Inventor · disambiguated record
Tsungnan Cheng
Also filed as: CHENG TSUNGNAN
9 granted patents·548 citations·filing 1991–2012
91Inventor score
Files withAPPLIED MATERIALS INC4DOW CHEMICAL CO2ADVANCED ION BEAM TECH INC1APLEX INC1MOSEL VITELIC INC1
Top patents by PatentIndex Score
9 records- 0197US5795215AMethod and apparatus for using a retaining ring to control the edge effectAPPLIED MATERIALS INC·Filed 1996·Granted Aug 18, 1998·243 cites·5 claims
- 0293US6019670AMethod and apparatus for conditioning a polishing pad in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Feb 1, 2000·138 cites·19 claims
- 0387US6280297B1Apparatus and method for distribution of slurry in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2000·Granted Aug 28, 2001·24 cites·15 claims
- 0478US9006065B2Plasma doping a non-planar semiconductor deviceADVANCED ION BEAM TECH INC·Filed 2012·Granted Apr 14, 2015·4 cites·23 claims
- 0575US6315857B1Polishing pad shaping and patterningMOSEL VITELIC INC·Filed 1998·Granted Nov 13, 2001·42 cites·9 claims
- 0674US6051499AApparatus and method for distribution of slurry in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Apr 18, 2000·28 cites·8 claims
- 0762US5957764AModular wafer polishing apparatus and methodAPLEX INC·Filed 1997·Granted Sep 28, 1999·25 cites·23 claims
- 0862US5163977ASemi-permeable gas separation membranes containing non-ionic surfactants possessing improved resistance to thermal compaction and processes for making and using the sameDOW CHEMICAL CO·Filed 1991·Granted Nov 17, 1992·26 cites·87 claims
- 0953US5141530APolycarbonate, polyester, and polyestercarbonate semi-permeable gas separation membranes possessing improved gas selectivity and recovery, and processes for making and using the sameDOW CHEMICAL CO·Filed 1991·Granted Aug 25, 1992·18 cites·85 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →