Inventor · disambiguated record
Todd R. Downey
Also filed as: DOWNEY TODD R
7 granted patents·3 pending applications·23 citations·filing 2004–2025
80Inventor score
Top patents by PatentIndex Score
10 records- 0189US8629973B2Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensationZIMMERMAN RICHARD CARL·Filed 2010·Granted Jan 14, 2014·13 cites·20 claims
- 0287US11656555B2Lithographic apparatus and illumination uniformity correction systemASML HOLDING NV·Filed 2020·Granted May 23, 2023·3 cites·20 claims
- 0382US2025306453A1Optimization using a non-uniform illumination intensity profileASML HOLDING NV·Filed 2025·Application pending·0 cites
- 0469US12339583B2Optimization using a non-uniform illumination intensity profileASML HOLDING NV·Filed 2020·Granted Jun 24, 2025·0 cites·20 claims
- 0567US7426034B2Refractive index sensor utilizing gold island surface plasmon resonance on optical fiberASML HOLDING NV·Filed 2007·Granted Sep 16, 2008·2 cites·16 claims
- 0661US7253888B2Refractive index sensor utilizing gold island surface plasmon resonance on optical fiberASML HOLDING NV·Filed 2004·Granted Aug 7, 2007·4 cites·14 claims
- 0757US7821625B2Systems and methods for lithographic illuminator beam deviation measurement and calibration using grating sensorsASML HOLDING NV·Filed 2008·Granted Oct 26, 2010·1 cites·21 claims
- 0855US7630080B2Refractive index sensor utilizing gold island surface plasmon resonance on optical fiberASML HOLDING NV·Filed 2008·Granted Dec 8, 2009·0 cites·15 claims
- 0953US2024353756A1Lithographic method to enhance illuminator transmissionASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1048US2023035511A1Lithographic apparatus and method for drift compensationASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →