Inventor · disambiguated record
Yoichi Tokunaga
Also filed as: TOKUNAGA YOICHI
13 granted patents·3 pending applications·82 citations·filing 1978–2020
90Inventor score
Top patents by PatentIndex Score
16 records- 0193US8828183B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2012·Granted Sep 9, 2014·30 cites·10 claims
- 0290US8578953B2Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage mediumTAKIGUCHI YASUSHI·Filed 2007·Granted Nov 12, 2013·17 cites·21 claims
- 0387US11437252B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Sep 6, 2022·2 cites·10 claims
- 0486US11574827B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Feb 7, 2023·4 cites·16 claims
- 0584US9716002B2Substrate cleaning methodTOKYO ELECTRON LTD·Filed 2016·Granted Jul 25, 2017·3 cites·15 claims
- 0682US9859136B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Jan 2, 2018·5 cites·10 claims
- 0779US9120120B2Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing mediumTOKYO ELECTRON LTD·Filed 2014·Granted Sep 1, 2015·4 cites·6 claims
- 0875US8851092B2Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing mediumYAMAMOTO TARO·Filed 2009·Granted Oct 7, 2014·5 cites·10 claims
- 0964US4210942AVideo signal play-back circuitHITACHI LTD·Filed 1978·Granted Jul 1, 1980·9 cites·8 claims
- 1056US10707102B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Jul 7, 2020·0 cites·6 claims
- 1153US2014102474A1Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1243US11244820B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Feb 8, 2022·0 cites·9 claims
- 1342US2014251539A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1437US10851468B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Dec 1, 2020·0 cites·20 claims
- 1534US4268873AServo circuit for rotary heads of a video tape recorderHITACHI LTD·Filed 1979·Granted May 19, 1981·3 cites·5 claims
- 1629US2015323250A1Substrate processing apparatus, deposit removing method of substrate processing apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yoichi Tokunaga files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →