US2018145014A1PendingUtilityA1

High density second level interconnection for bumpless build up layer (bbul) packaging technology

Assignee: INTEL CORPPriority: Sep 28, 2012Filed: Aug 1, 2017Published: May 24, 2018
Est. expirySep 28, 2032(~6.1 yrs left)· nominal 20-yr term from priority
H10W 90/754H10W 90/732H10W 90/722H10W 90/28H10W 74/142H10W 74/00H10W 72/9413H10W 72/884H10W 72/241H10W 90/00H10W 74/019H10W 74/014H10W 70/614H10W 70/60H10W 70/09H10W 70/093H10W 90/701H01L 2924/12042H01L 2224/45099H01L 2924/00012H01L 2224/48227H01L 2924/207H01L 2224/73265H01L 23/5389H01L 2224/45015H01L 2224/48091H01L 2225/1035H01L 24/20H01L 25/105H01L 2924/15311H01L 2924/181H01L 2224/32225H01L 2225/1058H01L 24/48H01L 2924/30107H01L 2224/32145H01L 2924/00H01L 2225/06568H01L 2224/04105H01L 24/19H01L 21/568H01L 2924/00014H01L 23/49811H01L 2924/18162H01L 2224/12105H01L 21/561
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Claims

Abstract

An apparatus including a die including a device side; and a build-up carrier including a body including a plurality of alternating layers of conductive material and dielectric material disposed on the device side of the die, an ultimate conductive layer patterned into a plurality of pads or lands; and a grid array including a plurality of conductive posts disposed on respective ones of the plurality of pads of the ultimate conductive layer of the body, at least one of the posts coupled to at least one of the contact points of the die through at least a portion of the conductive material of the body. A method including forming a body of a build-up carrier including a die, the body of the build-up carrier including an ultimate conductive layer and forming a grid array including a plurality of conductive posts on the ultimate conductive layer of the body.

Claims

exact text as granted — not AI-modified
1 . (canceled) 
     
     
         2 . An apparatus comprising:
 a die comprising a first side and an opposite second side comprising a device side with contact points;   a build-up carrier comprising:
 a body comprising a plurality of alternating layers of conductive material and dielectric material disposed on the second side of the die, an ultimate layer of conductive material disposed furthest from the die and patterned into a plurality of pads; 
 a grid array on a first side of the build-up carrier, the grid array comprising a plurality of posts each comprising a material that is the same as a material of the layers of conductive material of the body, the posts disposed on respective ones of the plurality of pads of the ultimate layer of conductive material of the body and extending through an ultimate layer of dielectric material defining a surface of the body, at least one of the posts coupled to at least one of the contact points of the die through at least a portion of the conductive material of the body; and 
 a plurality of contacts on a second side of the build-up carrier, the plurality of contacts coupled to one or more of the layers of conductive material, wherein the second side of the build-up carrier has a surface and the plurality of contacts are co-planar with the surface of the build-up carrier. 
   
     
     
         3 . The apparatus of  claim 2 , wherein each of the plurality of contacts comprises a first layer and a second layer, the first layer comprising a gold-nickel alloy, and the second layer comprising copper. 
     
     
         4 . The apparatus of  claim 2 , wherein the posts of the grid array comprise a height dimension of 50 microns to 100 microns. 
     
     
         5 . The apparatus of  claim 2 , wherein a dimension of the plurality of posts of the grid array is configurable. 
     
     
         6 . The apparatus of  claim 2 , wherein the body comprises a first side and a second side and the grid array is disposed on the first side of the body, the body further comprising a plurality of contact points on the first side and at least one of the plurality of posts of the grid array is coupled to at least one of the contact points of the body through at least a portion of the conductive material of the body. 
     
     
         7 . The apparatus of  claim 6 , wherein the die comprises a first die, the apparatus further comprising a second die coupled to the second side of the body, wherein at least one of the plurality of posts of the grid array is coupled to a contact point of the second die. 
     
     
         8 . The apparatus of  claim 2 , wherein each of the plurality of posts having a width dimension that is less than a width dimension of a respective pad. 
     
     
         9 . An apparatus comprising:
 a package comprising a microprocessor disposed in a carrier,   the microprocessor comprising a first side and an opposite second side comprising a device side with contact points;   the carrier comprising:
 a body comprising a plurality of alternating layers of conductive material and dielectric material disposed on the second side of the microprocessor, an ultimate layer of conductive material defining a plurality of pads; 
 a grid array on a first side of the body comprising a plurality of rectangular posts comprising a material that is the same as a material of the layers of conductive material of the body, the posts disposed on respective ones of the plurality of pads of the ultimate conductive layer of the body and extending through an ultimate layer of dielectric material defining a surface of the body, at least one of the posts coupled to at least one of the contact points of the die through at least a portion of the conductive material of the body; 
 a plurality of contacts on a second side of the carrier, the plurality of contacts coupled to one or more of the layers of conductive material, wherein the second side of the build-up carrier has a surface and the plurality of contacts are co-planar with the surface of the carrier; and 
   a printed circuit board coupled to at least a portion of the plurality of conductive posts of the grid array.   
     
     
         10 . The apparatus of  claim 9 , wherein each of the plurality of contacts comprises a first layer and a second layer, the first layer comprising a gold-nickel alloy, and the second layer comprising copper. 
     
     
         11 . The apparatus of  claim 9 , wherein the body comprises a first side and a second side and the grid array is disposed on the first side of the body, the body further comprising a plurality of contact points on the first side and at least one of the plurality of posts of the grid array is coupled to at least one of the contact points of the body through at least a portion of the conductive material of the body. 
     
     
         12 . The apparatus of  claim 11 , further comprising:
 a secondary device coupled to the at least one of the plurality of contacts on the first side of the body.   
     
     
         13 . The apparatus of  claim 12 , wherein the secondary device comprises at least one memory device. 
     
     
         14 . The apparatus of  claim 9 , wherein the posts of the grid array comprise a height dimension of 50 microns to 100 microns. 
     
     
         15 . The apparatus of  claim 9 , wherein each of the plurality of posts having a width dimension that is less than a width dimension of a respective pad. 
     
     
         16 . A method comprising:
 forming a body of a build-up carrier adjacent a device side of a die, the body of the build-up carrier comprising a plurality of alternating layers of conductive material and dielectric material wherein an ultimate conductive layer is patterned into a plurality of pads, wherein at least one of the layers of conductive material is coupled to a device of the die; and   forming a grid array comprising a plurality of conductive posts on respective ones of the plurality of pads of the ultimate conductive layer of the body.   
     
     
         17 . The method of  claim 16 , wherein forming a grid array comprises plating the plurality of posts to respective ones of the plurality of pads. 
     
     
         18 . The method of  claim 16 , prior to forming the grid array, the body comprises a surface comprising a dielectric layer on the plurality of pads of the ultimate conductive layer, and forming a grid array comprises:
 forming respective openings in the dielectric layer to the plurality of pads;   forming a conductive material layer on the surface of the body;   patterning a sacrificial layer on the conductive material layer, the sacrificial layer patterned to expose the conductive material layer on the plurality of pads; and   forming the plurality of posts on the conductive material layer.   
     
     
         19 . The method of  claim 18 , wherein forming the grid array comprises forming the conductive material layer by an electroless plating process and forming the posts by an electrolytic plating process. 
     
     
         20 . The method of  claim 18 , wherein a thickness and patterning of the sacrificial layer defines at least one dimension of the plurality of posts.

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