Inventor · disambiguated record
Uwe Hollerbach
Also filed as: HOLLERBACH UWE
15 granted patents·1 pending application·407 citations·filing 2002–2024
91Inventor score
Top patents by PatentIndex Score
16 records- 0198US7175940B2Method of two dimensional feature model calibration and optimizationASML MASKTOOLS BV·Filed 2002·Granted Feb 13, 2007·365 cites·20 claims
- 0290US7820341B2Method of two dimensional feature model calibration and optimizationASML MASKTOOLS BV·Filed 2007·Granted Oct 26, 2010·12 cites·24 claims
- 0389US11899198B2Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systemsAPPLIED MATERIALS INC·Filed 2022·Granted Feb 13, 2024·1 cites·20 claims
- 0487US8799832B1Optical proximity correction for topographically non-uniform substratesMENTOR GRAPHICS CORP·Filed 2013·Granted Aug 5, 2014·5 cites·20 claims
- 0587US7349066B2Apparatus, method and computer program product for performing a model based optical proximity correction factoring neighbor influenceASML MASKTOOLS BV·Filed 2005·Granted Mar 25, 2008·9 cites·21 claims
- 0685US12372779B2Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systemsAPPLIED MATERIALS INC·Filed 2024·Granted Jul 29, 2025·0 cites·20 claims
- 0785US12360467B2Dynamic generation of layout adaptive packagingAPPLIED MATERIALS INC·Filed 2023·Granted Jul 15, 2025·0 cites·26 claims
- 0882US11899379B2Dynamic generation of layout adaptive packagingAPPLIED MATERIALS INC·Filed 2023·Granted Feb 13, 2024·0 cites·12 claims
- 0976US12242789B2Overlaying on locally dispositioned patterns by ML based dynamic digital corrections (ML-DDC)APPLIED MATERIALS INC·Filed 2024·Granted Mar 4, 2025·0 cites·20 claims
- 1076US10678150B1Dynamic generation of layout adaptive packagingAPPLIED MATERIALS INC·Filed 2018·Granted Jun 9, 2020·1 cites·18 claims
- 1175US7376930B2Method, program product and apparatus for generating assist features utilizing an image field mapASML MASKTOOLS BV·Filed 2004·Granted May 20, 2008·13 cites·16 claims
- 1266US11599032B2Dynamic generation of layout adaptive packagingAPPLIED MATERIALS INC·Filed 2019·Granted Mar 7, 2023·0 cites·20 claims
- 1365US11934762B2Overlaying on locally dispositioned patterns by ML based dynamic digital corrections (ML-DDC)APPLIED MATERIALS INC·Filed 2021·Granted Mar 19, 2024·0 cites·20 claims
- 1458US7856606B2Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systemsASML MASKTOOLS BV·Filed 2005·Granted Dec 21, 2010·1 cites·18 claims
- 1556US2019271916A1Real time software and array controlAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 1649US10331038B2Real time software and array controlAPPLIED MATERIALS INC·Filed 2016·Granted Jun 25, 2019·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →