Inventor · disambiguated record
Weston L. Sousa
Also filed as: SOUSA WESTON · SOUSA WESTON L
9 granted patents·37 citations·filing 2006–2021
84Inventor score
Top patents by PatentIndex Score
9 records- 0191US10451563B2Inspection of photomasks by comparing two photomasksKLA TENCOR CORP·Filed 2017·Granted Oct 22, 2019·11 cites·28 claims
- 0281US10866197B2Dispositioning defects detected on extreme ultraviolet photomasksKLA CORP·Filed 2019·Granted Dec 15, 2020·3 cites·28 claims
- 0380US7599051B1Calibration of a substrate inspection toolKLA TENCOR TECH CORP·Filed 2006·Granted Oct 6, 2009·14 cites·39 claims
- 0479US9863761B2Critical dimension uniformity monitoring for extreme ultraviolet reticlesKLA TENCOR CORP·Filed 2013·Granted Jan 9, 2018·5 cites·18 claims
- 0569US9110039B2Auto-focus system and methods for die-to-die inspectionKLA TENCOR CORP·Filed 2014·Granted Aug 18, 2015·3 cites·20 claims
- 0666US9778207B2Integrated multi-pass inspectionKLA TENCOR CORP·Filed 2014·Granted Oct 3, 2017·1 cites·37 claims
- 0758US10288415B2Critical dimension uniformity monitoring for extreme ultra-violet reticlesKLA TENCOR CORP·Filed 2017·Granted May 14, 2019·0 cites·10 claims
- 0855US11557031B2Integrated multi-tool reticle inspectionKLA CORP·Filed 2020·Granted Jan 17, 2023·0 cites·45 claims
- 0953US11727556B2Defect detection for multi-die masksKLA CORP·Filed 2021·Granted Aug 15, 2023·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →