Inventor · disambiguated record
Vitaliy Shklover
Also filed as: SHKLOVER VITALIY
16 granted patents·5 pending applications·37 citations·filing 2005–2025
89Inventor score
Top patents by PatentIndex Score
21 records- 0196US11525946B2Method for in situ protection of an aluminum layer and optical arrangement for the VUV wavelength rangeZEISS CARL SMT GMBH·Filed 2021·Granted Dec 13, 2022·5 cites·11 claims
- 0286US9933711B2Optical elementZEISS CARL LASER OPTICS GMBH·Filed 2014·Granted Apr 3, 2018·5 cites·24 claims
- 0383US10642167B2Optical elementZEISS CARL SMT GMBH·Filed 2018·Granted May 5, 2020·4 cites·13 claims
- 0483US7629572B2Optical devices and related systems and methodsZEISS CARL LASER OPTICS GMBH·Filed 2006·Granted Dec 8, 2009·7 cites·22 claims
- 0579US11366395B2Mirror, in particular for a microlithographic projection exposure systemZEISS CARL SMT GMBH·Filed 2020·Granted Jun 21, 2022·1 cites·15 claims
- 0672US2025389927A1Optical modules for the ultraviolet wavelength rangeZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0769US10649340B2Reflective optical element for EUV lithographyZEISS CARL SMT GMBH·Filed 2019·Granted May 12, 2020·1 cites·18 claims
- 0869US7471455B2Systems and methods for generating laser light shaped as a line beamCYMER INC·Filed 2005·Granted Dec 30, 2008·6 cites·20 claims
- 0968US7944615B2Optical system and method for shaping a profile of a laser beamZEISS CARL LASER OPTICS GMBH·Filed 2006·Granted May 17, 2011·6 cites·48 claims
- 1067US10578783B2Optical grating and optical assembly for sameZEISS CARL SMT GMBH·Filed 2019·Granted Mar 3, 2020·2 cites·22 claims
- 1164US12210289B2Mirror, in particular for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2022·Granted Jan 28, 2025·0 cites·22 claims
- 1262US2023266673A1Optical element, in particular for reflecting euv radiation, optical arrangement, and method for manufacturing an optical elementZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1361US11982788B2Method for forming nanostructures on a surface and optical elementZEISS CARL SMT GMBH·Filed 2021·Granted May 14, 2024·0 cites·17 claims
- 1460US11681236B2Method for in-situ dynamic protection of a surface and optical assemblyZEISS CARL SMT GMBH·Filed 2021·Granted Jun 20, 2023·0 cites·15 claims
- 1559US11029515B2Optical element, and method for correcting the wavefront effect of an optical elementZEISS CARL SMT GMBH·Filed 2020·Granted Jun 8, 2021·0 cites·15 claims
- 1657US2023257866A1Method for producing an optical element, optical element, device for producing an optical element, secondary gas and projection exposure systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1756US2023367226A1Layer-forming method, optical element and optical systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1855US2023253129A1Method for producing reflective optical elements for the euv wavelength range, and reflective optical elements for the euv wavelength rangeZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 1953US11099484B2Method for repairing reflective optical elements for EUV lithographyZEISS CARL SMT GMBH·Filed 2019·Granted Aug 24, 2021·0 cites·20 claims
- 2053US9703209B2Reflective optical element for grazing incidence in the EUV wavelength rangeZEISS CARL LASER OPTICS GMBH·Filed 2014·Granted Jul 11, 2017·0 cites·30 claims
- 2142US11328831B2Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatusZEISS CARL SMT GMBH·Filed 2018·Granted May 10, 2022·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →