Inventor · disambiguated record
Vaino Kilpi
Also filed as: KILPI VAINO · KILPI VÄINÖ
20 granted patents·3 pending applications·1,117 citations·filing 1985–2024
94Inventor score
Top patents by PatentIndex Score
23 records- 0198US11004707B1Substrate processing apparatus and methodPICOSUN OY·Filed 2020·Granted May 11, 2021·9 cites·29 claims
- 0298US9868131B2Atomic layer deposition with plasma sourcePICOSUN OY·Filed 2015·Granted Jan 16, 2018·414 cites·11 claims
- 0397US9095869B2Atomic layer deposition with plasma sourceKILPI VAINO·Filed 2011·Granted Aug 4, 2015·360 cites·18 claims
- 0497US6447607B2Apparatus for growing thin filmsASM MICROCHEMISTRY OY·Filed 2000·Granted Sep 10, 2002·143 cites·13 claims
- 0596US6551406B2Apparatus for growing thin filmsASM MICROCHEMISTRY OY·Filed 2000·Granted Apr 22, 2003·163 cites·20 claims
- 0691US12112927B2Substrate processing apparatus and methodPICOSUN OY·Filed 2022·Granted Oct 8, 2024·1 cites·10 claims
- 0789US9745661B2Method and apparatus for forming a substrate web track in an atomic layer deposition reactorPICOSUN OY·Filed 2013·Granted Aug 29, 2017·4 cites·11 claims
- 0885US12300523B2Substrate processing apparatus and methodPICOSUN OY·Filed 2020·Granted May 13, 2025·1 cites·13 claims
- 0975US12110588B2Adjustable fluid inlet assembly for a substrate processing apparatus and methodPICOSUN OY·Filed 2022·Granted Oct 8, 2024·0 cites·15 claims
- 1075US11280001B2Substrate loading in an ALD reactorPICOSUN OY·Filed 2018·Granted Mar 22, 2022·1 cites·18 claims
- 1166US10161038B2Substrate loading in an ALD reactorPICOSUN OY·Filed 2012·Granted Dec 25, 2018·1 cites·18 claims
- 1266US2024162019A1Substrate processing apparatus and methodPICOSUN OY·Filed 2022·Application pending·0 cites
- 1363US2025075318A1Method and apparatus for cleaning a reaction chamberPICOSUN OY·Filed 2024·Application pending·0 cites
- 1461US6689210B2Apparatus for growing thin filmsASM MICROCHEMISTRY OY·Filed 2002·Granted Feb 10, 2004·6 cites·10 claims
- 1560US12247288B2Substrate processing apparatus and methodPICOSUN OY·Filed 2022·Granted Mar 11, 2025·0 cites·13 claims
- 1658US12383923B2Atomic layer deposition with plasma sourcePICOSUN OY·Filed 2017·Granted Aug 12, 2025·0 cites·14 claims
- 1758US6835416B2Apparatus for growing thin filmsASM INT·Filed 2003·Granted Dec 28, 2004·5 cites·7 claims
- 1855US12325915B2Substrate processing apparatus and methodPICOSUN OY·Filed 2020·Granted Jun 10, 2025·0 cites·12 claims
- 1955US11414758B2Sample protectionPICOSUN OY·Filed 2020·Granted Aug 16, 2022·0 cites·10 claims
- 2054US11505864B2Adjustable fluid inlet assembly for a substrate processing apparatus and methodPICOSUN OY·Filed 2017·Granted Nov 22, 2022·0 cites·15 claims
- 2153US2022356577A1Substrate processing apparatus and methodPICOSUN OY·Filed 2022·Application pending·0 cites
- 2250US10494718B2Deposition reactor with plasma sourceKILPI VAINO·Filed 2011·Granted Dec 3, 2019·0 cites·15 claims
- 2344US4621379AFlushing operating means for vacuum toiletWAERTSILAE OY AB·Filed 1985·Granted Nov 11, 1986·9 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →