Inventor · disambiguated record
Tomoshi Inoue
Also filed as: INOUE TOMOSHI
9 granted patents·573 citations·filing 2007–2019
88Inventor score
Technology areasB24B
Top patents by PatentIndex Score
9 records- 0199USD634719SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 22, 2011·539 cites·1 claims
- 0292US8485866B2Substrate holding apparatus, polishing apparatus, and polishing methodYASUDA HOZUMI·Filed 2012·Granted Jul 16, 2013·8 cites·6 claims
- 0390US11548113B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2019·Granted Jan 10, 2023·2 cites·8 claims
- 0479US9308621B2Method and apparatus for polishing a substrateFUKUSHIMA MAKOTO·Filed 2009·Granted Apr 12, 2016·6 cites·30 claims
- 0579US8267746B2Substrate holding apparatus, polishing apparatus, and polishing methodYASUDA HOZUMI·Filed 2008·Granted Sep 18, 2012·5 cites·8 claims
- 0679US7967665B2Substrate holding apparatus, polishing apparatus, and polishing methodEBARA CORP·Filed 2007·Granted Jun 28, 2011·5 cites·9 claims
- 0776US10307882B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2016·Granted Jun 4, 2019·1 cites·2 claims
- 0875US8357029B2Polishing apparatusEBARA CORP·Filed 2009·Granted Jan 22, 2013·5 cites·16 claims
- 0967US8100739B2Substrate holding apparatus, polishing apparatus, and polishing methodYASUDA HOZUMI·Filed 2008·Granted Jan 24, 2012·2 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →