Inventor · disambiguated record
W. Thomas Novak
Also filed as: NOVAK W T · NOVAK W THOMAS
81 granted patents·23 pending applications·2,757 citations·filing 1981–2018
99Inventor score
Top patents by PatentIndex Score
104 records- 0199US7251017B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2005·Granted Jul 31, 2007·65 cites·37 claims
- 0299US6437463B1Wafer positioner with planar motor and mag-lev fine stageNIKON CORP·Filed 2000·Granted Aug 20, 2002·135 cites·89 claims
- 0398US7414794B2Optical arrangement of autofocus elements for use with immersion lithographyNIKON CORP·Filed 2005·Granted Aug 19, 2008·43 cites·20 claims
- 0498US5623853APrecision motion stage with single guide beam and follower stageNIKON PRECISION INC·Filed 1994·Granted Apr 29, 1997·798 cites·32 claims
- 0597US7443482B2Liquid jet and recovery system for immersion lithographyNIKON CORP·Filed 2005·Granted Oct 28, 2008·27 cites·68 claims
- 0697US7397532B2Run-off path to collect liquid for an immersion lithography apparatusNIKON CORP·Filed 2005·Granted Jul 8, 2008·34 cites·35 claims
- 0797US4516253ALithography systemMICRONIX PARTNERS·Filed 1983·Granted May 7, 1985·129 cites·25 claims
- 0896US4514858ALithography systemMICRONIX PARTNERS·Filed 1983·Granted Apr 30, 1985·119 cites·4 claims
- 0995US7570431B2Optical arrangement of autofocus elements for use with immersion lithographyNIKON CORP·Filed 2006·Granted Aug 4, 2009·14 cites·44 claims
- 1095US7345742B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Mar 18, 2008·43 cites·24 claims
- 1195US5760564ADual guide beam stage mechanism with yaw controlNIKON PRECISION INC·Filed 1995·Granted Jun 2, 1998·134 cites·14 claims
- 1294US7932989B2Liquid jet and recovery system for immersion lithographyNIKON CORP·Filed 2007·Granted Apr 26, 2011·11 cites·30 claims
- 1394US7929111B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Apr 19, 2011·10 cites·22 claims
- 1494US5998889AElectro-magnetic motor cooling systemNIKON CORP·Filed 1997·Granted Dec 7, 1999·97 cites·28 claims
- 1594US4704033AMultiple wavelength linear zone plate alignment apparatus and methodMICRONIX CORP·Filed 1986·Granted Nov 3, 1987·86 cites·17 claims
- 1692US7929110B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Apr 19, 2011·7 cites·26 claims
- 1791US6717159B2Low distortion kinematic reticle supportNIKON CORP·Filed 2001·Granted Apr 6, 2004·41 cites·41 claims
- 1890US6239924B1Kinematic lens mounting with distributed support and radial flexureNIKON CORP·Filed 1999·Granted May 29, 2001·94 cites·8 claims
- 1989US7969552B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Jun 28, 2011·5 cites·24 claims
- 2089US7172493B2Fine force actuator assembly for chemical mechanical polishing apparatusesNIKON CORP·Filed 2005·Granted Feb 6, 2007·14 cites·46 claims
- 2189US6134981APrecision scanning apparatus and method with fixed and movable guide membersNIPPON KOGAKU KK·Filed 1999·Granted Oct 24, 2000·67 cites·8 claims
- 2288US9244363B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2014·Granted Jan 26, 2016·2 cites·27 claims
- 2388US8599488B2Optical arrangement of autofocus elements for use with immersion lithographyNOVAK W THOMAS·Filed 2011·Granted Dec 3, 2013·3 cites·25 claims
- 2488US8493545B2Cleanup method for optics in immersion lithography supplying cleaning liquid onto a surface of object below optical element, liquid supply port and liquid recovery portKAWAI HIDEMI·Filed 2009·Granted Jul 23, 2013·5 cites·41 claims
- 2588US7720371B2Depth layer extraction and image synthesis from focus varied multiple imagesNIKON CORP·Filed 2007·Granted May 18, 2010·12 cites·27 claims
- 2688US6880942B2Adaptive optic with discrete actuators for continuous deformation of a deformable mirror systemNIKON CORP·Filed 2003·Granted Apr 19, 2005·28 cites·16 claims
- 2788US5996437APrecision motion stage with single guide beam and follower stageNIKON CORP·Filed 1997·Granted Dec 7, 1999·62 cites·4 claims
- 2887US6653639B1Chuck for mounting reticle to a reticle stageNIKON CORP·Filed 2000·Granted Nov 25, 2003·27 cites·35 claims
- 2987US6140734AArmature with regular windings and having a high conductor densityNIKON CORP OF JAPAN·Filed 1998·Granted Oct 31, 2000·67 cites·20 claims
- 3087US4723086ACoarse and fine motion positioning mechanismMICRONIX CORP·Filed 1986·Granted Feb 2, 1988·93 cites·10 claims
- 3187US4549843AMask loading apparatus, method and cassetteMICRONIX PARTNERS·Filed 1983·Granted Oct 29, 1985·58 cites·17 claims
- 3286US8810915B2Optical arrangement of autofocus elements for use with immersion lithographyNIKON CORP·Filed 2013·Granted Aug 19, 2014·2 cites·40 claims
- 3386US8018657B2Optical arrangement of autofocus elements for use with immersion lithographyNIKON CORP·Filed 2009·Granted Sep 13, 2011·4 cites·28 claims
- 3486US6363809B1Precision scanning apparatus and method with fixed and movable guide membersNIKON CORP JAPAN·Filed 2000·Granted Apr 2, 2002·32 cites·9 claims
- 3584US7965376B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Jun 21, 2011·3 cites·23 claims
- 3684US7889207B2Image apparatus with image noise compensationNIKON CORP·Filed 2007·Granted Feb 15, 2011·9 cites·42 claims
- 3782US9587977B2Boresight error monitor for laser radar integrated optical assemblyNIKON CORP·Filed 2013·Granted Mar 7, 2017·8 cites·45 claims
- 3882US8094379B2Optical arrangement of autofocus elements for use with immersion lithographyNOVAK W THOMAS·Filed 2009·Granted Jan 10, 2012·3 cites·44 claims
- 3982US8059258B2Liquid jet and recovery system for immersion lithographyNOVAK W THOMAS·Filed 2008·Granted Nov 15, 2011·3 cites·24 claims
- 4082US6781138B2Positioning stage with stationary actuatorsNIKON CORP·Filed 2001·Granted Aug 24, 2004·20 cites·36 claims
- 4182US6499880B2Static pressure air bearingNIKON CORP·Filed 2001·Granted Dec 31, 2002·18 cites·15 claims
- 4281US6467960B1Air bearing linear guide for use in a vacuumNIKON CORP·Filed 2000·Granted Oct 22, 2002·16 cites·25 claims
- 4381US6147421APlatform positionable in at least three degrees of freedom by interaction with coilsNIKON CORP·Filed 1998·Granted Nov 14, 2000·44 cites·24 claims
- 4480US6674512B2Interferometer system for a semiconductor exposure systemNIKON CORP·Filed 2001·Granted Jan 6, 2004·25 cites·43 claims
- 4580US6597435B2Reticle stage with reaction force cancellationNIKON CORP·Filed 2001·Granted Jul 22, 2003·17 cites·30 claims
- 4679US7125128B2Adaptive-optics actuator arrays and methods for using such arraysNIKON CORP·Filed 2004·Granted Oct 24, 2006·17 cites·23 claims
- 4778US8243253B2Lyophobic run-off path to collect liquid for an immersion lithography apparatusNOVAK W THOMAS·Filed 2008·Granted Aug 14, 2012·3 cites·20 claims
- 4877US6278203B1Cooling structure for a linear motorNIKON CORP·Filed 1999·Granted Aug 21, 2001·42 cites·17 claims
- 4976US6525802B1Kinematic mounted reference mirror with provision for stable mounting of alignment opticsNIKON CORP·Filed 1999·Granted Feb 25, 2003·13 cites·10 claims
- 5074USRE41232EWafer positioner with planar motor and mag-lev fine stageNIPPON KOGAKU KK·Filed 2004·Granted Apr 20, 2010·15 cites·18 claims
Showing the top 50 of 104 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →