Inventor · disambiguated record
Xinrong Jiang
Also filed as: JIANG XINRONG
36 granted patents·6 pending applications·396 citations·filing 2001–2025
97Inventor score
Top patents by PatentIndex Score
42 records- 0197US8362425B2Multiple-beam system for high-speed electron-beam inspectionKLA TENCOR CORP·Filed 2011·Granted Jan 29, 2013·68 cites·19 claims
- 0296US8664594B1Electron-optical system for high-speed and high-sensitivity inspectionsJIANG XINRONG·Filed 2011·Granted Mar 4, 2014·120 cites·9 claims
- 0396US7821187B1Immersion gun equipped electron beam columnKLA TENCOR CORP·Filed 2008·Granted Oct 26, 2010·38 cites·5 claims
- 0494US11056312B1Micro stigmator array for multi electron beam systemKLA CORP·Filed 2020·Granted Jul 6, 2021·6 cites·30 claims
- 0592US6750455B2Method and apparatus for multiple charged particle beamsAPPLIED MATERIALS INC·Filed 2001·Granted Jun 15, 2004·42 cites·28 claims
- 0691US10096447B1Electron beam apparatus with high resolutionsKLA TENCOR CORP·Filed 2017·Granted Oct 9, 2018·12 cites·18 claims
- 0791US9443696B2Electron beam imaging with dual Wien-filter monochromatorKLA TENCOR CORP·Filed 2015·Granted Sep 13, 2016·9 cites·22 claims
- 0890US7067809B2Method and apparatus for multiple charged particle beamsAPPLIED MATERIALS INC·Filed 2004·Granted Jun 27, 2006·29 cites·24 claims
- 0989US11335608B2Electron beam system for inspection and review of 3D devicesKLA CORP·Filed 2021·Granted May 17, 2022·2 cites·20 claims
- 1087US12165831B2Method and system of image-forming multi-electron beamsKLA CORP·Filed 2022·Granted Dec 10, 2024·1 cites·22 claims
- 1185US11869743B2High throughput multi-electron beam systemKLA CORP·Filed 2021·Granted Jan 9, 2024·1 cites·20 claims
- 1285US10748739B2Deflection array apparatus for multi-electron beam systemKLA TENCOR CORP·Filed 2018·Granted Aug 18, 2020·4 cites·36 claims
- 1383US8859982B2Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currentsJIANG XINRONG·Filed 2012·Granted Oct 14, 2014·6 cites·7 claims
- 1483US7427765B2Electron beam column for writing shaped electron beamsJEOL LTD·Filed 2005·Granted Sep 23, 2008·6 cites·18 claims
- 1582US7262418B2Method and apparatus for multiple charged particle beamsAPPLIED MATERIALS INC·Filed 2004·Granted Aug 28, 2007·14 cites·5 claims
- 1681US9934933B1Extractor electrode for electron sourceKLA TENCOR CORP·Filed 2017·Granted Apr 3, 2018·3 cites·20 claims
- 1781US8294125B2High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting apertureHAN LIQUN·Filed 2009·Granted Oct 23, 2012·11 cites·18 claims
- 1880US10090131B2Method and system for aberration correction in an electron beam systemKLA TENCOR CORP·Filed 2016·Granted Oct 2, 2018·3 cites·44 claims
- 1980US10056224B2Method and system for edge-of-wafer inspection and reviewKLA TENCOR CORP·Filed 2016·Granted Aug 21, 2018·3 cites·27 claims
- 2079US7800075B2Multi-function module for an electron beam columnBULLER BENYAMIN·Filed 2008·Granted Sep 21, 2010·4 cites·12 claims
- 2176US10964522B2High resolution electron energy analyzerKLA TENCOR CORP·Filed 2019·Granted Mar 30, 2021·2 cites·26 claims
- 2276US8536538B2Multiple-pole electrostatic deflector for improving throughput of focused electron beam instrumentsJIANG XINRONG·Filed 2011·Granted Sep 17, 2013·4 cites·3 claims
- 2373US9053900B2Apparatus and methods for high-resolution electron beam imagingJIANG XINRONG·Filed 2012·Granted Jun 9, 2015·3 cites·13 claims
- 2471US8921782B2Tilt-imaging scanning electron microscopeKLA TENCOR CORP·Filed 2013·Granted Dec 30, 2014·2 cites·19 claims
- 2566US9905391B2System and method for imaging a sample with an electron beam with a filtered energy spreadKLA TENCOR CORP·Filed 2015·Granted Feb 27, 2018·1 cites·20 claims
- 2664US8461526B2Electron beam column and methods of using sameMANKOS MARIAN·Filed 2010·Granted Jun 11, 2013·2 cites·15 claims
- 2763US2025357067A1Aberration corrector for scanning electron microscope with multiple electron beamsKLA CORP·Filed 2024·Application pending·0 cites
- 2863US2025357068A1Electron beam inspections with high sensitivity and throughputKLA CORP·Filed 2025·Application pending·0 cites
- 2962US12283453B2Creating multiple electron beams with a photocathode filmKLA CORP·Filed 2022·Granted Apr 22, 2025·0 cites·28 claims
- 3062US12068129B2Tilt-column multi-beam electron microscopy system and methodKLA CORP·Filed 2022·Granted Aug 20, 2024·0 cites·29 claims
- 3162US11651934B2Systems and methods of creating multiple electron beamsKLA CORP·Filed 2021·Granted May 16, 2023·0 cites·20 claims
- 3261US2025357066A1Electron beam metrology having a source energy spread with filtered tailsKLA CORP·Filed 2024·Application pending·0 cites
- 3359US2025112017A1Imaging thousands of electron beams during workpiece inspectionKLA CORP·Filed 2023·Application pending·0 cites
- 3458US12451319B2Electron source with magnetic suppressor electrodeKLA CORP·Filed 2020·Granted Oct 21, 2025·0 cites·12 claims
- 3557US2025273424A1Use of multiple electron beams for high throughput inspectionKLA CORP·Filed 2024·Application pending·0 cites
- 3654US12494339B2High resolution, multi-electron beam apparatusKLA CORP·Filed 2021·Granted Dec 9, 2025·0 cites·13 claims
- 3754US10770258B2Method and system for edge-of-wafer inspection and reviewKLA TENCOR CORP·Filed 2018·Granted Sep 8, 2020·0 cites·19 claims
- 3853US11508591B2High resolution electron beam apparatus with dual-aperture schemesKLA CORP·Filed 2021·Granted Nov 22, 2022·0 cites·21 claims
- 3947US9881764B2Heat-spreading blanking system for high throughput electron beam apparatusKLA TENCOR CORP·Filed 2016·Granted Jan 30, 2018·0 cites·20 claims
- 4047US2018141126A1Transfer of particulate materialVELO3D INC·Filed 2018·Application pending·0 cites
- 4143US12165838B2Joint electron-optical columns for flood-charging and image-forming in voltage contrast wafer inspectionsKLA CORP·Filed 2019·Granted Dec 10, 2024·0 cites·28 claims
- 4240US10224177B2Method and system for aberration correction in an electron beam systemKLA TENCOR CORP·Filed 2016·Granted Mar 5, 2019·0 cites·40 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →