Polishing pad with window and manufacturing methods thereof

Abstract

Embodiments of the present disclosure provide for polishing pads that include at least one endpoint detection (EPD) window disposed through the polishing pad material and methods of forming thereof. In one embodiment, a method of forming a polishing pad includes forming a first layer of the polishing pad by dispensing a first precursor composition and a window precursor composition, the first layer comprising at least portions of each of a first polishing pad element and a window feature, and partially curing the dispensed first precursor composition, and the dispensed window precursor composition disposed within the first layer.

1 . A polishing article, comprising:
 a base layer comprising a first polymer material;   a window feature disposed through the base layer, the window feature comprising a second polymer material that is chemically bonded to the first polymer material at an interface between the window feature and the base layer; and   a plurality of polishing elements extending from the base layer, each of the plurality of polishing elements comprising a third polymer material that is chemically bonded to the first polymer material at respective interfaces between the base layer and the plurality of polishing elements.   
     
     
         2 . The polishing article of  claim 1 , wherein the respective polymer materials of the base layer, the window feature, and the plurality of polishing elements form a continuous polymer phase. 
     
     
         3 . The polishing article of  claim 1 , wherein the first polymer material is formed from a first precursor composition, the second polymer material is formed from a second precursor composition, and the interface formed between the first polymer material and the second polymer material comprises a reaction product of the first precursor composition and the second precursor composition. 
     
     
         4 . The polishing article of  claim 3 , wherein the second polymer material comprises the reaction product of one or more acrylates, methacrylates, epoxides, oxetanes, polyols, photoinitiators, and thermal initiators. 
     
     
         5 . The polishing article of  claim 3 , wherein the second precursor composition comprises an acrylate based monomer, a methacrylate based monomer, an acrylate based oligomer, a methacrylate based oligomer, or a combination thereof. 
     
     
         6 . The polishing article of  claim 3 , wherein a first component of the second precursor composition comprises an isobornyl acrylate, isobornyl methacrylate, dicyclopentanyl acrylate, dicyclopentanyl methacrylate, tetrahydrofurfuryl acrylate, lauryl acrylate, 2-(((butylamino) carbonyl) oxy) ethyl acrylate, dipropylene glycol diacrylate, 1,6-hexanediol acrylate, glycidyl acrylate, multi-functional groups of polyether acrylates, multi-functional groups of polyester acrylates, one or more multi-functional groups urethane acrylates, one or more multi-functional groups of epoxy acrylates, or a combination thereof. 
     
     
         7 . The polishing article of  claim 6 , wherein a second component of the second precursor composition comprises 2,2-dimethoxy-2-phenylacetophenone, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinopropan-1-one, 1-hydroxycyclohexyl-phenyl ketone, oligomeric alpha hydroxy ketones, or a combination thereof. 
     
     
         8 . The polishing article of  claim 1 , wherein the window feature is disposed adjacent to and in contact with at least portions of one or more of the plurality of polishing elements. 
     
     
         9 . The polishing article of  claim 8 , wherein the second polymer material is chemically bonded to the third polymer material at interfaces of the window feature and one or more of the plurality of polishing elements. 
     
     
         10 . The polishing article of  claim 8 , wherein the second polymer material is formed from a second precursor composition, the third polymer material is formed from a third precursor composition, and the interfaces between the window feature and the one or more of the plurality of polishing elements comprise a reaction product of the second precursor composition and the third precursor composition. 
     
     
         11 . The polishing article of  claim 3 , wherein the second precursor composition comprises particles of titanium oxide, zirconium oxide, zirconium acrylate, hafnium acrylate, or a combination thereof. 
     
     
         12 . A polishing article, comprising:
 a base layer formed from a first precursor composition;   a window feature disposed through the base layer, the window feature formed from a second precursor composition; and   a plurality of polishing elements extending from the base layer, the plurality of polishing elements formed from a third precursor composition, wherein the window feature is chemically bonded to at least portions of one or more of the plurality of polishing elements by a reaction product of the second and third precursor compositions.   
     
     
         13 . The polishing article of  claim 12 , wherein the second precursor composition comprises an acrylate based monomer, a methacrylate based monomer, an acrylate based oligomer, a methacrylate based oligomer, or a combination thereof. 
     
     
         14 . The polishing article of  claim 13 , wherein the window feature is chemically bonded to the base layer by a reaction product of the first and second precursor compositions. 
     
     
         15 . A polishing article, comprising:
 a sub-polishing element;   a plurality of polishing elements extending from the sub-polishing element; and   a window feature disposed through the sub-polishing element and the plurality of polishing elements, wherein the sub-polishing element, the plurality of polishing elements, and the window feature are chemically bonded at interfaces therebetween.   
     
     
         16 . The polishing article of  claim 15 , wherein the sub-polishing element, the plurality of polishing elements, and the window feature form a continuous polymer phase. 
     
     
         17 . The polishing article of  claim 15 , wherein the sub-polishing element is formed from a first precursor composition and window feature is formed from a second precursor composition and an interface of the sub-polishing element and window feature comprises a reaction product of the first precursor composition and the second precursor composition. 
     
     
         18 . The polishing article of  claim 17 , wherein the window feature comprises the reaction product of one or more of acrylates, methacrylates, epoxides, oxetanes, polyols, photoinitiators, and thermal initiators. 
     
     
         19 . The polishing article of  claim 17 , wherein a first component of the second precursor composition comprises an isobornyl acrylate, isobornyl methacrylate, dicyclopentanyl acrylate, dicyclopentanyl methacrylate, tetrahydrofurfuryl acrylate, lauryl acrylate, 2-(((butylamino) carbonyl) oxy) ethyl acrylate, mono-functional acrylate monomer, aromatic monoacrylate oligomer, dipropylene glycol diacrylate, 1,6-hexanediol acrylate, glycidyl acrylate, multi-functional groups of polyether acrylates, multi-functional groups of polyester acrylates, multi-functional groups urethane acrylates, multi-functional groups epoxy acrylates, or a combination thereof. 
     
     
         20 . The polishing article of  claim 19 , wherein a second component of the second precursor composition further comprises 2,2-dimethoxy-2-phenylacetophenone, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinopropan-1-one, 1-hydroxycyclohexyl-phenyl ketone, oligomeric alpha hydroxy ketones, or a combination thereof.