Assignee
SK SILTRON CO LTD
KR·73 granted patents·21 pending applications·33 citations·filing 2014–2025
Top patents by PatentIndex Score
94 records- 0192US10737366B2Dressing apparatus and wafer polishing apparatus comprising sameSK SILTRON CO LTD·Filed 2016·Granted Aug 11, 2020·8 cites·18 claims
- 0289US11656186B2Wafer and method for analyzing shape thereofSK SILTRON CO LTD·Filed 2020·Granted May 23, 2023·2 cites·5 claims
- 0389US10435809B2Apparatus for growing single crystalline ingot and method for growing sameSK SILTRON CO LTD·Filed 2016·Granted Oct 8, 2019·2 cites·7 claims
- 0479US11389922B2Polishing measurement device and abrasion time controlling method thereof, and polishing control system including sameSK SILTRON CO LTD·Filed 2017·Granted Jul 19, 2022·2 cites·17 claims
- 0579US2025361646A1Single crystal silicon ingot and method of growing the sameSK SILTRON CO LTD·Filed 2025·Application pending·0 cites
- 0676US11214891B2Apparatus for growing single crystalline ingot and method for growing sameSK SILTRON CO LTD·Filed 2019·Granted Jan 4, 2022·0 cites·6 claims
- 0775US10378122B2Method for growing single crystalSK SILTRON CO LTD·Filed 2016·Granted Aug 13, 2019·1 cites·10 claims
- 0875US2024263344A1Single crystal silicon ingot and method of growing the sameSK SILTRON CO LTD·Filed 2023·Application pending·0 cites
- 0975US2025296191A1Wafer edge polishing drum and wafer edge polishing equipment including the sameSK SILTRON CO LTD·Filed 2024·Application pending·0 cites
- 1074US10068785B2Wafer loading apparatus of wafer polishing equipment and method for adjusting wafer loading positionSK SILTRON CO LTD·Filed 2015·Granted Sep 4, 2018·2 cites·11 claims
- 1173US10818526B2Apparatus of controlling temperature in wafer cleaning equipment and method thereofSK SILTRON CO LTD·Filed 2018·Granted Oct 27, 2020·3 cites·6 claims
- 1273US10782247B2Apparatus and method for measuring particle on surface of waferSK SILTRON CO LTD·Filed 2019·Granted Sep 22, 2020·3 cites·20 claims
- 1371US12596078B2Apparatus for analyzing metal contamination of a wafer and a method thereofSK SILTRON CO LTD·Filed 2023·Granted Apr 7, 2026·0 cites·16 claims
- 1471US10325823B2Wafer and wafer defect analysis methodSK SILTRON CO LTD·Filed 2016·Granted Jun 18, 2019·1 cites·16 claims
- 1571US10062574B2Wafer polishing apparatus and methodSK SILTRON CO LTD·Filed 2015·Granted Aug 28, 2018·2 cites·7 claims
- 1669US10615085B2Method for predicting thickness of oxide layer of silicon waferSK SILTRON CO LTD·Filed 2018·Granted Apr 7, 2020·1 cites·18 claims
- 1768US10920338B1Driving unit measuring apparatus and silicon crystal growing apparatus having sameSK SILTRON CO LTD·Filed 2019·Granted Feb 16, 2021·0 cites·18 claims
- 1868US10780548B2Surface plate cleaning apparatusSK SILTRON CO LTD·Filed 2017·Granted Sep 22, 2020·2 cites·14 claims
- 1967US2024309542A1External crucible accommodating silicon melt and silicon single crystal ingot growth apparatus including the sameSK SILTRON CO LTD·Filed 2024·Application pending·0 cites
- 2066US11569106B2Wafer cassette packing apparatusSK SILTRON CO LTD·Filed 2019·Granted Jan 31, 2023·2 cites·8 claims
- 2165US10192794B2Wafer transfer deviceSK SILTRON CO LTD·Filed 2015·Granted Jan 29, 2019·2 cites·12 claims
- 2264US12533873B2Device and method for separating wafersSK SILTRON CO LTD·Filed 2023·Granted Jan 27, 2026·0 cites·17 claims
- 2364US12351939B2Ingot growing apparatus and method thereofSK SILTRON CO LTD·Filed 2023·Granted Jul 8, 2025·0 cites·10 claims
