Silicon-containing underlayers

Abstract

Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si—O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.

What is claimed is: 
     
         1 . A composition comprising: one or more curable silicon-containing polymers comprising a backbone comprising Si—O linkages; one or more organic blend polymers comprising as polymerized units one or more ethylenically unsaturated monomers having an acidic proton and having a pKa in water from −5 to 8, wherein the organic blend polymer comprises as polymerized units one or more monomers of formula (1) and one or more monomers of formula (2) 
       
         
           
           
               
               
           
         
       
       wherein Z is an organic residue having from 1 to 30 carbon atoms and an acidic proton having a pKa in water from −5 to 13; R 20  is chosen from H, C 1-10  alkyl, C 1-10  haloalkyl, halo, C(═O)R 24  and Z; each of R 21  and R 22  are independently chosen from H, C 1-4  alkyl, C 1-4  haloalkyl, halo, CN and Z; R 24  is independently chosen from OR 25  and N(R 26 ) 2 ; R 25  is chosen from H, and C 1-20  alkyl; each R 26  is independently chosen from H, C 1-20  alkyl, and C 6-20  aryl; wherein Z and R 20  may be taken together to form a 5 to 7-membered unsaturated ring; ADG is an acid decomposable group; and R 1  is independently chosen from H, C 1-4  alkyl, C 1-4  haloalkyl, halo, and CN; and one or more cure catalysts. 
     
     
         2 . The composition of  claim 1  further comprising one or more organic solvents. 
     
     
         3 . The composition of  claim 1  wherein the organic blend polymer further comprises as polymerized units one or more monomers of formula (9) 
       
         
           
           
               
               
           
         
       
       wherein R 1  is independently chosen from H, C 1-4  alkyl, C 1-4  haloalkyl, halo, and CN; and R 2  is a monovalent organic residue having a lactone moiety. 
     
     
         4 . The composition of  claim 3  wherein the lactone moiety of R 2  is a 5 to 7-membered ring or a substituted 5 to 7-membered ring. 
     
     
         5 . The composition of  claim 1  wherein the monomer of formula (2) has formula (2a) 
       
         
           
           
               
               
           
         
       
       wherein R 5  is chosen from a C 4-30  organic residue bound to the oxygen through a tertiary carbon or a C 4-30  organic residue comprising an acetal functional group; and R 1  is independently chosen from H, C 1-4  alkyl, C 1-4  haloalkyl, halo, and CN. 
     
     
         6 . The composition of  claim 1  wherein the one or more silicon-containing polymers comprise as polymerized units one or more monomers chosen from formulae (3), (4), (5a), and (5b)
   R 3 SiY 3    (3)
 
   SiY 1   4    (4)
 
   R 5   2 SiY 2   2    (5a)
 
   R 5   3  SiY 2    (5b)
 
 
       wherein each Y, Y 1  and Y 2  is independently a hydrolyzable moiety chosen from halo, C 1-10  alkoxy, and —O—C(O)—R 4 ; R 3  is C 1-30  hydrocarbyl moiety or substituted C 1-30  hydrocarbyl moiety; each R 4  is chosen from H, OH, C 1-10  alkyl, and C 1-10  alkoxy; and each R 5  is independently C 1-30  hydrocarbyl moiety or substituted C 1-30  hydrocarbyl moiety. 
     
     
         7 . The composition of  claim 6  wherein the one or more silicon-containing polymers comprise as polymerized units one or more units of formula (6) and optionally one or more units of formula (7) 
       
         
           
           
               
               
           
         
       
       wherein each R 7  is independently chosen from C 1-30  hydrocarbyl moiety, substituted C 1-30  hydrocarbyl moiety, and OR 8 ; each R 8  is chosen from H, Si(R 9 ) x O(R 10 ) y , C 1-30  hydrocarbyl moiety, and substituted C 1-30  hydrocarbyl moiety; each R 9  is independently C 1-30  hydrocarbyl moiety or substituted C 1-30  hydrocarbyl moiety; each R 10  is independently H, C 1-30  alkyl or —C(O)—C 1-10  alkyl; each R 11  is independently chosen from H, C 1-10  alkyl, and —C(O)—C 1-10  alkyl; n refers to the number of repeat units of formula (6) in the polymer and is an integer from 1 to 100; m refers to the number of repeat units of formula (7) in the polymer and is an integer from 0 to 50; x=0 to 3; y=0 to 3, and x+y=3. 
     
     
         8 . The composition of  claim 1  wherein the cure catalyst is a quaternary ammonium salt.