Inventor · disambiguated record
Shigekazu Komatsu
Also filed as: KOMATSU SHIGEKAZU
24 granted patents·5 pending applications·215 citations·filing 2003–2023
95Inventor score
Top patents by PatentIndex Score
29 records- 0195US7026832B2Probe mark reading device and probe mark reading methodTOKYO ELECTRON LTD·Filed 2003·Granted Apr 11, 2006·120 cites·13 claims
- 0291US7262613B2Inspection method and inspection apparatus for inspecting electrical characteristics of inspection objectTOKYO ELECTRON LTD·Filed 2005·Granted Aug 28, 2007·16 cites·13 claims
- 0386US12117485B2Wafer inspection systemTOKYO ELECTRON LTD·Filed 2023·Granted Oct 15, 2024·0 cites·1 claims
- 0484US11762012B2Wafer inspection systemTOKYO ELECTRON LTD·Filed 2022·Granted Sep 19, 2023·0 cites·2 claims
- 0584US7262618B2Inspection method and inspection apparatus for inspecting electrical characteristics of inspection objectTOKYO ELECTRON LTD·Filed 2006·Granted Aug 28, 2007·8 cites·6 claims
- 0682US7221177B2Probe apparatus with optical length-measuring unit and probe testing methodTOKYO ELECTRON LTD·Filed 2005·Granted May 22, 2007·11 cites·17 claims
- 0782US7135883B2Inspection method and inspection apparatus for inspecting electrical characteristics of inspection objectTOKYO ELECTRON LTD·Filed 2005·Granted Nov 14, 2006·7 cites·10 claims
- 0880US9671459B2Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jun 6, 2017·2 cites·5 claims
- 0980US7586317B2Inspection apparatus, probe card and inspection methodTOKYO ELECTRON LTD·Filed 2008·Granted Sep 8, 2009·8 cites·13 claims
- 1079US7224175B2Probe mark reading device and probe mark reading methodTOKYO ELECTRON LTD·Filed 2006·Granted May 29, 2007·6 cites·6 claims
- 1176US11567123B2Wafer inspection systemTOKYO ELECTRON LTD·Filed 2021·Granted Jan 31, 2023·0 cites·3 claims
- 1274US11061071B2Wafer inspection system, wafer inspection apparatus and proberTOKYO ELECTRON LTD·Filed 2020·Granted Jul 13, 2021·0 cites·5 claims
- 1374US10976364B2Test head and wafer inspection apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Apr 13, 2021·0 cites·6 claims
- 1467US7750654B2Probe method, prober, and electrode reducing/plasma-etching processing mechanismOCTEC INC·Filed 2005·Granted Jul 6, 2010·5 cites·27 claims
- 1567US2020064400A1Wafer inspection system, wafer inspection apparatus and proberTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1666US7301357B2Inspection method and inspection equipmentTOKYO ELECTRON LTD·Filed 2003·Granted Nov 27, 2007·13 cites·10 claims
- 1764US8766658B2ProbeKOMATSU SHIGEKAZU·Filed 2009·Granted Jul 1, 2014·2 cites·11 claims
- 1864US7688088B2Inspection method and inspection apparatus for inspecting electrical characteristics of inspection objectTOKYO ELECTRON LTD·Filed 2008·Granted Mar 30, 2010·1 cites·12 claims
- 1963US10753972B2Wafer inspection system, wafer inspection apparatus and proberTOKYO ELECTRON LTD·Filed 2017·Granted Aug 25, 2020·0 cites·7 claims
- 2063US8159245B2Holding member for inspection, inspection device and inspecting methodKOMATSU SHIGEKAZU·Filed 2007·Granted Apr 17, 2012·5 cites·10 claims
- 2161US8723544B2Structure of probe card for inspecting electrical characteristics of object to be inspectedKOMATSU SHIGEKAZU·Filed 2009·Granted May 13, 2014·2 cites·9 claims
- 2261US8471585B2Method for evaluating semiconductor deviceMIYAZONO MITSUYOSHI·Filed 2010·Granted Jun 25, 2013·2 cites·6 claims
- 2359US8468690B2Holding member for use in test and method for manufacturing sameKUMAGAI YASUNORI·Filed 2008·Granted Jun 25, 2013·4 cites·11 claims
- 2459US7701241B2Circuit for protecting DUT, method for protecting DUT, testing apparatus and testing methodTOKYO ELECTRON LTD·Filed 2007·Granted Apr 20, 2010·3 cites·14 claims
- 2552US2007063725A1Inspection method and inspection apparatus for inspecting electrical characteristics of inspection objectTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 2642US7692435B2Probe card and probe device for inspection of a semiconductor deviceTOKYO ELECTRON LTD·Filed 2007·Granted Apr 6, 2010·0 cites·8 claims
- 2741US2015145540A1Semiconductor inspection system and method for preventing condenation at interface partTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 2836US2012194213A1Probe cardKOMATSU SHIGEKAZU·Filed 2010·Application pending·0 cites
- 2935US2012180475A1Actuator and sheet-shaped actuatorSHIMIZU MASAHIRO·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →