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Retainer ring for substrate

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Assignee: EBARA CORPPriority: Oct 6, 2015Filed: Apr 5, 2016Granted: Aug 15, 2017
Est. expiryOct 6, 2035(~9.2 yrs left)· nominal 20-yr term from priority
Inventors:Osamu NabeyaHozumi YasudaMakoto FukushimaKeisuke NamikiShingo TogashiSatoru Yamaki
69
PatentIndex Score
12
Cited by
22
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a retainer ring for substrate, as shown and described.

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