielectric constant materialNOVELLUS SYSTEMS INC·Filed 1999·Granted Apr 23, 2002·22 cites·29 claims
- 0940US2006177288A1Multiple loadlocks and processing chamberPARKER N W·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →