Inventor · disambiguated record
Takumi Ota
Also filed as: OTA TAKUMI
23 granted patents·23 pending applications·106 citations·filing 1997–2025
94Inventor score
Top patents by PatentIndex Score
46 records- 0188US8560977B2Drop recipe creating method, database creating method and mediumMATSUOKA YASUO·Filed 2011·Granted Oct 15, 2013·8 cites·3 claims
- 0288US8368018B2Method and apparatus for charged particle beam inspectionEBARA CORP·Filed 2009·Granted Feb 5, 2013·11 cites·21 claims
- 0387US7435978B2System, method and a program for correcting conditions for controlling a charged particle beam for lithography and observation, and a program and method for manufacturing a semiconductor deviceTOSHIBA KK·Filed 2005·Granted Oct 14, 2008·10 cites·20 claims
- 0485US7242014B2Charged particle beam drawing equipment, method of adjusting aperture mask, and method of manufacturing semiconductor deviceTOSHIBA KK·Filed 2005·Granted Jul 10, 2007·9 cites·16 claims
- 0583US7202488B2Correction system, method of correcting deflection distortion, program and method for manufacturing a semiconductor deviceTOSHIBA KK·Filed 2004·Granted Apr 10, 2007·18 cites·20 claims
- 0671USRE46901EDrop recipe creating method, database creating method and mediumTOSHIBA MEMORY CORP·Filed 2015·Granted Jun 19, 2018·1 cites·35 claims
- 0771US9108343B2Template treatment methodOTA TAKUMI·Filed 2012·Granted Aug 18, 2015·2 cites·18 claims
- 0869US2025208068A1Information processing system, information processing method, program and information processing apparatusRIGAKU DENKI CO LTD·Filed 2024·Application pending·0 cites
- 0968US2025093284A1Correction apparatus, correction method, and correction programRIGAKU DENKI CO LTD·Filed 2024·Application pending·0 cites
- 1065US7985958B2Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing programTOSHIBA KK·Filed 2005·Granted Jul 26, 2011·1 cites·5 claims
- 1164US8906281B2Imprint method, imprinting equipment, and method for manufacturing semiconductor deviceHATANO MASAYUKI·Filed 2012·Granted Dec 9, 2014·1 cites·10 claims
- 1264US8221827B2Patterning methodTOKUE HIROSHI·Filed 2009·Granted Jul 17, 2012·1 cites·10 claims
- 1364US6009053AOptical disk vibration sensing and reproducing deviceTOKYO SANYO ELECTRIC CO·Filed 1998·Granted Dec 28, 1999·15 cites·13 claims
- 1463US5886966AOptical disk vibration sensing and reproducing deviceSANYO ELECTRIC CO·Filed 1997·Granted Mar 23, 1999·17 cites·11 claims
- 1563US2025308097A1Information processing system, information processing apparatus, information processing method, and programRIGAKU DENKI CO LTD·Filed 2025·Application pending·0 cites
- 1662US12106403B2Center shift amount estimating apparatus, method, and programRIGAKU DENKI CO LTD·Filed 2021·Granted Oct 1, 2024·0 cites·10 claims
- 1762US11885754B2Tolerance error estimating apparatus, method, program, reconstruction apparatus and control apparatusRIGAKU DENKI CO LTD·Filed 2022·Granted Jan 30, 2024·0 cites·12 claims
- 1861US9437414B2Pattern forming device and semiconductor device manufacturing methodOTA TAKUMI·Filed 2012·Granted Sep 6, 2016·1 cites·5 claims
- 1960US2024133829A1Processing apparatus, system, method, and program for applying non-negative matrix factorization to a measured profile of x-ray powder diffractionRIGAKU DENKI CO LTD·Filed 2023·Application pending·0 cites
- 2059US2024202994A1Correction apparatus, method and program for correcting artifactsRIGAKU DENKI CO LTD·Filed 2023·Application pending·0 cites
- 2157USRE39491EOptical disk vibration sensing and reproducing deviceTOKYO SANYO ELECTRIC CO·Filed 2004·Granted Feb 20, 2007·3 cites·11 claims
- 2257US2024005569A1Correction apparatus, system, method, and programRIGAKU DENKI CO LTD·Filed 2023·Application pending·0 cites
- 2355US9216539B2Imprinting apparatus, imprinting method, and manufacturing method of uneven plateTOSHIBA KK·Filed 2014·Granted Dec 22, 2015·0 cites·10 claims
- 2453US2023097836A1Correction apparatus, system, method, and program for correcting motion artifactsRIGAKU DENKI CO LTD·Filed 2022·Application pending·0 cites
- 2552US7482604B2Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor deviceTOSHIBA KK·Filed 2006·Granted Jan 27, 2009·0 cites·20 claims
- 2652US2022414955A1Angle error estimating apparatus, method and programRIGAKU DENKI CO LTD·Filed 2022·Application pending·0 cites
- 2751US6081491AOptical disk vibration sensing and reproducing deviceSANYO ELECTRIC CO·Filed 1999·Granted Jun 27, 2000·8 cites·11 claims
- 2851US2024273786A1Correction device, system, method, and programRIGAKU DENKI CO LTD·Filed 2022·Application pending·0 cites
- 2951US2009206280A1Charged-beam exposure apparatus having an improved alignment precision and exposure methodKOSHIBA TAKESHI·Filed 2009·Application pending·0 cites
- 3050US7459705B2Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor deviceTOSHIBA KK·Filed 2006·Granted Dec 2, 2008·0 cites·16 claims
- 3150US2013119251A1Method and apparatus for charged particle beam inspectionEBARA CORP·Filed 2013·Application pending·0 cites
- 3249US7889910B2Character pattern extracting method, charged particle beam drawing method, and character pattern extracting programTOSHIBA KK·Filed 2007·Granted Feb 15, 2011·0 cites·20 claims
- 3349US2009315223A1Template and pattern forming methodYONEDA IKUO·Filed 2009·Application pending·0 cites
- 3449US2023035836A1Data analysis device and model management methodHITACHI LTD·Filed 2022·Application pending·0 cites
- 3548US2015054188A1Mold cleaning apparatus and mold cleaning methodTOSHIBA KK·Filed 2013·Application pending·0 cites
- 3647US8826847B2Imprinting apparatus, imprinting method, and manufacturing method of uneven plateOTA TAKUMI·Filed 2011·Granted Sep 9, 2014·0 cites·7 claims
- 3747US2010124601A1Pattern formation method and computer program productOTA TAKUMI·Filed 2009·Application pending·0 cites
- 3847US2010022036A1Method for forming pattern, and templateYONEDA IKUO·Filed 2008·Application pending·0 cites
- 3946US2014070437A1Mold cleaning apparatus and mold cleaning methodTOSHIBA KK·Filed 2013·Application pending·0 cites
- 4041US2012129279A1Imprinting method, imprinting apparatus and mediumMATSUOKA YASUO·Filed 2011·Application pending·0 cites
- 4140US2012013042A1Imprint template and pattern forming methodOTA TAKUMI·Filed 2011·Application pending·0 cites
- 4239US2012222700A1Template substrate processing apparatus and template substrate processing methodOTA TAKUMI·Filed 2012·Application pending·0 cites
- 4338US8142694B2Method for forming an imprint patternTOKUE HIROSHI·Filed 2010·Granted Mar 27, 2012·0 cites·8 claims
- 4438US2013064415A1Template cleaning apparatus and template cleaning methodOTA TAKUMI·Filed 2012·Application pending·0 cites
- 4535US2011143271A1Pattern generating method and process determining methodKOSHIBA TAKESHI·Filed 2010·Application pending·0 cites
- 4635US2017229300A1Imprint apparatus, imprint method, and pattern forming methodTOSHIBA KK·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →