US11652060B2ActiveUtilityA1

Die interconnection scheme for providing a high yielding process for high performance microprocessors

82
Assignee: INTEL CORPPriority: Dec 28, 2018Filed: Dec 28, 2018Granted: May 16, 2023
Est. expiryDec 28, 2038(~12.5 yrs left)· nominal 20-yr term from priority
H10W 90/722H10W 72/247H10W 72/07254H10W 90/00H10P 74/23H10P 54/00H10W 90/10H10W 72/853H10W 20/20H10W 72/0198H10W 20/43H10W 70/611H10W 72/00H10W 42/60H10W 90/401H10W 70/635H10W 90/701H10W 70/65H01L 23/528H01L 24/24H01L 2224/24137H01L 2224/16145H01L 23/5386H01L 24/94H01L 22/20H01L 24/73H01L 24/16H01L 21/78H01L 23/481H01L 25/18H01L 2224/73209
82
PatentIndex Score
3
Cited by
14
References
20
Claims

Abstract

A method is disclosed. The method includes a plurality of semiconductor sections and an interconnection structure connecting the plurality of semiconductor sections to provide a functionally monolithic base die. The interconnection structure includes one or more bridge die to connect one or more of the plurality of semiconductor sections to one or more other semiconductor sections or a top layer interconnect structure that connects the plurality of semiconductor sections or both the one or more bridge die and the top layer interconnect structure.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A die, comprising:
 a plurality of semiconductor sections; and 
 an interconnection structure connecting the plurality of semiconductor sections to provide a functionally monolithic base die, wherein the interconnection structure includes a top layer interconnect structure that connects the plurality of semiconductor sections, and the interconnection structure includes a bridge die, the bridge die on a side of the plurality of semiconductor sections opposite the top layer interconnect structure. 
 
     
     
       2. The die of  claim 1 , wherein the top layer interconnect structure includes stitch wires that connect top layer interconnects that correspond to a first semiconductor section to top layer interconnects that correspond to a second semiconductor section. 
     
     
       3. The die of  claim 1 , wherein the bridge die is connected above first and second semiconductor sections. 
     
     
       4. The die of  claim 1 , wherein the bridge die is connected underneath first and second semiconductor sections. 
     
     
       5. The die of  claim 1 , wherein the bridge die includes interconnect input/output (I/O) logic. 
     
     
       6. The die of  claim 1 , wherein the bridge die includes a plurality of SRAM semiconductor layers. 
     
     
       7. The die of  claim 1 , wherein the plurality of semiconductor sections includes separable quadrants. 
     
     
       8. A package, comprising:
 a package substrate; 
 a die on the package substrate including: 
 a plurality of semiconductor sections; and 
 an interconnection structure connecting the plurality of semiconductor sections to provide a functionally monolithic base die, wherein the interconnection structure includes a top layer interconnect structure that connects the plurality of semiconductor sections, and the interconnection structure includes a bridge die, the bridge die on a side of the plurality of semiconductor sections opposite the top layer interconnect structure; and 
 a computation die above each of the semiconductor sections. 
 
     
     
       9. The package of  claim 8 , wherein the top layer interconnect structure includes stitch wires that connect top layer interconnects that correspond to a first semiconductor section to top layer interconnects that correspond to a second semiconductor section. 
     
     
       10. The package of  claim 8 , wherein the bridge die is connected above first and second semiconductor sections. 
     
     
       11. The package of  claim 8 , wherein the bridge die is connected underneath first and second semiconductor sections. 
     
     
       12. The package of  claim 8 , wherein the bridge die includes interconnect input/output (I/O) logic. 
     
     
       13. The package of  claim 8 , wherein the bridge die includes a plurality of SRAM semiconductor layers. 
     
     
       14. The package of  claim 8 , wherein the plurality of semiconductor sections includes separable quadrants. 
     
     
       15. A method, comprising:
 forming stitching structures to connect interconnects corresponding to die quadrants of sets of die quadrants on a wafer; 
 
       singulating the wafer into the sets of die quadrants and testing the sets of die quadrants; 
       determining if all of the quadrants of the sets of die quadrants pass testing;
 if all of the quadrants of a set of die quadrants pass testing, harvesting the set of die quadrants on a single semiconductor base; and 
 if all of the quadrants of the set of die quadrants do not pass testing, performing a second singulation and leaving one or more functional die quadrants of the set of die quadrants. 
 
     
     
       16. The method of  claim 15 , further comprising:
 forming one or more bridge die to connect the one or more functional die quadrants to one or more other functional die quadrants. 
 
     
     
       17. The method of  claim 15 , wherein forming the stitching structures include forming stitch wires that connect top layer interconnects that correspond to a first die quadrant to top layer interconnects that correspond to a second die quadrant. 
     
     
       18. The method of  claim 16 , wherein the forming the one or more bridge die includes connecting the bridge die above the one or more functional die quadrants and the one or more other functional die quadrants. 
     
     
       19. The method of  claim 16 , wherein the forming the one or more bridge die includes connecting the bridge die underneath the one or more functional die quadrants and the one or more other functional die quadrants. 
     
     
       20. The method of  claim 16 , wherein forming the one or more bridge die includes forming an interconnect to input/output (I/O) logic.

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