US11296024B2ActiveUtilityPatentIndex 62
Nested interconnect structure in concentric arrangement for improved package architecture
Est. expiryMay 15, 2040(~13.9 yrs left)· nominal 20-yr term from priority
H10W 74/142H10W 72/9413H10W 44/223H10W 70/09H10W 70/60H10W 90/724H10W 90/722H10W 72/247H10W 72/07254H10W 70/6528H10W 72/241H10W 74/117H10W 74/01H10W 70/685H10W 70/05H10W 74/019H10W 74/014H10P 72/74H10P 72/7424H10W 20/43H10W 90/701H01L 23/528H01L 21/56H01L 23/3128H01L 21/4857H01L 23/49822
62
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Cited by
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References
17
Claims
Abstract
An integrated circuit (IC) package is described. The IC package includes back-end-of-line layers on a substrate. The IC package also includes a nested interconnect structure on the back-end-of-line layers on the substrate. The nested interconnect structure is composed of an inner core pad and an outer ring pad in a concentric arrangement. The IC package further includes a redistribution layer on the nested interconnect structure. The IC package also includes an under bump metallization layer on the redistribution layer to support package balls.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1. An integrated circuit (IC) package, comprising:
back-end-of-line layers on a substrate;
a nested interconnect structure on the back-end-of-line layers on the substrate, in which the nested interconnect structure comprises an inner core pad and an outer ring pad in a concentric arrangement, and in which the inner core pad supports a first network of the IC package and the outer ring pad supports a second network of the IC package;
a redistribution layer on the nested interconnect structure; and
an under bump metallization layer on the redistribution layer to support package balls.
2. The IC package of claim 1 , in which the first network of the IC package comprises a power network and the second network of the IC package comprises a ground network.
3. The IC package of claim 1 , in which the first network of the IC package comprises a signal network and the second network of the IC package comprises a ground network.
4. The IC package of claim 1 , in which the first network of the IC package comprises a first differential signal and the second network of the IC package comprises a second differential signal.
5. The IC package of claim 1 , in which the nested interconnect structure comprises a nested aluminum pad (AP) layer structure comprising a central AP pad and an outer ring AP pad.
6. The IC package of claim 1 , in which the substrate comprises an active die.
7. The IC package of claim 6 , in which the active die comprises a server die.
8. The IC package of claim 6 , in which the active die comprises a radio frequency (RF) die.
9. The IC package of claim 1 , further comprising:
a mold compound on a surface of the redistribution layer and sidewalls of the nested interconnect structure, the back-end-of-line layers, and the substrate.
10. A method for fabricating a nested interconnect structure in a concentric arrangement, comprising:
forming an inner core pad and an outer ring pad in the concentric arrangement to contact back-end-of-line layers on a substrate as the nested interconnect structure;
forming redistribution layers on the nested interconnect structure to separately contact the inner core pad and the outer ring pad;
forming an under bump metallization layer on the redistribution layers to support package balls;
depositing a mold compound on a surface of the substrate, a bonding film, and sidewalls of the nested interconnect structure and the back-end-of-line layers; and
back-grinding the mold compound until the surface of the substrate is exposed.
11. The method of claim 10 , further comprising:
supporting, by the inner core pad, a first network of the IC package; and
supporting, by the outer ring pad, a second network of the IC package.
12. The method of claim 11 , in which the first network of the IC package comprises a power network and the second network of the IC package comprises a ground network.
13. The method of claim 11 , in which the first network of the IC package comprises a signal network and the second network of the IC package comprises a ground network.
14. The method of claim 11 , in which the first network of the IC package comprises a first differential signal and the second network of the IC package comprises a second differential signal.
15. An integrated circuit (IC) package, comprising:
back-end-of-line layers on a substrate;
a nested interconnect structure on the back-end-of-line layers on the substrate, in which the nested interconnect structure comprises an inner core pad and an outer ring pad in a concentric arrangement, and in which the inner core pad supports a first network of the IC package and the outer ring pad supports a second network of the IC package;
a redistribution layer on the nested interconnect structure; and
means for supporting package balls on the redistribution layer.
16. The IC package of claim 15 , in which the first network of the IC package comprises a power network and the second network of the IC package comprises a ground network.
17. The IC package of claim 15 , in which the first network of the IC package comprises a first differential signal and the second network of the IC package comprises a second differential signal.Cited by (0)
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