Substrate holding apparatus and polishing apparatus

Abstract

The present invention relates to a substrate holding apparatus for holding a substrate such as a semiconductor wafer in a polishing apparatus for polishing the substrate to a flat finish. The substrate holding apparatus according to the present invention comprises a top ring body having a receiving space therein, and a vertically movable member which is vertically movable within the receiving space in the top ring body. An abutment member having an elastic membrane is attached to a lower surface of the vertically movable member. The elastic membrane of the abutment member comprises an abutment portion, having a flange projecting outwardly, brought into direct or indirect contact with the substrate, and a connecting portion extending upwardly from a base portion of the flange of the abutment portion and being connected to the vertically movable member. The connecting portion is made of a material having a flexibility higher than that of material of the abutment portion.

1 - 23 . (canceled) 
     
     
         24 . An elastic membrane to be brought into contact with a substrate, said elastic membrane comprising:
 an abutment portion configured to be brought into direct contact with the substrate;   a first annular connecting portion extending upwardly from said abutment portion to form a first wall; and   a second annular connecting portion extending upwardly from said abutment portion to form a second wall,   wherein said first annular connecting portion and said second annular connecting portion are concentric with each other, and   wherein said second annular connecting portion is located radially outwardly of said first annular connecting portion.   
     
     
         25 . The elastic membrane according to  claim 24 , wherein said elastic membrane is made of an elastic material. 
     
     
         26 . The elastic membrane according to  claim 24 , wherein said first annular connecting portion is thinner than said second annular connecting portion. 
     
     
         27 . The elastic membrane according to  claim 24 , further comprising a portion to be held by an elastic membrane holder. 
     
     
         28 . The elastic membrane according to  claim 24 , wherein said abutment portion has an opening. 
     
     
         29 . An elastic membrane for use in a substrate holding apparatus for holding a substrate and pressing the substrate against a polishing surface, said elastic membrane comprising:
 an abutment portion configured to be brought into direct or indirect contact with the substrate; and   a connecting portion extending upwardly from said abutment portion, said connecting portion having a thin portion which is thinner than said abutment portion.   
     
     
         30 . The elastic membrane according to  claim 29 , wherein said thin portion is formed so as to be constricted inwardly in cross-section. 
     
     
         31 . The elastic membrane according to  claim 29 , further comprising a portion to be held by an elastic membrane holder. 
     
     
         32 . The elastic membrane according to  claim 29 , wherein said abutment portion has an opening. 
     
     
         33 . An elastic membrane for use in a substrate holding apparatus for holding a substrate and pressing the substrate against a polishing surface, the substrate holding apparatus including a top ring body having a space formed therein and a vertically movable member capable of moving vertically in the space of the top ring body, said elastic membrane comprising:
 an abutment portion configured to be brought into direct or indirect contact with the substrate, said abutment portion being located below the vertically movable member; and   a connecting portion extending upwardly from said abutment portion and to be connected to the vertically movable member, said connecting portion having a thin portion which is thinner than said abutment portion.   
     
     
         34 . The elastic membrane according to  claim 33 , wherein said thin portion is formed so as to be constricted inwardly in cross-section. 
     
     
         35 . The elastic membrane according to  claim 33 , further comprising a portion to be held by an elastic membrane holder. 
     
     
         36 . The elastic membrane according to  claim 33 , wherein said abutment portion has an opening. 
     
     
         37 . An elastic membrane for use in a substrate holding apparatus, said elastic membrane comprising:
 an abutment portion configured to be brought into direct or indirect contact with a substrate, said abutment portion having a flange projecting outwardly; and   a connecting portion extending upwardly from a base portion of said flange, wherein said abutment portion, said flange, and said connecting portion are formed integrally, and   wherein said connecting portion is made of a material that is different from a material of said abutment portion.   
     
     
         38 . The elastic membrane according to  claim 37 , wherein said abutment portion is made of a rubber material, and said connecting portion is made of a material harder than said rubber material. 
     
     
         39 . The elastic membrane according to  claim 37 , wherein said abutment portion is made of ethylene propylene rubber, polyurethane rubber, or silicone rubber. 
     
     
         40 . The elastic membrane according to  claim 37 , further comprising a portion to be held by an elastic membrane holder. 
     
     
         41 . The elastic membrane according to  claim 37 , wherein said abutment portion has an opening. 
     
     
         42 . An elastic membrane for use in a substrate holding apparatus, said elastic membrane comprising:
 an abutment portion configured to be brought into direct or indirect contact with a substrate, said abutment portion having a flange projecting outwardly;   a connecting portion extending upwardly from a base portion of said flange; and   a member detachably attached to a lower surface of said base portion of said flange,   wherein said abutment portion, said flange, and said connecting portion are formed integrally.   
     
     
         43 . The elastic membrane according to  claim 42 , wherein said member has a lower adhesiveness to the substrate than an adhesiveness of said abutment portion to the substrate. 
     
     
         44 . The elastic membrane according to  claim 42 , wherein said abutment portion is made of ethylene propylene rubber, polyurethane rubber, or silicone rubber. 
     
     
         45 . The elastic membrane according to  claim 42 , further comprising a portion to be held by an elastic membrane holder. 
     
     
         46 . The elastic membrane according to  claim 42 , wherein said abutment portion has an opening. 
     
     
         47 . An elastic membrane for use in a substrate holding apparatus, said elastic membrane comprising:
 an abutment portion configured to be brought into direct or indirect contact with a substrate, said abutment portion having a flange projecting outwardly;   a connecting portion extending upwardly from a base portion of said flange; and   a hard member embedded in said base portion of said flange, said hard member being made of a material harder than material of said abutment portion, said flange, and said connecting portion,   wherein said abutment portion, said flange, and said connecting portion are formed integrally.   
     
     
         48 . The elastic membrane according to  claim 47 , wherein said abutment portion is made of ethylene propylene rubber, polyurethane rubber, or silicone rubber. 
     
     
         49 . The elastic membrane according to  claim 47 , further comprising a portion to be held by an elastic membrane holder. 
     
     
         50 . The elastic membrane according to  claim 47 , wherein said abutment portion has an opening.