Inventor · disambiguated record
Yong-Pil Han
Also filed as: HAN YONG · HAN YONG-PIL
11 granted patents·4 pending applications·286 citations·filing 1997–2008
90Inventor score
Files withSAMSUNG ELECTRONICS CO LTD9MASSACHUSETTS INST TECHNOLOGY2FSI INT INC1SAMSUNG ELECTRONICS CO L T D1SAMSUNG SDI CO LTD1
Top patents by PatentIndex Score
15 records- 0197US6740247B1HF vapor phase wafer cleaning and oxide etchingMASSACHUSETTS INST TECHNOLOGY·Filed 2000·Granted May 25, 2004·215 cites·10 claims
- 0282US6887137B2Chemical mechanical polishing slurry and chemical mechanical polishing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted May 3, 2005·28 cites·53 claims
- 0378US7153370B2Method of cleaning semiconductor waferSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Dec 26, 2006·5 cites·16 claims
- 0475US6860277B2Single type of semiconductor wafer cleaning deviceSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Mar 1, 2005·16 cites·20 claims
- 0558US7237561B2Apparatus for cleaning semiconductor wafer including heating using a light source and method for cleaning wafer using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Jul 3, 2007·5 cites·10 claims
- 0652US6712078B2Apparatus for cleaning semiconductor wafer and method for cleaning wafer using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Mar 30, 2004·3 cites·7 claims
- 0751US2008277767A1Semiconductor device including a planarized surface and method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
- 0850US7230293B2Storage nodes of a semiconductor memorySAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Jun 12, 2007·0 cites·20 claims
- 0948US6903024B2Method of manufacturing storage nodes of a semiconductor memory device using a two-step etching processSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Jun 7, 2005·1 cites·23 claims
- 1042US2005003669A1HF vapor phase cleaning and oxide etchingMASSACHUSETTS INST TECHNOLOGY·Filed 2004·Application pending·0 cites
- 1141US6107166AVapor phase cleaning of alkali and alkaline earth metalsFSI INT INC·Filed 1997·Granted Aug 22, 2000·9 cites·25 claims
- 1240US7413959B2Semiconductor device including a planarized surface and method thereofSAMSUNG ELECTRONICS CO L T D·Filed 2003·Granted Aug 19, 2008·1 cites·13 claims
- 1336US2003145875A1Apparatus and methods for cleaning semiconductor wafers using vaporized chemicalsSAMSUNG ELECTRONICS CO LTD·Filed 2003·Application pending·0 cites
- 1436US2003062068A1Method of and system for cleaning a semiconductor wafer simultaneously using electrolytically ionized water and diluted hydrofluoric acidFiled 2002·Application pending·0 cites
- 1532US6447983B1Smart photolithographySAMSUNG SDI CO LTD·Filed 1998·Granted Sep 10, 2002·3 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →