Inventor · disambiguated record
Toshihiro Nishisaka
Also filed as: NISHISAKA TOSHIHIRO
29 granted patents·6 pending applications·175 citations·filing 1995–2021
95Inventor score
Top patents by PatentIndex Score
35 records- 0196US8324600B2Apparatus and method for measuring and controlling target trajectory in chamber apparatusHAYASHI HIDEYUKI·Filed 2010·Granted Dec 4, 2012·32 cites·17 claims
- 0289US10136510B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2017·Granted Nov 20, 2018·4 cites·14 claims
- 0387US8785895B2Target supply apparatus, chamber, and extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2013·Granted Jul 22, 2014·7 cites·11 claims
- 0485US5754579ALaser gas controller and charging/discharging device for discharge-excited laserKOMATSU MFG CO LTD·Filed 1995·Granted May 19, 1998·69 cites·10 claims
- 0579US10349508B2Target storage deviceGIGAPHOTON INC·Filed 2018·Granted Jul 9, 2019·2 cites·20 claims
- 0674US8212228B2Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2009·Granted Jul 3, 2012·9 cites·16 claims
- 0772US8872145B2Target supply deviceGIGAPHOTON INC·Filed 2014·Granted Oct 28, 2014·3 cites·6 claims
- 0871US8759804B2Chamber apparatus and extreme ultraviolet light generation systemNISHISAKA TOSHIHIRO·Filed 2011·Granted Jun 24, 2014·3 cites·18 claims
- 0969US10674590B2Tank, target generation device, and extreme-UV-light generation deviceGIGAPHOTON INC·Filed 2018·Granted Jun 2, 2020·1 cites·16 claims
- 1068US9332625B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2015·Granted May 3, 2016·1 cites·23 claims
- 1165US10009991B2Target supply apparatus and EUV light generating apparatusGIGAPHOTON INC·Filed 2016·Granted Jun 26, 2018·1 cites·14 claims
- 1265US8698111B2Extreme ultraviolet light generation systemNISHISAKA TOSHIHIRO·Filed 2011·Granted Apr 15, 2014·2 cites·9 claims
- 1362US8779402B2Target supply deviceGIGAPHOTON INC·Filed 2012·Granted Jul 15, 2014·1 cites·10 claims
- 1461US11061340B2Mount, extreme ultraviolet light generation system, and device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Jul 13, 2021·0 cites·15 claims
- 1558US9052615B2Extreme ultraviolet light source apparatusNISHISAKA TOSHIHIRO·Filed 2009·Granted Jun 9, 2015·3 cites·17 claims
- 1657US10698316B2Target generation device replacement trolley, target generation device replacement system, and target generation device replacement methodGIGAPHOTON INC·Filed 2019·Granted Jun 30, 2020·0 cites·20 claims
- 1757US9429847B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2016·Granted Aug 30, 2016·0 cites·8 claims
- 1853US10524343B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2019·Granted Dec 31, 2019·0 cites·18 claims
- 1951US11789374B2Extreme ultraviolet light generation apparatus and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Oct 17, 2023·0 cites·20 claims
- 2051US11320740B2Target supply device, target supply method, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted May 3, 2022·0 cites·19 claims
- 2151US9040943B2Chamber and extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2014·Granted May 26, 2015·0 cites·7 claims
- 2251US2012119118A1Extreme ultraviolet light source systemWATANABE YUKIO·Filed 2012·Application pending·0 cites
- 2350US2014001369A1Chamber apparatus and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 2449US11452196B2EUV chamber apparatus, extreme ultraviolet light generation system, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Sep 20, 2022·0 cites·19 claims
- 2549US11363706B2Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Jun 14, 2022·0 cites·15 claims
- 2648US2013062539A1Apparatus and method for measuring and controlling target trajectory in chamber apparatusGIGAPHOTON INC·Filed 2012·Application pending·0 cites
- 2747US2010193711A1Extreme ultraviolet light source systemWATANABE YUKIO·Filed 2010·Application pending·0 cites
- 2846US6337872B1Once through fan for excimer laser apparatusKOMATSU MFG CO LTD·Filed 1999·Granted Jan 8, 2002·13 cites·7 claims
- 2945US10372041B2Target generation device and extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2019·Granted Aug 6, 2019·0 cites·19 claims
- 3045US9233782B2Target supply deviceGIGAPHOTON INC·Filed 2012·Granted Jan 12, 2016·0 cites·6 claims
- 3145US8779401B2Target supply unitMIZOGUCHI HAKARU·Filed 2012·Granted Jul 15, 2014·0 cites·12 claims
- 3245US2012228527A1Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2012·Application pending·0 cites
- 3344US6389049B2Discharge circuit for pulsed laser and pulsed power sourceKOMATSU MFG CO LTD·Filed 1998·Granted May 14, 2002·14 cites·3 claims
- 3443US6577664B1Excimer laser deviceKOMATSU MFG CO LTD·Filed 1999·Granted Jun 10, 2003·10 cites·3 claims
- 3538US2013075625A1Target supply unit and extreme ultraviolet light generation apparatusYABU TAKAYUKI·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →