US9355967B2ActiveUtilityA1

Stress compensation patterning

83
Assignee: QUALCOMM INCPriority: Jun 24, 2013Filed: Jul 19, 2013Granted: May 31, 2016
Est. expiryJun 24, 2033(~7 yrs left)· nominal 20-yr term from priority
Inventors:Daeik Daniel KimJe-Hsiung LanMario Francisco VelezChengjie ZuoJonghae KimChanghan Hobie Yun
H10P 90/12H10W 42/121G06F 2119/08G06F 30/398H01L 23/562H01L 2924/3511H01L 21/02005H01L 2924/0002G06F 17/5081G06F 2217/80H01L 2924/00
83
PatentIndex Score
5
Cited by
27
References
31
Claims

Abstract

An apparatus includes a device that includes at least one layer. The at least one layer includes an inter-device stress compensation pattern configured to reduce an amount of inter-device warpage prior to the device being detached from another device.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. An apparatus comprising:
 a device comprising a first layer located at a first side of a substrate and a second layer located at a second side of the substrate, wherein the first layer includes an inter-device stress compensation pattern configured to reduce an amount of device warpage prior to the device being detached from another device, and wherein the second layer includes a second stress compensation pattern that is different than the inter-device stress compensation pattern. 
 
     
     
       2. The apparatus of  claim 1 , wherein the device is an integrated passive device. 
     
     
       3. The apparatus of  claim 1 , further comprising a metallization layer, wherein the inter-device stress compensation pattern is further configured to reduce warpage caused by a thickness of the metallization layer. 
     
     
       4. The apparatus of  claim 3 , wherein the thickness of the metallization layer is approximately fifteen micrometers. 
     
     
       5. The apparatus of  claim 1 , wherein the inter-device stress compensation pattern is further configured to reduce warpage of a wafer from which the device is generated. 
     
     
       6. The apparatus of  claim 5 , wherein the wafer includes at least two dies having different stress compensation patterns. 
     
     
       7. The apparatus of  claim 6 , wherein a first die of the at least two dies includes a first intra-device stress compensation pattern, and wherein a second die of the at least two dies includes the inter-device stress compensation pattern and a second intra-device stress compensation pattern. 
     
     
       8. The apparatus of  claim 1 , wherein the inter-device stress compensation pattern corresponds to at least a portion of a wafer-level pattern. 
     
     
       9. The apparatus of  claim 8 , wherein the wafer-level pattern comprises a position-dependent pattern that includes pattern elements having different dimensions, wherein the different dimensions are a function of at least a distance from a center of a wafer. 
     
     
       10. The apparatus of  claim 9 , wherein dies located near an edge of the wafer include more stress compensation than dies located near the center of the wafer. 
     
     
       11. The apparatus of  claim 1 , wherein the inter-device stress compensation pattern includes a pattern of vias in at least one layer. 
     
     
       12. The apparatus of  claim 1 , wherein the inter-device stress compensation pattern includes a pattern of metal deposited in at least one layer. 
     
     
       13. The apparatus of  claim 1 , wherein the substrate includes a semiconductor substrate. 
     
     
       14. The apparatus of  claim 1 , wherein the substrate includes a glass substrate. 
     
     
       15. The apparatus of  claim 1 , wherein the second side corresponds to a back-side of the device. 
     
     
       16. The apparatus of  claim 1 , wherein the first side corresponds to a front-side of the device. 
     
     
       17. The apparatus of  claim 1 , wherein one of the inter-device stress compensation pattern or the second stress compensation pattern includes pattern elements oriented in a first direction, and wherein a different one of the inter-device stress compensation pattern or the second stress compensation pattern includes pattern elements oriented in a second direction orthogonal to the first direction. 
     
     
       18. The apparatus of  claim 17 , wherein the first direction corresponds to a direction from the first layer to the second layer, and wherein the second direction corresponds to a direction along the first layer. 
     
     
       19. The apparatus of  claim 1 , wherein one of the inter-device stress compensation pattern or the second stress compensation pattern is configured to compensate for stress caused by the other of the inter-device stress compensation pattern or the second stress compensation pattern. 
     
     
       20. The apparatus of  claim 1 , wherein the first layer includes an inter-layer dielectric. 
     
     
       21. The apparatus of  claim 1 , wherein the inter-device stress compensation pattern includes a pattern of scribing lines. 
     
     
       22. The apparatus of  claim 1 , wherein the inter-device stress compensation pattern includes a pattern of holes. 
     
     
       23. The apparatus of  claim 1 , further comprising a second device selected from a set top box, a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, or a computer, into which the device is integrated. 
     
     
       24. An apparatus comprising:
 means for relieving stress in a device according to an inter-device stress compensation pattern in a first layer located at a first side of a substrate to reduce an amount of warpage of the device; and 
 means for relieving stress in the device according to a second stress compensation pattern in a second layer located at a second side of the substrate, wherein the second stress compensation pattern is different than the inter-device stress compensation pattern. 
 
     
     
       25. The apparatus of  claim 24 , further comprising a second device selected from a set top box, a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, or a computer, into which the means for relieving stress in at least one layer of the device and the means for relieving stress in the device according to the second stress compensation pattern are integrated. 
     
     
       26. An apparatus comprising:
 a device comprising a first layer located at a first side of a substrate, wherein the first layer includes a first stress compensation pattern configured to reduce an amount of warpage of the device, wherein the first stress compensation pattern includes one or more voids in the first layer, wherein the device includes a second layer located at a second side of the substrate, the second layer including a second stress compensation pattern, wherein the second stress compensation pattern is different than the first stress compensation pattern. 
 
     
     
       27. The apparatus of  claim 26 , wherein the one or more voids include one or more vias. 
     
     
       28. The apparatus of  claim 26 , wherein the one or more voids include one or more trenches. 
     
     
       29. An apparatus comprising:
 a device comprising a first layer located at a first side of a substrate, wherein the first layer includes a first stress compensation pattern configured to reduce an amount of warpage of the device, wherein the first stress compensation pattern includes a pattern of scribing lines, and wherein the device includes a second layer located at a second side of the substrate, the second layer including a second stress compensation pattern that is different than the first stress compensation pattern. 
 
     
     
       30. The apparatus of  claim 29 , wherein the pattern of scribing lines includes a pattern of holes that are scribed into at least one layer. 
     
     
       31. The apparatus of  claim 29 , wherein the pattern of scribing lines is scribed using a laser scribing tool.

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