Liquid storage device and electroplating apparatus

Abstract

A liquid storage device includes a tank body including multiple working cycle drain ports for supplying solution to multiple work chambers and a thermal cycle liquid injection port for introducing heated solution into the tank body. The working cycle drain ports are located on opposing side walls of the tank body. A side wall connecting the two side walls has the thermal cycle liquid injection port positioned near or at the middle of the length of the side wall. The liquid storage device further includes a guide element located inside the tank body. The guide element is connected to the thermal cycle liquid injection port, allowing the solution entering from the thermal cycle liquid injection port to flow through the guide element into the tank body and toward each of the working cycle drain ports.

1 . A liquid storage device, comprising a tank body, the tank body including multiple working cycle drain ports for supplying solution to multiple work chambers and a thermal cycle liquid injection port for introducing heated solution into the tank body, the working cycle drain ports being located on opposite side walls of the tank body, and a side wall connecting the two side walls is provided with the thermal cycle liquid injection port, and the thermal cycle liquid injection port being located near or at the middle of the length of the one side wall;
 the liquid storage device also comprising a guide element being positioned in the tank body, the guide element being connected to the thermal cycle liquid injection port, the solution entering from the thermal cycle liquid injection port flowing into the tank body via the guide element, and flowing to each of the working cycle drain ports.   
     
     
         2 . The liquid storage device as claimed in  claim 1 , wherein the tank body comprises a top and a bottom, and first, second, third, and fourth side walls that connect the top and the bottom and are sequentially connected along the circumference of the tank body, the first side wall is opposite the third side wall, and the second side wall is opposite the fourth side wall;
 the liquid storage device further comprises a cooling coil, which is located inside the tank body and fixed to the bottom, to facilitate heat exchange with the solution in the tank body.   
     
     
         3 . The liquid storage device as claimed in  claim 2 , wherein the first and third side walls are set with working cycle drain ports, and the thermal cycle liquid injection port is located on the second side wall, near or at the middle of the length of the second side wall. 
     
     
         4 . The liquid storage device as claimed in  claim 3 , wherein the thermal cycle liquid injection port is near the middle of the length of the second side wall, and an end of the guide element away from the thermal cycle liquid injection port extends towards the fourth side wall to form an outlet for the solution to flow out. 
     
     
         5 . The liquid storage device as claimed in  claim 4 , wherein the side wall of the guide element has at least one diverter port, through which the solution inside the guide element enters the tank body. 
     
     
         6 . The liquid storage device as claimed in  claim 3 , wherein the thermal cycle liquid injection port is located at the middle of the length of the second side wall, and the cooling coil is fixed at the central position of the bottom;
 an end of the guide element away from the thermal cycle liquid injection port extends upwards to form an upper outlet, and the upper outlet is located at the inner side of the cooling coil;   alternatively, an end of the guide element away from the thermal cycle liquid injection port extends upward and downward to form an upper outlet and a lower outlet, and both the upper and lower outlets are located at the inner side of the cooling coil.   
     
     
         7 . The liquid storage device as claimed in  claim 2 , wherein the first and third side walls have working cycle drain ports, the thermal cycle liquid injection port is located at the top, and positioned at the center of the top, and an end of the guide element away from the thermal cycle liquid injection port extends toward the bottom to form a lower outlet;
 wherein the cooling coil is fixed at the central position of the bottom, and the end of the guide element away from the thermal cycle liquid injection port is located at the inner side of the cooling coil.   
     
     
         8 . The liquid storage device as claimed in  claim 2 , wherein the cooling coil comprises a coil body, a base, and multiple supports vertically arranged on the base, the supports are arranged separating from each other along the circumference of the base, and the supports are provided with multiple mounting holes spaced along the height of the supports, the coil body is spiral-shaped and is secured in the multiple mounting holes. 
     
     
         9 . The liquid storage device as claimed in  claim 8 , wherein each of the supports is provided with multiple sets of the mounting holes. 
     
     
         10 . The liquid storage device as claimed in  claim 3 , wherein the tank body comprises three working cycle drain ports, namely a first drain port, a second drain port, and a third drain port, the first drain port and the second drain port are spaced apart and located on the first side wall, while the third drain port is located on the third side wall. 
     
     
         11 . The liquid storage device as claimed in  claim 10 , wherein the tank body further comprises a working cycle injection port and a thermal cycle drain port, the working cycle injection port is used to allow the solution flowing out from multiple work chambers to enter the tank body, and the thermal cycle drain port is used to allow the solution inside the tank body to flow out for heating;
 wherein the working cycle injection port is located at the top of the tank body, and the thermal cycle drain port is located at the bottom of the tank body.   
     
     
         12 . An electroplating apparatus, comprising a liquid storage device, wherein the liquid storage device adopts any one of the liquid storage devices as claimed in  claim 1 . 
     
     
         13 . The electroplating apparatus as claimed in  claim 12 , further comprising multiple work chambers for depositing metal layers on the surface of substrates and multiple working pumps, the multiple work chambers being connected to the corresponding multiple working pumps, and the multiple working pumps being connected to the multiple working cycle drain ports, allowing the solution inside the tank body to be introduced into the corresponding work chambers. 
     
     
         14 . The electroplating apparatus as claimed in  claim 13 , wherein when the tank body comprises three working cycle drain ports, namely a first drain port, a second drain port, and a third drain port, and the tank body further comprises the working cycle injection port and the thermal cycle drain port,
 the multiple work chambers comprise a first work chamber, a second work chamber and a third work chamber, the multiple working pumps comprise a first working pump, a second working pump and a third working pump;   the first working pump and the first work chamber are sequentially connected between the first drain port and the working cycle injection port, forming the first working cycle loop;   the second working pump and the second work chamber are sequentially connected between the second drain port and the working cycle injection port, forming the second working cycle loop;   the third working pump and the third work chamber are sequentially connected between the third drain port and the working cycle injection port, forming the third working cycle loop.   
     
     
         15 . The electroplating apparatus as claimed in  claim 14 , further comprising a thermal cycle pump and a heating device, the thermal cycle pump and the heating device are sequentially connected between the thermal cycle liquid injection port and the thermal cycle drain port to form a thermal cycle loop.