Method and apparatus for charged particle beam inspection

Abstract

A charged particle beam inspection apparatus comprises: an electron gun for irradiating an electron beam onto a sample; a detector for detecting a signal obtained from the sample; an image processor for forming an image from the signal obtained from the detector, and an energy controller for controlling the beam energy of the electron beam to be irradiated onto the sample. An identical charged particle beam inspection apparatus carries out a plurality of types of inspections. An inspection apparatus of a projection type may be applied thereto. A pattern defect inspection, a foreign material inspection, and an inspection for a defect in a multilayer are carried out. Beam energies E 1 , E 2 , and E 3 in those inspections have a relation E 1 >E 2 and E 3 >E 2 . Charge removal is performed in a transport chamber or other vacuum chamber before an inspection.

1 . A charged particle beam inspection apparatus, comprising:
 a stage for supporting an object to be inspected;   a charged particle beam source for irradiating a charged particle beam onto the object to be inspected;   a detector for detecting a signal obtained from the object to be inspected;   an image processor for forming an image from the signal obtained from the detector;   an energy controller for controlling the beam energy of the charged particle beam to be irradiated onto the object to be inspected;   a main chamber for maintaining the object to be inspected in a vacuum;   a transport robot for transporting the object to be inspected to the main chamber;   a transport chamber for maintaining the transport robot in a vacuum; and   a charge removal apparatus provided in the transport chamber.   
     
     
         2 . A charged particle beam inspection apparatus, comprising:
 a stage for supporting an object to be inspected;   a charged particle beam source for irradiating a charged particle beam onto the object to be inspected;   a detector for detecting a signal obtained from the object to be inspected;   an image processor for forming an image from the signal obtained from the detector; and   an energy controller for controlling the beam energy of the charged particle beam to be irradiated onto the object to be inspected,   a main chamber for maintaining the object to be inspected in a vacuum; and   a charge removal apparatus provided in the main chamber.   
     
     
         3 . The charged particle beam inspection apparatus according to  claim 2 , wherein the charge removal apparatus arranged such that the charge removal is performed at a place downstream of the beam irradiation region along the traveling direction of the inspections. 
     
     
         4 . The charged particle beam inspection apparatus according to  claim 1 , wherein the charge removal apparatus comprises an X-ray irradiator and a gas supply unit which has a gas jet nozzle and an open/close valve. 
     
     
         5 . The charged particle beam inspection apparatus according to  claim 2 , wherein the charge removal apparatus comprises an X-ray irradiator and a gas supply unit which has a gas jet nozzle and an open/close valve. 
     
     
         6 . The charged particle beam inspection apparatus according to  claim 3 , wherein the charge removal apparatus comprises an X-ray irradiator and a gas supply unit which has a gas jet nozzle and an open/close valve. 
     
     
         7 . The charged particle beam inspection apparatus according to  claim 1 , wherein the charge removal apparatus comprises an X-ray irradiator and an X-ray mirror for guiding X-rays to an irradiation region, and a plurality of gas jet nozzles arranged around the X-ray mirror. 
     
     
         8 . The charged particle beam inspection apparatus according to  claim 2 , wherein the charge removal apparatus comprises an X-ray irradiator and an X-ray mirror for guiding X-rays to an irradiation region, and a plurality of gas jet nozzles arranged around the X-ray mirror. 
     
     
         9 . The charged particle beam inspection apparatus according to  claim 3 , wherein the charge removal apparatus comprises an X-ray irradiator and an X-ray mirror for guiding X-rays to an irradiation region, and a plurality of gas jet nozzles arranged around the X-ray mirror. 
     
     
         10 . An inspection method using a charged particle beam, the method comprising:
 irradiating a charged particle beam onto an object to be inspected;   detecting a signal obtained from the object to be inspected; and   forming an image from the detected signal,   wherein an identical charged particle beam inspection apparatus carries out a pattern defect inspection, a particle inspection and multilayer defect inspection sequentially in time with the pattern defect inspection being carried out first, then a particle inspection and then multilayer defect inspection, and   wherein the beam irradiation area in the pattern defect inspection is set larger than the area where a pattern is located.