Inventor · disambiguated record
Zhiwei Xu
Also filed as: XU ZHIWEI · XU ZHIWEI STEVE
21 granted patents·2 pending applications·268 citations·filing 2001–2024
95Inventor score
Top patents by PatentIndex Score
23 records- 0193US7012438B1Methods and systems for determining a property of an insulating filmKLA TENCOR TECH CORP·Filed 2003·Granted Mar 14, 2006·63 cites·30 claims
- 0290US7358748B1Methods and systems for determining a property of an insulating filmKLA TENCOR TECH CORP·Filed 2005·Granted Apr 15, 2008·14 cites·20 claims
- 0389US7103484B1Non-contact methods for measuring electrical thickness and determining nitrogen content of insulating filmsKLA TENCOR TECH CORP·Filed 2003·Granted Sep 5, 2006·54 cites·25 claims
- 0487US7719294B1Systems configured to perform a non-contact method for determining a property of a specimenKLA TENCOR TECH CORP·Filed 2006·Granted May 18, 2010·10 cites·23 claims
- 0587US7248062B1Contactless charge measurement of product wafers and control of corona generation and depositionKLA TENCOR TECH CORP·Filed 2003·Granted Jul 24, 2007·30 cites·19 claims
- 0686US7110238B1Systems and methods for using non-contact voltage sensors and corona discharge gunsKLA TENCOR TECH CORP·Filed 2005·Granted Sep 19, 2006·11 cites·24 claims
- 0780US7075318B1Methods for imperfect insulating film electrical thickness/capacitance measurementKLA TENCOR TECH CORP·Filed 2004·Granted Jul 11, 2006·20 cites·17 claims
- 0878US7064565B1Methods and systems for determining an electrical property of an insulating filmKLA TENCOR TECH CORP·Filed 2003·Granted Jun 20, 2006·21 cites·18 claims
- 0976US6759255B2Method and system for detecting metal contamination on a semiconductor waferKLA TENCOR TECH CORP·Filed 2001·Granted Jul 6, 2004·23 cites·49 claims
- 1075US9255891B2Inspection beam shaping for improved detection sensitivityKLA TENCOR CORP·Filed 2013·Granted Feb 9, 2016·2 cites·18 claims
- 1174US7538333B1Contactless charge measurement of product wafers and control of corona generation and depositionKLA TENCOR TECH CORP·Filed 2006·Granted May 26, 2009·3 cites·18 claims
- 1273US7187186B2Methods and systems for determining one or more properties of a specimenKLA TENCOR TECH CORP·Filed 2005·Granted Mar 6, 2007·6 cites·17 claims
- 1371US6909291B1Systems and methods for using non-contact voltage sensors and corona discharge gunsKLA TENCOR TECH CORP·Filed 2003·Granted Jun 21, 2005·9 cites·14 claims
- 1468US2025354939A1Multi-azimuth illumination and imaging inspection system and methodKLA CORP·Filed 2024·Application pending·0 cites
- 1567US9182358B2Multi-spot defect inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 10, 2015·1 cites·31 claims
- 1662US9194812B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2014·Granted Nov 24, 2015·0 cites·26 claims
- 1756US8786850B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2012·Granted Jul 22, 2014·0 cites·28 claims
- 1852US11733172B2Apparatus and method for rotating an optical objectiveKLA CORP·Filed 2021·Granted Aug 22, 2023·0 cites·38 claims
- 1952US11703460B2Methods and systems for optical surface defect material characterizationKLA CORP·Filed 2020·Granted Jul 18, 2023·0 cites·20 claims
- 2051US12345658B2Large-particle monitoring with laser power control for defect inspectionKLA CORP·Filed 2021·Granted Jul 1, 2025·0 cites·32 claims
- 2151US7397254B1Methods for imperfect insulating film electrical thickness/capacitance measurementKLA TENCOR TECH CORP·Filed 2006·Granted Jul 8, 2008·1 cites·19 claims
- 2248US11181484B1Systems and methods for advanced defect ablation protectionKLA CORP·Filed 2020·Granted Nov 23, 2021·0 cites·20 claims
- 2343US2007126458A1Methods and systems for determining one or more properties of a specimenSHI JIANOU·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →