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Substrate mounting plate for substrate processing apparatus

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Assignee: KOKUSAI ELECTRIC CORPPriority: Mar 4, 2021Filed: Sep 3, 2021Granted: Mar 28, 2023
Est. expiryMar 4, 2041(~14.6 yrs left)· nominal 20-yr term from priority
Inventors:Tetsuaki InadaTakeshi Yasui
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PatentIndex Score
13
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12
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1
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Claims

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CLAIM 
     
       The ornamental design for a substrate mounting plate for substrate processing apparatus, as shown and described.

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