Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object

Abstract

At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.

1 .- 7 . (canceled)  
   
   
       8 . An inspection method for inspecting the electrical characteristics of an inspection object, the inspection method comprising: 
 (a) mounting the inspection object on a mounting surface of a stage;    (b) bringing at least one pair of probes in contact with at least one additional electrode on the second surface of the inspection object;    (c) applying a voltage to the at least one pair of probes so as to generate a fritting phenomenon and forming an electrical path between each probe of the pair of probes and the at least one additional electrode by using the fritting phenomenon; and    (d) connecting both probes of the at least one pair of probes to a test circuit.    
   
   
       9 . An inspection method for inspecting the electrical characteristics of an inspection object according to  claim 8 , wherein the voltage applied to both probes when generating the fritting phenomenon has reversed polarity to each other, and the voltage applied to both probes when inspecting the electrical characteristics of an inspection object has the same potential.  
   
   
       10 . The inspection method according to  claim 8 , wherein the mounting surface of the stage comprises at least one pair of electrodes, the at least one pair of electrodes having a first electrode and a second electrode, the inspection object having a first surface and a second surface, the first surface comprising at least one conductive layer, the inspection object being mounted on the mounting surface such that the conductive layer is in the contact with the at least one pair of electrodes; and the inspection method further comprising: 
 (e) applying a voltage to the at least one pair of electrodes on the stage so as to generate a fritting phenomenon, and forming an electrical path between the at least one pair of electrodes and the conductive layer by using the fritting phenomenon.    
   
   
       11 . The inspection method according to  claim 10 , further comprising: before or after the step (e), or at the same time, 
 (c) with at least one pair of probes kept in contact with at least one additional electrode on the second surface of the inspection object, applying a voltage to the pair of probes so as to generate a frifting phenomenon, and forming an electrical path between the both probes of the pair of probes and the at least one additional electrode by using the fritting phenomenon.    
   
   
       12 . The inspection method according to  claim 10 , wherein the inspection object is a power-system device.  
   
   
       13 . The inspection method according to  claim 10 , wherein the at least one pair of electrodes comprises more than one pair of electrodes.  
   
   
       14 . An inspection apparatus for inspecting electrical characteristics of an inspection object, comprising: 
 a stage, on which the inspection object is mounted, the stage comprising a mount surface which mounts the inspection object,    a probe card disposed above the stage and having at least one pair of probes;    a first fritting power supply which applies a frifting voltage to both probes of the pair of probes which makes contact with an electrodes on a second surface of the inspection object and electrode.    
   
   
       15 . The inspection apparatus according to  claim 14 , wherein a fritting phenomenon generate by applying a voltage to said plurality of both probes of the pair of probes, the inspection apparatus further comprising: 
 a test circuit;    a fritting circuit having a fritting power source;    wherein when generating a frifting phenomenon, a fritting circuit connects both probes to the fitting power source so as to have reversed polarity and applies a voltage so that both probes have reversed polarity to each other, and when inspecting the electrical characteristics of an inspection object, one probe is connected to a monitor signal line of the test circuit to transmit a monitor signal by the monitor signal line, and the other probe is connected to an inspection signal line of the test circuit to transmit an inspection signal by the inspection signal line.    
   
   
       16 . The inspection apparatus according to  claim 14 , wherein the mounting surface of the stage comprises at least one pair of electrodes, the at least one pair of electrodes having a first electrode and a second electrode, the inspection object having a first surface and a second surface, the first surface comprising at least one conductive layer, the inspection object being mounted on the mounting surface such that the conductive layer is in the contact with the at least one pair of electrodes; and 
 the inspection method further comprising:    a second fritting power supply, the second fritting power supply applying a voltage to the at least one pair of electrodes on the stage so as to generate a fritting phenomenon, and forming an electrical path between the at least one pair of electrodes and the conductive layer by using the fritting phenomenon.    
   
   
       17 . The inspection apparatus according to  claim 16 , wherein, before or after the step (e), or at the same time, the second fritting power supply applying a voltage to the pair of probes so as to generate a fritting phenomenon with at least one pair of probes kept in contact with at least one additional electrode on the second surface of the inspection object, and forming an electrical path between each probe of the pair of probes and the at least one additional electrode by using the fritting phenomenon.  
   
   
       18 . The inspection apparatus according to  claim 16 , wherein the inspection object is a power-system device.  
   
   
       19 . The inspection apparatus according to  claim 16 , wherein the at least one pair of electrodes comprises more than one pair of electrodes.  
   
   
       20 . The inspection apparatus according to  claim 14 , wherein a connector connects the both probes of the pair of electrodes to test circuit after the fritting power supply forms the an electrical path between the at least one pair of electrodes and the conductive layer.  
   
   
       21 . The inspection apparatus according to  claim 17 , wherein a connector connects the at least one pair of electrodes to a test circuit after the fritting power supply forms an electrical path between the both probes of the pair of probes and the at least one additional electrode.