USRE49375EActiveUtilityPatentIndex 61

Field effect transistor having fin base and at least one fin protruding from fin base

Assignee: SAMSUNG ELECTRONICS CO LTDPriority: Apr 23, 2012Filed: Dec 21, 2020Granted: Jan 17, 2023

Est. expiryApr 23, 2032(~5.8 yrs left)· nominal 20-yr term from priority

Inventors:KIM MYEONG-CHEOL KIM CHEOL SEO JAEHUN LEE YOOJUNG CHANG KISOO CHOI SIYOUNG

H01L 29/66795H01L 29/785H01L 29/7851H10D 30/024H10D 30/6211H10D 30/62

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Claims

Abstract

Field effect transistors including a source region and a drain region on a substrate, a fin base protruding from a top surface of the substrate, a plurality of fin portions extending upward from the fin base and connecting the source region with the drain region, a gate electrode on the fin portions, and a gate dielectric between the fin portions and the gate electrode may be provided. A top surface of the substrate may include a plurality of grooves (e.g., a plurality of convex portions and a plurality of concave portions). Further, a device isolation layer may be provided to expose upper portions of the plurality of fin portions and to cover top surfaces of the plurality of grooves.

Claims

exact text as granted — not AI-modified

What is claimed is:

1. A field effect transistor, comprising:
a source region and a drain region on a substrate; a fin base protruding from a top surface of the substrate; a plurality of fin portions extending upward from the fin base and connecting the source region with the drain region; a gate electrode on the plurality of fin portions; a gate dielectric between the plurality of fin portions and the gate electrode; and a device isolation layer exposing upper portions of the plurality of fin portions and covering the top surface of the substrate adjacent to the fin base, wherein the top surface of the substrate adjacent to the fin base includes a plurality of grooves, and each of the plurality of grooves includes a plurality of convex portions and a plurality of concave portions extending along an extending direction of the plurality of fin portions.

2. The field effect transistor of claim 1 , wherein a thickness of the fin base is greater than half a depth of a first trench between the plurality of fin portions.

3. The field effect transistor of claim 1 , further comprising:
at least one first trench between the plurality of fin portions, wherein top surfaces of the plurality of convex portions are lower than a bottom surface of the at least one first trench.

4. The field effect transistor of claim 1 , further comprising:
at least one first trench between the plurality of fin portions, wherein top surfaces of the plurality of convex portions are higher than a bottom surface of the at least one first trench.

5. The field effect transistor of claim 1 , further comprising:
at least one first trench between the plurality of fin portions, wherein a top surface of the device isolation layer is higher than a bottom surface of the at least one first trench.

6. The field effect transistor of claim 1 , wherein a distance between the plurality of convex portions is substantially equal to a distance between the plurality of fin portions.

7. The field effect transistor of claim 1 , wherein the plurality of convex portions and the plurality of concave portions alternate each other assimilating a line-and-space pattern of the plurality of fin portions.

8. The field effect transistor of claim 1 , wherein the plurality of fin portions include a first fin portion and second fin portions, the second fin portions being outside the first fin portion and adjacent to the plurality of grooves, and the first and second fin portions have a substantially same width.

9. A field effect transistor, comprising:
at least one fin portion extending from a top surface of a substrate; a device isolation layer exposing an upper portion of the at least one fin portion; a gate electrode on and crossing the at least one fin portion; and a gate dielectric between the at least one fin portion and the gate electrode, wherein the top surface of the substrate includes a plurality of grooves, each of the plurality of grooves includes a plurality of convex portions and a plurality of concave portions, the plurality of convex portions extend parallel to the at least one fin portion, and the device isolation layer covers top surfaces of the plurality of convex portions.

10. The field effect transistor of claim 9 , wherein the at least one fin portion includes a plurality of fin portions spaced apart from, each other by at least one first trench therebetween, and
further comprising: a fin base extending from the top surface of the substrate and connected to bottom surfaces of the plurality of the fin portions.

11. The field effect transistor of claim 10 , wherein a top surface of the fin base is defined by a bottom surface of the at least one first trench, and
the bottom surface of the at least one first trench is higher than top surfaces of the plurality of convex portions.

12. The field effect transistor of claim 10 , wherein a top surface of the fin base is defined by a bottom surface of the at least one first trench, and
the bottom surface of the at least one first trench is lower than top surfaces of the plurality of convex portions.

13. The field effect transistor of claim 10 , wherein the plurality of the fin portions connect a source region with a drain region, and
upper portions of the plurality of the fin portions have a substantially same width as each other.

14. The field effect transistor of claim 9 , wherein the substrate includes a first region and a second region, and
a number of the at least one fin portion in the first region is different than a number of the at least one fin portion in the second region.

