Method for growing thin films

Abstract

A method of forming a layer over a substrate is provided. Generally, a layer of a first reactive species is deposited over the substrate. The layer of the first reactive species is reacted with a second reactive species to create a first product. Unreacted reactive species is preferentially desorbed leaving a layer of the first product.

1. A thin, film of a plurality of layers over a substrate, wherein each layer is individually formed by the method, comprising:
 depositing a layer of a first reactive species over the substrate; 
 chemically reacting the layer of the first reactive species with a second reactive species to create a first product; and 
 preferentially desorbing an unreacted reactive species leaving a layer of the first product. 
 
   
   
     2. The thin film, as recited in  claim 1 , wherein the depositing of a layer deposits a monolayer. 
   
   
     3. The thin film, as recited in  claim 2 , wherein the depositing of a layer is by simple vapor deposition. 
   
   
     4. The thin film, as recited in  claim 3 , wherein the simple vapor deposition is preformed by vaporizing a solid or liquid by heating. 
   
   
     5. The thin film, as recited in  claim 4 , wherein the unreacted reactive species that is desorbed is the first reactive species.