Inventor · disambiguated record
Yuji Tsukamoto
Also filed as: TSUKAMOTO YUJI
27 granted patents·5 pending applications·1,442 citations·filing 1986–2022
97Inventor score
Top patents by PatentIndex Score
32 records- 0199US7723648B2Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing systemTOKYO ELECTRON LTD·Filed 2006·Granted May 25, 2010·551 cites·16 claims
- 0298US7297894B1Method for multi-step temperature control of a substrateTOKYO ELECTRON LTD·Filed 2006·Granted Nov 20, 2007·120 cites·20 claims
- 0397US7952049B2Method for multi-step temperature control of a substrateTOKYO ELECTRON LTD·Filed 2007·Granted May 31, 2011·52 cites·34 claims
- 0496US7164236B2Method and apparatus for improved plasma processing uniformityTOKYO ELECTRON LTD·Filed 2004·Granted Jan 16, 2007·66 cites·15 claims
- 0594US5868848APlasma processing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Feb 9, 1999·158 cites·12 claims
- 0690US7230204B2Method and system for temperature control of a substrateTOKYO ELECTRON LTD·Filed 2004·Granted Jun 12, 2007·54 cites·40 claims
- 0789US8207476B2Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing systemTSUKAMOTO YUJI·Filed 2009·Granted Jun 26, 2012·14 cites·18 claims
- 0888US4856326AApparatus for measuring an adhesion force of a thin filmNEC CORP·Filed 1988·Granted Aug 15, 1989·62 cites·12 claims
- 0987US6333842B1Magneto-resistance effect type composite head and production method thereofNEC CORP·Filed 1998·Granted Dec 25, 2001·49 cites·23 claims
- 1084US4839244AMagnetic recording medium with protective layer using graphite fluoride and method of producing sameNEC CORP·Filed 1988·Granted Jun 13, 1989·28 cites·19 claims
- 1181US8034176B2Gas distribution system for a post-etch treatment systemTOKYO ELECTRON LTD·Filed 2006·Granted Oct 11, 2011·9 cites·28 claims
- 1281US7838800B2Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing systemTOKYO ELECTRON LTD·Filed 2006·Granted Nov 23, 2010·6 cites·31 claims
- 1379US6700129B1Electronic board system and coordinates-inputting penHITACHI SOFTWARE ENG·Filed 2000·Granted Mar 2, 2004·39 cites·12 claims
- 1479US6341053B1Magnetic tunnel junction elements and their fabrication methodNEC CORP·Filed 1998·Granted Jan 22, 2002·81 cites·13 claims
- 1579US6330124B1Magnetic disk device using a contact start stop systemNEC CORP·Filed 2000·Granted Dec 11, 2001·12 cites·11 claims
- 1677US8057633B2Post-etch treatment system for removing residue on a substrateTSUKAMOTO YUJI·Filed 2006·Granted Nov 15, 2011·7 cites·28 claims
- 1774USD1030089SSample pretreatment deviceSHIMADZU CORP·Filed 2022·Granted Jun 4, 2024·4 cites·1 claims
- 1874US5781376AMagnetic head with polycrystalline silicon layer on slide running surfaceNEC CORP·Filed 1995·Granted Jul 14, 1998·25 cites·6 claims
- 1972US6639766B2Magneto-resistance effect type composite head and production method thereofNEC CORP·Filed 2001·Granted Oct 28, 2003·8 cites·13 claims
- 2065US6174736B1Method of fabricating ferromagnetic tunnel junction deviceNEC CORP·Filed 1998·Granted Jan 16, 2001·17 cites·14 claims
- 2165US5447796AMagnetic recording medium comprising a solid lubrication layer of fullerene carbon having an alkyl or allyl chainNEC CORP·Filed 1994·Granted Sep 5, 1995·14 cites·4 claims
- 2264US5994035AMethod of producing magnetic head slider of the flying type having a protective coatingNEC CORP·Filed 1998·Granted Nov 30, 1999·18 cites·10 claims
- 2360US5867677ASwitching adapter and method for a computer systemMITSUBISHI ELECTRIC CORP·Filed 1995·Granted Feb 2, 1999·44 cites·31 claims
- 2448US7427357B2Process and apparatus for anaerobic treatment of sulfur compound-containing wastewaterEBARA CORP·Filed 2004·Granted Sep 23, 2008·0 cites·2 claims
- 2546US8450657B2Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing systemTSUKAMOTO YUJI·Filed 2010·Granted May 28, 2013·0 cites·22 claims
- 2643US2003137251A1Method and apparatus for improved plasma processing uniformityFiled 2003·Application pending·0 cites
- 2742US2006027169A1Method and system for substrate temperature profile controlTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 2842US2001013120A1Digital contents rental systemNEC CORP·Filed 2001·Application pending·0 cites
- 2936US2001003845A1Television broadcasting system having an automated charging systemFiled 2000·Application pending·0 cites
- 3035US6181503B1Magnetic disk device using a contact start stop systemNEC CORP·Filed 1997·Granted Jan 30, 2001·2 cites·14 claims
- 3135US4758474AMagnetic recording memberNEC CORP·Filed 1986·Granted Jul 19, 1988·2 cites·13 claims
- 3235US2002013940A1Content rental systemFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →