Inventor · disambiguated record
Vaibhaw Vishal
Also filed as: VISHAL VAIBHAW
5 granted patents·6 citations·filing 2011–2017
69Inventor score
Top patents by PatentIndex Score
5 records- 0167US10083852B1Floating wafer chuckKLA TENCOR CORP·Filed 2017·Granted Sep 25, 2018·1 cites·14 claims
- 0266US9134186B2Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpiecesSUN MEI·Filed 2011·Granted Sep 15, 2015·2 cites·52 claims
- 0363US8681493B2Heat shield module for substrate-like metrology deviceVISHAL VAIBHAW·Filed 2011·Granted Mar 25, 2014·2 cites·32 claims
- 0454US9514970B2Methods of attaching a module on wafer substrateVISHAL VAIBHAW·Filed 2013·Granted Dec 6, 2016·1 cites·26 claims
- 0539US11150140B2Instrumented substrate apparatus for acquiring measurement parameters in high temperature process applicationsKLA TENCOR CORP·Filed 2016·Granted Oct 19, 2021·0 cites·34 claims
Join the waitlist — get patent alerts
Get an alert when Vaibhaw Vishal files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →