Conductor Track With Enlargement-Free Transition Between Conductor Path and Contact Structure

Abstract

The invention relates to an electronic device having an electrically isolating support structure, an electrically conducting conductor path on a surface of the support structure, and an electrically conducting contact structure which extends from the surface into the support structure and is electrically connected to the conductor path at a connection point, thereby forming a common conductor track. The conductor path and the contact structure transition into each other in an enlargement-free manner at the connection point.

1 . An electronic device, comprising:
 an electrically isolating support structure;   an electrically conducting conductor path at a surface of the electrically isolating support structure;   an electrically conducting contact structure in the interior of the electrically isolating support structure, which extends from the surface into the support structure and which is electrically connected to the conductor path at a connection point, thereby forming a common conductor track, wherein the electrically conducting contact structure is formed as a blind hole or a through-hole in the electrically isolating support structure, which hole is filled with an electrically conductive material; and   a driver device, which is configured to couple a high frequency signal into the conductor track,   
       wherein the driver device is configured for coupling in a high frequency signal in a frequency range of at least 10 GHz;
 wherein the conductor path and the contact structure transition into each other in an enlargement-free manner at the connection point. 
 
     
     
         2 . The device according to  claim 1 , wherein the connection point is formed in a pad-free manner. 
     
     
         3 . The device according to  claim 1 , wherein one of the following is implemented:
 the conductor path and the contact structure have a constant cross-section at least in the region of the connection point,   at least in the region of the connection point, the conductor path and the contact structure are formed of a homogeneous material,   in the region of the connection point, the conductor path and the contact structure transition into each other in a seam-free manner.   
     
     
         4 . The device according to  claim 1 , wherein the contact structure has or have:
 a polygonal, in particular a rectangular or an octahedral cross-section; or   a rounded polygonal, in particular a rounded rectangular or an octahedron-shaped cross-section; or   a round, in particular a circular or an oval cross-section, and/or   wherein the contact structure extends perpendicular to an extension of the conductor path into the support structure, in particular being formed as a via.   
     
     
         5 . The device according to  claim 1 , wherein the support structure comprises a resinous board, in particular a resin-glass fibre-board, and/or a ceramic substrate and/or a glass substrate and/or an organic substrate. 
     
     
         6 . The device according to  claim 1 , wherein the conductor path and the contact structure comprise copper. 
     
     
         7 . The device according to  claim 1 , further comprising:
 an electronic component, which is embedded in the support structure and is coupled electrically conductingly to the contact structure and/or the conductor path,   wherein the electronic component is selected from a group that consists of an active electronic component and a passive electronic component; in particular as one out of the group that consists of a filter, a voltage converter, a semiconductor chip, a storage module, a capacitor, an ohmic resistor, an inductor, a sensor, and a high frequency component, and/or   wherein at another connection point, an electrical contact of the electronic component on the one hand and the contact structure or the conductor path on the other hand transition into each other in an enlargement-free manner.   
     
     
         8 . The device according to  claim 1 , further comprising:
 another conductor path on and/or in the support structure at another surface of the support structure, which surface is opposite to the surface comprising the conductor path, wherein at a further connection point, the other conductor path and the contact structure transition into each other in an enlargement-free manner.   
     
     
         9 . The device according to  claim 1 , wherein the connection point is formed between the conductor path and the contact structure such that an electrical high frequency signal that is coupled into the conductor track can propagate through the connection point, in particular in a reflexion-free anechoic manner. 
     
     
         10 . The device according to  claim 1 ,
 wherein the driver device is configured for coupling in the high frequency signal with an edge steepness of greater than 4 V/ps.   
     
     
         11 . The device according to  claim 1 , formed as a printed circuit board. 
     
     
         12 . The device according to  claim 1 , wherein a diameter of the contact structure and/or of the conductor path is in a range between 1 μm and 100 μm. 
     
     
         13 . The device according to  claim 1 , wherein the support structure is formed of a plurality of layers that are arranged on top of each other, and wherein the device further has at least a further electrically conducting structure between the layers. 
     
     
         14 . The device according to  claim 1 , wherein the conductor path is formed as a notch, which is filled with an electrically conducting material, in the surface of the support structure. 
     
     
         15 . A method for manufacturing an electronic device, comprising:
 providing an electrically isolating support structure;   forming an electrically conducting conductor path at a surface of the support structure;   forming an electrically conducting contact structure in the interior of the electrically isolating support structure, which extends from the surface into the support structure and which is electrically connected to the conductor path at a connection point, thereby forming a common conductor track,   wherein a notch is formed at the surface of the support structure by material removal and is subsequently filled with an electrically conducting material, in order to thereby form the conductor path, and/or   wherein in the support structure, a contact opening is formed, which extends into the former, and which is subsequently filled with an electrically conducting material, in order to thereby form the contact structure, such that the electrically conducting contact structure is formed as a blind hole or a through-hole in the electrically isolating support structure, which hole is filled with an electrically conductive material; and   providing a driver device, which is configured to couple a high frequency signal into the conductor track,   
       wherein the driver device is configured for coupling in a high frequency signal in a frequency range of at least 10 GHz;
 wherein, at the connection point, the conductor path and the contact structure are formed transitioning into each other in an enlargement-free manner. 
 
     
     
         16 . The method according to  claim 15 , wherein the conductor path and the contact structure are formed in a joint, in particular simultaneous or uninterruptible, procedure. 
     
     
         17 . The method according to  claim 15 , having at least one of the following features:
 at least one of the notch and the contact opening, preferably both, is or are formed by means of a lithographic printing and etching technique;   at least one of the notch and the contact opening, preferably both, is or are formed by means of embossing in the support structure;   at least one of the notch and the contact opening, preferably both, is or are formed by means of laser grooving.   
     
     
         18 . The method according to  claim 15 , wherein a procedure of defining a shape of the conductor path and a procedure of defining a shape of the contact structure follow up uninterruptedly to each other, or are carried out simultaneously with each other. 
     
     
         19 . Use of an electronic device, which has an electrically isolating support structure, an electrically conducting conductor path at a surface of the support structure, and an electrically conducting contact structure in the interior of the electrically isolating support structure, which extends from the surface into the support structure and which is electrically connected to the conductor path at a connection point, thereby forming a common conductor track, wherein the electrically conducting contact structure is formed as a blind hole or a through-hole in the electrically isolating support structure, which hole is filled with an electrically conductive material, wherein at the connection point, the conductor path and the contact structure transition into each other in an enlargement-free manner, for:
 transporting a high frequency signal having a frequency of at least 10 GHz for propagating through the conductor track out of the conductor path and the contact structure.   
     
     
         20 . The use of the electronic device according to  claim 19  for one of the following:
 impedance matching of the conductor track, 
 transmitting thermal energy in a heat barrier-free manner between the conductor path and the contact structure via the connection point, 
 transmitting electrical current in a low-loss manner between the conductor path and the contact structure via the connection point.