Surface treatment method, shower head, processing container, and processing apparatus using them

Abstract

The method of the present invention includes: a first blasting step of carrying out blasting of the surface of a metal base material, such as a shower head or a processing container, by using a blasting material composed of a non-sublimable material (e.g. alumina); and a second blasting step of carrying out blasting of the surface of the metal base material, which has undergone the first blasting step, by using a blasting material composed of a sublimable material (e.g. dry ice). The first blasting step properly roughens the surface of the metal base material so that a film, which adheres to the surface during film-forming processing, hardly peels off. In addition, the second blasting step almost fully removes the residual non-sublimable blasting material adhering to the surface of the metal base material, thereby preventing the generation of particles deriving from the residual non-sublimable blasting material falling off the metal base material.

1 . A surface treatment method for performing predetermined surface treatment of a metal base material, comprising:
 a first blasting step of carrying out blasting of the surface of the metal base material by using a non-sublimable blasting material composed of a non-sublimable material; and   a second blasting step of carrying out blasting of the surface of the metal base material, which has undergone the first blasting step, by using a sublimable blasting material composed of a sublimable material.   
     
     
         2 . The surface treatment method according to  claim 1 , further comprising a cleaning step of cleaning the surface of the metal base material which has undergone the second blasting step. 
     
     
         3 . The surface treatment method according to  claim 1 , wherein the non-sublimable blasting material is a material selected from the group consisting of a ceramic material, a resin, a metal oxide and quartz. 
     
     
         4 . The surface treatment method according to  claim 1 , wherein the non-sublimable blasting material is a ceramic material selected from alumina (Al 2 O 3 ), aluminum nitride (AlN), silicon nitride (SiN) and silicon carbide (SiC). 
     
     
         5 . The surface treatment method according to  claim 1 , wherein the non-sublimable blasting material is a metal oxide which is ZrO 2  or TiO 2 . 
     
     
         6 . The surface treatment method according to  claim 1 , wherein the sublimable blasting material is dry ice. 
     
     
         7 . The surface treatment method according to  claim 1 , wherein the metal base material is a shower head for use in a processing apparatus for carrying out predetermined processing of a processing object. 
     
     
         8 . The surface treatment method according to  claim 1 , wherein the metal base material is a processing container for use in a processing apparatus for carrying out predetermined processing of a processing object. 
     
     
         9 . The surface treatment method according to  claim 1 , wherein the first and second blasting steps are carried out only on a selected area of the surface of the metal base material. 
     
     
         10 . The surface treatment method according to  claim 9 , wherein the metal base material is a shower head for use in a processing apparatus for carrying out predetermined processing of a processing object, and wherein the first and second blasting steps are carried out only on an area around each of gas jet holes provided in the shower head. 
     
     
         11 . A shower head which has undergone the surface treatment according to  claim 7 . 
     
     
         12 . A processing container which has undergone the surface treatment according to  claim 8 . 
     
     
         13 . A processing apparatus for performing predetermined processing of a processing object, comprising:
 the processing container according to  claim 12 ;   the shower head according to  claim 11 ;   a stage, for placing the processing object thereon, provided in the processing container; and   an exhaust system for evacuating the atmosphere in the processing container.