15. A field effect transistor, comprising:
a substrate having a substrate body, at least one fin portion extending away from a surface of the substrate body, and a fin base interposed between the substrate body and the at least one fin portion; a source region and a drain region connected to each other via the at least one fin portion; a gate electrode over the at least one fin portion; a gate dielectric between the at least one fin portion and the gate electrode; and a device isolation layer exposing an upper portion of the at least one fin portion and covering a top surface of the substrate body adjacent to the fin base, wherein the top surface of the substrate body adjacent to the fin body includes a plurality of grooves, each of the plurality of grooves includes a plurality of convex portions and a plurality of concave portions, and the plurality of convex portions extend from the surface of the substrate body and are parallel to the at least one fin portion.

16. The field effect transistor of claim 15 , wherein the at least one fin portion includes a plurality of fin portions having a same width and spaced apart from each other.

17. The field effect transistor of claim 16 , wherein the plurality of fin portions are symmetrical.

18. The field effect transistor of claim 16 , wherein,
either the plurality of grooves extends above the fin base or the fin base extends above the plurality of grooves.

19. The field effect transistor of claim 18 , wherein a thickness of the fin base is less than half a depth of a first trench between adjacent fin portions when the plurality of grooves extend above the fin base, or the thickness of the fin base is greater than half the depth of the first trench when the fin base extends above the plurality of grooves.

20. A field effect transistor, comprising:
a source region and a drain region on a substrate; a fin base protruding from a top surface of the substrate; a plurality of fin portions extending upward from the fin base and connecting the source region with the drain region; a gate electrode on the plurality of fin portions; a gate dielectric between the plurality of fin portions and the gate electrode; and a device isolation layer exposing upper portions of the plurality of fin portions and covering the top surface of the substrate adjacent to the fin base, wherein the top surface of the substrate adjacent to the fin base includes at least one round type groove, the groove includes a convex portion, and the convex portion extends along an extending direction of the plurality of fin portions.

21. The field effect transistor of claim 20, wherein a thickness of the fin base is greater than half a depth of a first trench between the plurality of fin portions.

22. The field effect transistor of claim 20, further comprising:
at least one first trench between the plurality of fin portions, wherein a top surface of the convex portion is lower than a bottom surface of the at least one first trench.

23. The field effect transistor of claim 20, further comprising:
at least one first trench between the plurality of fin portions, wherein a top surface of the convex portion is higher than a bottom surface of the at least one first trench.

24. The field effect transistor of claim 20, further comprising:
at least one first trench between the plurality of fin portions, wherein a top surface of the device isolation layer is higher than a bottom surface of the at least one first trench.

25. The field effect transistor of claim 20, wherein the convex portion is provided in plural, and a distance between the plurality of convex portions is substantially equal to a distance between the plurality of fin portions.

26. The field effect transistor of claim 20, wherein the plurality of fin portions include a first fin portion and second fin portions, the second fin portions being outside the first fin portion and adjacent to the groove, and the first and second fin portions have a substantially same width.

27. A field effect transistor, comprising:
at least one fin portion extending from a top surface of a substrate; a device isolation layer exposing an upper portion of the at least one fin portion; a gate electrode on and crossing the at least one fin portion; and a gate dielectric between the at least one fin portion and the gate electrode, wherein the top surface of the substrate includes at least one round type groove, the groove includes a convex portion, the convex portion extends parallel to the at least one fin portion, and the device isolation layer covers a top surface of the convex portion.

28. The field effect transistor of claim 27, wherein the at least one fin portion includes a plurality of fin portions spaced apart from, each other by at least one first trench therebetween, and further comprising:
a fin base extending from the top surface of the substrate and connected to bottom surfaces of the plurality of fin portions.

29. The field effect transistor of claim 28, wherein a top surface of the fin base is defined by a bottom surface of the at least one first trench, and the bottom surface of the at least one first trench is higher than the top surface of the convex portion.

30. The field effect transistor of claim 28, wherein a top surface of the fin base is defined by a bottom surface of the at least one first trench, and the bottom surface of the at least one first trench is lower than the top surface of the convex portion.

31. The field effect transistor of claim 28, wherein the plurality of fin portions connect a source region with a drain region, and upper portions of the plurality of fin portions have a substantially same width as each other.

32. The field effect transistor of claim 27, wherein the substrate includes a first region and a second region, and a number of the at least one fin portion in the first region is different than a number of the at least one fin portion in the second region.

33. A field effect transistor, comprising:
a substrate having a substrate body, at least one fin portion extending away from a surface of the substrate body, and a fin base interposed between the substrate body and the at least one fin portion; a source region and a drain region connected to each other via the at least one fin portion; a gate electrode over the at least one fin portion; a gate dielectric between the at least one fin portion and the gate electrode; and a device isolation layer exposing an upper portion of the at least one fin portion and covering a top surface of the substrate body adjacent to the fin base, wherein the top surface of the substrate body adjacent to the fin base includes at least one round type groove, the groove includes a convex portion, and the convex portion extends from the surface of the substrate body and is parallel to the at least one fin portion.

34. The field effect transistor of claim 33, wherein the at least one fin portion includes a plurality of fin portions having a same width and spaced apart from each other.

35. The field effect transistor of claim 34, wherein the plurality of fin portions are symmetrical.

36. The field effect transistor of claim 34, wherein, either the groove extends above the fin base or the fin base extends above the groove.

37. The field effect transistor of claim 36, wherein a thickness of the fin base is less than half a depth of a first trench between adjacent fin portions when the groove extends above the fin base, or the thickness of the fin base is greater than half the depth of the first trench when the fin base extends above the groove.

38. The field effect transistor of claim 27, wherein the convex portion has a rounded top surface.

39. The field effect transistor of claim 38, wherein the rounded top surface of the convex portion extends above a bottom of the at least one fin portion.

40. The field effect transistor of claim 27, wherein the convex portion is provided in plural, and the plurality of convex portions in the groove are arranged to have substantially a same pitch.

41. The field effect transistor of claim 27, wherein the gate dielectric includes a silicon oxide layer or a high-k dielectric material.

42. The field effect transistor of claim 27, wherein the gate electrode includes one of a group consisting of a doped semiconductor material, a metal, a conductive metal nitride, or a metal semiconductor compound.

43. The field effect transistor of claim 27, further comprising:
a plurality of fin portions extending from the top surface of the substrate, wherein the plurality of fin portions are separated by at least one trench, and the top surface of the convex portion is higher than a bottom surface of the at least one trench.

44. The field effect transistor of claim 43, wherein the plurality of fin portions have substantially a same width.

45. The field effect transistor of claim 43, wherein the plurality of fin portions are separated from one another by substantially a same spacing.

46. The field effect transistor of claim 43, wherein the plurality of fin portions have substantially a same pitch.

47. The field effect transistor of claim 43, wherein a height of the at least one trench is in a range of about 500 Å to about 1400 Å.

48. The field effect transistor of claim 43, wherein the groove has a height of about 350 Å to about 900 Å.

49. The field effect transistor of claim 43, wherein the plurality of fin portions includes at least one inner fin portion between two outer fin portions, and wherein the at least one inner fin portion and the two outer fin portions have substantially a same width.

50. The field effect transistor of claim 43, wherein the convex portion is provided in plural, and the plurality of convex portions are arranged to have substantially a same pitch.

51. A semiconductor device, comprising:
a first region including a first number of fin portions on a substrate; a first gate electrode on the first number of fin portions; a second region including a second number of fin portions on the substrate; a second gate electrode on the second number of fin portions, a device isolation layer exposing upper portions of the first and second numbers of fin portions, wherein the top surface of the substrate includes at least one round type groove, the groove includes a convex portion, the convex portion extends parallel to the first and second numbers of fin portions, and the device isolation layer covers a top surface of the of convex portion, and wherein the first and second numbers of fin portions are different.

52. The device of claim 51, wherein the groove includes:
a first groove adjacent to the first number of fin portions, and a second groove adjacent to the second number of fin portions.

53. The device of claim 51, wherein at least one of the convex portion has a rounded top surface.

54. The device as claimed in claim 51, wherein:
the first region is an input/output region or a logic region, and the second region is a memory region.

55. The device as claimed in claim 54, wherein the memory region is an SRAM region.

56. The device as claimed in claim 51, wherein:
the first region includes a first transistor, and the second region includes a second transistor.

57. The device as claimed in claim 56, wherein the first and second transistors have different conductivity types.

58. The device as claimed in claim 56, wherein the first and second transistors have different threshold voltages.

59. The device as claimed in claim 51, wherein at least one of the first number of fin portions or the second number of fin portions is greater than one.

60. The device as claimed in claim 59, wherein each of the first number of fin portions and the second number of fin portions is greater than one.

61. A memory, comprising:
at least one fin portion extending from a top surface of a substrate; a device isolation layer exposing an upper portion of the at least one fin portion; a gate electrode on and crossing the at least one fin portion; and a gate dielectric between the at least one fin portion and the gate electrode, wherein the top surface of the substrate includes at least one groove, the groove includes a convex portion and a concave portion, the convex portion extends parallel to the at least one fin portion, and the device isolation layer covers a top surface of the convex portion, and wherein the convex portion has a rounded top surface or the concave portion has a rounded bottom surface.

62. The memory as claimed in claim 61, wherein the convex portion has a rounded top surface and the concave portion has a rounded bottom surface.

63. The memory as claimed in claim 61, further comprising:
a transistor including the at least one fin portion.

64. The memory as claimed in claim 63, wherein the memory is a semiconductor device.

65. The memory as claimed in claim 64, wherein the memory is an SRAM.

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