Inventor · disambiguated record
Yong Min Yoo
Also filed as: YOO YONG M · YOO YONG MIN
25 granted patents·6 pending applications·2,272 citations·filing 2005–2025
96Inventor score
Files withASM IP HOLDING BV17SAMSUNG ELECTRONICS CO LTD6ASM KOREA LTD2ASM GENITECH KOREA LTD1CHOI YOUNG SEOK1
Top patents by PatentIndex Score
31 records- 0199US10032792B2Semiconductor device and manufacturing method thereofASM IP HOLDING BV·Filed 2017·Granted Jul 24, 2018·463 cites·16 claims
- 0299US9899405B2Semiconductor device and manufacturing method thereofASM IP HOLDING BV·Filed 2015·Granted Feb 20, 2018·464 cites·17 claims
- 0399US9029244B2Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2012·Granted May 12, 2015·417 cites·8 claims
- 0498US10249577B2Method of forming metal interconnection and method of fabricating semiconductor apparatus using the methodASM IP HOLDING BV·Filed 2017·Granted Apr 2, 2019·414 cites·16 claims
- 0598US10134757B2Method of processing a substrate and a device manufactured by using the methodASM IP HOLDING BV·Filed 2017·Granted Nov 20, 2018·449 cites·21 claims
- 0696US11195845B2Substrate processing method and device manufactured by the sameASM IP HOLDING BV·Filed 2020·Granted Dec 7, 2021·3 cites·8 claims
- 0796US10622375B2Method of processing a substrate and a device manufactured by using the methodASM IP HOLDING BV·Filed 2018·Granted Apr 14, 2020·9 cites·13 claims
- 0895US10847529B2Substrate processing method and device manufactured by the sameASM IP HOLDING BV·Filed 2018·Granted Nov 24, 2020·10 cites·9 claims
- 0993US10504901B2Substrate processing method and device manufactured using the sameASM IP HOLDING BV·Filed 2018·Granted Dec 10, 2019·10 cites·15 claims
- 1091US10644025B2Method of processing a substrate and a device manufactured by using the methodASM IP HOLDING BV·Filed 2018·Granted May 5, 2020·2 cites·16 claims
- 1190US8778083B2Lateral-flow deposition apparatus and method of depositing film by using the apparatusKIM KI JONG·Filed 2010·Granted Jul 15, 2014·7 cites·13 claims
- 1287US11261523B2Method of depositing silicon oxide filmsASM KOREA LTD·Filed 2020·Granted Mar 1, 2022·2 cites·17 claims
- 1386US12270118B2Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition methodASM IP HOLDING BV·Filed 2024·Granted Apr 8, 2025·0 cites·20 claims
- 1485US9702041B2Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jul 11, 2017·1 cites·4 claims
- 1585US9330899B2Method of depositing thin filmASM IP HOLDING BV·Filed 2013·Granted May 3, 2016·8 cites·26 claims
- 1685US9145609B2Lateral flow atomic layer deposition deviceCHOI YOUNG-SEOK·Filed 2012·Granted Sep 29, 2015·3 cites·9 claims
- 1781US10876218B2Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition methodASM IP HOLDING BV·Filed 2017·Granted Dec 29, 2020·2 cites·8 claims
- 1880US2025207287A1Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition methodASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1979US8076242B2Methods of forming an amorphous silicon thin filmKIM JONG SU·Filed 2009·Granted Dec 13, 2011·6 cites·28 claims
- 2074US12188121B2Method of depositing silicon oxide filmsASM KOREA LTD·Filed 2022·Granted Jan 7, 2025·0 cites·25 claims
- 2172US11965262B2Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition methodASM IP HOLDING BV·Filed 2020·Granted Apr 23, 2024·0 cites·20 claims
- 2272US7708969B2Method of forming metal oxideSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted May 4, 2010·1 cites·10 claims
- 2371US10381226B2Method of processing substrateASM IP HOLDING BV·Filed 2017·Granted Aug 13, 2019·1 cites·20 claims
- 2467US9406502B2Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Aug 2, 2016·0 cites·7 claims
- 2564US2011097905A1Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2010·Application pending·0 cites
- 2662US2006156980A1Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2005·Application pending·0 cites
- 2761US10438965B2Semiconductor device and manufacturing method thereofASM IP HOLDING BV·Filed 2017·Granted Oct 8, 2019·0 cites·8 claims
- 2856US2009041952A1Method of depositing silicon oxide filmsASM GENITECH KOREA LTD·Filed 2008·Application pending·0 cites
- 2953US2010170441A1Method of Forming Metal Oxide and Apparatus for Performing the SameWON SEOK-JUN·Filed 2010·Application pending·0 cites
- 3039US10395921B2Method of forming thin filmASM IP HOLDING BV·Filed 2016·Granted Aug 27, 2019·0 cites·17 claims
- 3136US2006249077A1Multiple inlet atomic layer deposition reactorKIM DAEYOUN·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →