Inventor · disambiguated record
Yurii Victorovitch Sidelnikov
Also filed as: SIDELNIKOV YURII VICTOROVITCH · SIDELNIKOV YURIL VICTOROVITCH
7 granted patents·2 pending applications·44 citations·filing 2004–2011
79Inventor score
Files withASML NETHERLANDS BV6GLUSHKOV DENIS ALEXANDROVICH1IVANOV VLADIMIR VITALEVICH1KRIVTSUN VLADIMIR MIHAILOVITCH1
Top patents by PatentIndex Score
9 records- 0190US7034308B2Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Apr 25, 2006·37 cites·23 claims
- 0274US7928412B2Lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Apr 19, 2011·3 cites·7 claims
- 0368US7629594B2Lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Dec 8, 2009·2 cites·12 claims
- 0465US8018574B2Lithographic apparatus, radiation system and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 13, 2011·2 cites·25 claims
- 0549US7825390B2Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 2, 2010·0 cites·20 claims
- 0643US8294128B2Apparatus with plasma radiation source and method of forming a beam of radiationKRIVTSUN VLADIMIR MIHAILOVITCH·Filed 2010·Granted Oct 23, 2012·0 cites·17 claims
- 0736US2011020752A1Extreme ultraviolet radiation source and method for producing extreme ultraviolet radiationASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 0833US9307624B2Lithographic apparatusGLUSHKOV DENIS ALEXANDROVICH·Filed 2009·Granted Apr 5, 2016·0 cites·15 claims
- 0931US2013070218A1System for removing contaminant particles, lithographic apparatus, method for removing contaminant particles and method for manufacturing a deviceIVANOV VLADIMIR VITALEVICH·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →