Polymer containing silphenylene and polyether structures

Abstract

A novel polymer containing silphenylene and polyether structures in the backbone is used to formulate a photosensitive composition having improved reliability.

The invention claimed is: 
     
       1. A polymer containing a silphenylene structure and a polyether structure in the backbone and having an epoxy group and/or phenolic hydroxyl group. 
     
     
       2. The polymer of  claim 1 , having a weight average molecular weight of 3,000 to 500,000. 
     
     
       3. The polymer of  claim 1 , comprising repeating units having the following formulae (1) to (4): 
       
         
           
           
               
               
           
         
       
       
         
           
           
               
               
           
         
       
       
         
           
           
               
               
           
         
       
       
         
           
           
               
               
           
         
       
       wherein X 1  is a divalent group having the following formula (X1), X 2  is a divalent group having the following formula (X2), X 3  is a divalent group having the following formula (X3), X 4  is a divalent group having the following formula (X4), and p, q, r and s are numbers in the range: 0<p<1, 0≤q<1, 0≤r<1, 0≤s<1, 0<q+r+s<1, and p+q+r+s=1, 
       
         
           
           
               
               
           
         
       
       wherein R 1  and R 2  are each independently hydrogen or a C 1 -C 8  monovalent hydrocarbon group, R 3  and R 4  are each independently hydrogen or methyl, a 1  and a 2  are each independently an integer of 1 to 6, and n is an integer of 0 to 100, 
       
         
           
           
               
               
           
         
       
       wherein Y 1  is a single bond, methylene, propane-2,2-diyl, 1,1,1,3,3,3-hexafluoropropane-2,2-diyl or fluorene-9,9-diyl, R 11  and R 12  are each independently hydrogen or methyl, R 13  and R 14  are each independently a C 1 -C 4  alkyl or alkoxy group, b 1  and b 2  are each independently an integer of 0 to 7, and c 1  and c 2  are each independently an integer of 0 to 2, 
       
         
           
           
               
               
           
         
       
       wherein Y 2  is a single bond, methylene, propane-2,2-diyl, 1,1,1,3,3,3-hexafluoropropane-2,2-diyl or fluorene-9,9-diyl, R 21  and R 22  are each independently hydrogen or methyl, R 23  and R 24  are each independently a C 1 -C 4  alkyl or alkoxy group, d 1  and d 2  are each independently an integer of 0 to 7, and e 1  and e 2  are each independently an integer of 0 to 2, 
       
         
           
           
               
               
           
         
       
       wherein R 31  and R 32  are each independently hydrogen or methyl, and f 1  and f 2  are each independently an integer of 0 to 7. 
     
     
       4. The polymer of  claim 3  wherein R 1  and R 2  each are hydrogen. 
     
     
       5. The polymer of  claim 3  wherein n is an integer of 5 to 20.