Inventor · disambiguated record
Tomas Plettner
Also filed as: PLETTNER TOMAS
12 granted patents·3 pending applications·57 citations·filing 2009–2023
87Inventor score
Top patents by PatentIndex Score
15 records- 0193US8513619B1Non-planar extractor structure for electron sourceNASSER-GHODSI MEHRAN·Filed 2012·Granted Aug 20, 2013·20 cites·17 claims
- 0284US7994472B2Laser-driven deflection arrangements and methods involving charged particle beamsUNIV LELAND STANFORD JUNIOR·Filed 2009·Granted Aug 9, 2011·19 cites·16 claims
- 0379US10354832B2Multi-column scanning electron microscopy systemKLA TENCOR CORP·Filed 2017·Granted Jul 16, 2019·3 cites·37 claims
- 0477US9053833B2DC high-voltage super-radiant free-electron based EUV sourcePLETTNER TOMAS·Filed 2013·Granted Jun 9, 2015·6 cites·20 claims
- 0574US8618513B2Apparatus and methods for forming an electrical conduction path through an insulating layerPLETTNER TOMAS·Filed 2012·Granted Dec 31, 2013·4 cites·19 claims
- 0671US9513230B2Apparatus and method for optical inspection, magnetic field and height mappingKLA TENCOR CORP·Filed 2013·Granted Dec 6, 2016·3 cites·22 claims
- 0771US9418819B2Asymmetrical detector design and methodologyKLA TENCOR CORP·Filed 2014·Granted Aug 16, 2016·2 cites·20 claims
- 0859US2021090844A1Multi-column scanning electron microscopy systemKLA CORP·Filed 2020·Application pending·0 cites
- 0956US11927549B2Shielding strategy for mitigation of stray field for permanent magnet arrayKLA CORP·Filed 2021·Granted Mar 12, 2024·0 cites·20 claims
- 1054US11615939B2Shaped aperture set for multi-beam array configurationsKLA CORP·Filed 2021·Granted Mar 28, 2023·0 cites·18 claims
- 1154US2025087450A1Optics for In-Situ Scanning Electron Microscope RepairKLA CORP·Filed 2023·Application pending·0 cites
- 1252US12014895B2Multi-beam electronics scanKLA CORP·Filed 2021·Granted Jun 18, 2024·0 cites·20 claims
- 1349US10840056B2Multi-column scanning electron microscopy systemKLA TENCOR CORP·Filed 2017·Granted Nov 17, 2020·0 cites·19 claims
- 1446US10211021B2Permanent-magnet particle beam apparatus and method incorporating a non-magnetic metal portion for tunabilityKLA TENCOR CORP·Filed 2017·Granted Feb 19, 2019·0 cites·18 claims
- 1544US2015076697A1Dummy barrier layer features for patterning of sparsely distributed metal features on the barrier with cmpKLA TENCOR CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →