Porous chemical mechanical polishing pads

Abstract

Implementations disclosed herein generally relate to polishing articles and methods for manufacturing polishing articles used in polishing processes. More specifically, implementations disclosed herein relate to porous polishing pads produced by processes that yield improved polishing pad properties and performance, including tunable performance. Additive manufacturing processes, such as three-dimensional printing processes provides the ability to make porous polishing pads with unique properties and attributes.

1 . A method of forming a porous polishing pad, comprising:
 depositing a plurality of composite layers with an additive manufacturing process to reach a target thickness, wherein depositing the plurality of composite layers comprises:
 forming a first layer of the porous polishing pad, wherein forming the first layer comprises:
 forming a first pattern of porosity-forming agent containing regions on a surface on which the first layer is formed by dispensing droplets of a porosity-forming composition on the surface; and 
 forming a first structural material containing region on the surface and between adjacently positioned porosity-forming agent containing regions of the first pattern by dispensing one or more droplets of a curable resin precursor composition onto the surface; and 
 
 forming a second layer on a surface of the first layer, wherein forming the second layer comprises:
 forming a second pattern of porosity-forming agent containing regions on the surface of the first layer by dispensing one or more droplets of the porosity-forming composition onto the surface of the first layer; and 
 forming a second structural material containing region on the surface of the first layer and between adjacently positioned porosity-forming agent containing regions of the second pattern by dispensing one or more droplets of the curable resin precursor composition onto the surface of the first layer; and 
 
 exposing the dispensed one or more droplets of the curable resin precursor composition and the dispensed one or more droplets of the porosity-forming composition to at least one of an annealing process, a rinsing process, or both to remove a porosity-forming agent of the porosity-forming composition to form pores in the porous polishing pad. 
   
     
     
         2 . The method of  claim 1 , wherein the porosity-forming agent is selected from water, water-soluble inert materials, water-containing hydrophilic polymers, hydrophilic polymerizable monomers, or a combination thereof. 
     
     
         3 . The method of  claim 1 , wherein the porosity-forming agent is selected from glycols, glycol-ethers, amines, or a combination thereof. 
     
     
         4 . The method of  claim 1 , wherein the porosity-forming agent is selected from ethylene glycol, butanediol, dimer diol, propylene glycol-(1,2), propylene glycol-(1,3), octane-1,8-diol, neopentyl glycol, cyclohexane dimethanol (1,4-bis-hydroxymethylcyclohexane), 2-methyl-1,3-propane diol, glycerin, trimethylolpropane, hexanediol-(1,6), hexanetriol-(1,2,6), butanetriol-(1,2,4), trimethylolethane, pentaerythritol, quinitol, mannitol, sorbitol, methylglycoside, diethylene glycol, triethylene glycol, tetraethylene glycol, polyethylene glycols, dibutylene glycol, polybutylene glycols, ethylene glycol monobutyl ether (EGMBE), diethylene glycol monoethyl ether, ethanolamine, diethanolamine (DEA), triethanolamine (TEA), or a combination thereof. 
     
     
         5 . The method of  claim 1 , wherein the porosity-forming agent is a water-containing hydrophilic polymer selected from the group consisting of polyvinyl alcohol, polyvinylpyrrolidone (PVP), polyvinyl methyl ether, or a combination thereof. 
     
     
         6 . The method of  claim 1 , wherein the porosity-forming agent is selected from triethanolamine (TEA) surfactant, polyoxyethylene alkyl phenyl ether ammonium sulfates, polyoxyethylene alkyl phenyl ethers, anionic phosphate esters, and combinations thereof. 
     
     
         7 . The method of  claim 1 , wherein the porosity-forming agent is vaporizable, soluble in water, or soluble in another solvent. 
     
     
         8 . The method of  claim 1 , wherein the porosity-forming agent is configured to degrade in the presence of an aqueous solution. 
     
     
         9 . The method of  claim 1 , further comprising partially curing the dispensed one or more droplets of the curable resin precursor composition and the dispensed one or more droplets of the porosity-forming composition prior to exposing the dispensed one or more droplets of the curable resin precursor composition and the dispensed one or more droplets of the porosity-forming composition to at least one of the annealing process, the rinsing process, or both. 
     
     
         10 . The method of  claim 1 , wherein the rinsing process comprises rinsing with water, rinsing with alcohol, or rinsing with both water and alcohol. 
     
     
         11 . The method of  claim 1 , wherein the annealing process comprises heating the formed first layer and the formed second layer to a temperature to vaporize the porosity-forming agent. 
     
     
         12 . The method of  claim 1 , further comprising curing the dispensed one or more droplets of the curable resin precursor composition and the dispensed one or more droplets of the porosity-forming composition to form the porous polishing pad after exposing the dispensed one or more droplets of the curable resin precursor composition and the dispensed one or more droplets of the porosity-forming composition to at least one of the annealing process, the rinsing process, or both. 
     
     
         13 . The method of  claim 1 , wherein the first pattern of porosity-forming agent containing regions is staggered a distance from the second pattern of porosity-forming agent containing regions in a direction parallel to the surface of the first layer. 
     
     
         14 . The method of  claim 1 , wherein the first pattern of porosity-forming agent containing regions is aligned with the second pattern of porosity-forming agent containing regions so that the porosity-forming agent containing regions of the second pattern are positioned on top of the porosity-forming agent containing regions of the first pattern. 
     
     
         15 . The method of  claim 1 , wherein the curable resin precursor composition comprises an acrylate. 
     
     
         16 . The method of  claim 1 , wherein the curable resin precursor composition comprises a polyester acrylate oligomer, a polyether acrylate oligomer, an epoxy acrylate oligomer, a polycarbonate oligomer, a polyurethane acrylate oligomer, or a combination thereof. 
     
     
         17 . The method of  claim 1 , wherein the curable resin precursor composition, comprises:
 a multifunctional acrylate oligomer;   a multifunctional acrylate monomer;   a monofunctional acrylate monomer; and   a photoinitiator.   
     
     
         18 . The method of  claim 17 , wherein the multifunctional acrylate oligomer is selected from a polyester acrylate oligomer, a polyether acrylate oligomer, an epoxy acrylate oligomer, a polycarbonate oligomer, a polyurethane acrylate oligomer, or a combination thereof. 
     
     
         19 . The method of  claim 18 , wherein the monofunctional acrylate monomer is selected from tetrahydrofurfuryl acrylate, tetrahydrofurfuryl methacrylate, isobornyl acrylate, isobornyl methacrylate, 3,3,5-trimethylcyclohexane acrylate, or a combination thereof. 
     
     
         20 . The method of  claim 19 , wherein the multifunctional acrylate monomer is selected from propoxylated neopentyl glycol diacrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, 1,3-butylene glycol diacrylate, 1,3-butylene glycol dimethacrylate 1,4-butanediol diacrylate, 1,4-butanediol dimethacrylate, alkoxylated aliphatic diacrylate, diethylene glycol diacrylate, diethylene glycol dimethacrylate, dipropylene glycol diacrylate, tripropylene glycol diacrylate, triethylene glycol dimethacrylate, alkoxylated hexanediol diacrylates, or a combination thereof.