- 2464US2025100102A1Wafer double-side polishing apparatus and method of evaluating the sameSK SILTRON CO LTD·Filed 2024·Application pending·0 cites
- 2563US11534889B2Polishing pad for wafer polishing apparatus and manufacturing method thereforSK SILTRON CO LTD·Filed 2018·Granted Dec 27, 2022·0 cites·6 claims
- 2662US10541181B2Wafer and wafer defect analysis methodSK SILTRON CO LTD·Filed 2019·Granted Jan 21, 2020·0 cites·11 claims
- 2762US2026008157A1Edge polishing drum for wafers and edge polishing equipment for wafers including the sameSK SILTRON CO LTD·Filed 2025·Application pending·0 cites
- 2861US12247939B2Ingot growing apparatus and monitoring method thereofSK SILTRON CO LTD·Filed 2023·Granted Mar 11, 2025·0 cites·20 claims
- 2959US12118706B2Method and apparatus of evaluating quality of wafer or single crystal ingotSK SILTRON CO LTD·Filed 2022·Granted Oct 15, 2024·0 cites·7 claims
- 3059US12110608B2Apparatus of oxidation-combusting an ingot grower and method thereofSK SILTRON CO LTD·Filed 2021·Granted Oct 8, 2024·0 cites·13 claims
- 3159US12043917B2Single crystal ingot growth control deviceSK SILTRON CO LTD·Filed 2020·Granted Jul 23, 2024·0 cites·8 claims
- 3259US10968534B2Pulling control device for single crystal ingot growth and pulling control method applied theretoSK SILTRON CO LTD·Filed 2019·Granted Apr 6, 2021·0 cites·10 claims
- 3358US11982013B2Raw material feed hopper and single crystal growth systemSK SILTRON CO LTD·Filed 2021·Granted May 14, 2024·0 cites·13 claims
- 3458US10344395B2Apparatus and method for growing silicon single crystal ingotSK SILTRON CO LTD·Filed 2016·Granted Jul 9, 2019·0 cites·6 claims
- 3556US12076835B2Air circulation system and final polishing apparatus including the sameSK SILTRON CO LTD·Filed 2021·Granted Sep 3, 2024·0 cites·10 claims
- 3656US11608567B2Crucible for ingot growerSK SILTRON CO LTD·Filed 2020·Granted Mar 21, 2023·0 cites·7 claims
- 3756US11332848B2Silicon single crystal growth method and apparatusSK SILTRON CO LTD·Filed 2019·Granted May 17, 2022·0 cites·3 claims
- 3855US10066315B2Single crystal growing apparatusSK SILTRON CO LTD·Filed 2014·Granted Sep 4, 2018·0 cites·15 claims
- 3954US12275165B2Workplate for Y-axis compensation of ingot and Y-axis compensation method of ingot using the sameSK SILTRON CO LTD·Filed 2022·Granted Apr 15, 2025·0 cites·5 claims
- 4054US11891718B2Method and apparatus for growing silicon single crystal ingotSK SILTRON CO LTD·Filed 2022·Granted Feb 6, 2024·0 cites·6 claims
- 4154US11198948B2Temperature control device for single crystal ingot growth and temperature control method applied theretoSK SILTRON CO LTD·Filed 2019·Granted Dec 14, 2021·0 cites·6 claims
- 4254US2024003047A1Method and apparatus for growing silicon single crystal ingotsSK SILTRON CO LTD·Filed 2020·Application pending·0 cites
- 4353US10655242B2Growing apparatus and single-crystal ingot growing method using the sameSK SILTRON CO LTD·Filed 2018·Granted May 19, 2020·0 cites·20 claims
- 4453US2025041988A1Device for measuring wafer polishing amount, and measurement method thereforSK SILTRON CO LTD·Filed 2022·Application pending·0 cites
- 4552US12394672B2Method for evaluating of defect area of waferSK SILTRON CO LTD·Filed 2022·Granted Aug 19, 2025·0 cites·17 claims
- 4652US10377056B2Ingot slicing apparatusSK SILTRON CO LTD·Filed 2016·Granted Aug 13, 2019·0 cites·18 claims
- 4752US2025125141A1Epitaxial wafer and a method for manufacturing an epitaxial waferSK SILTRON CO LTD·Filed 2024·Application pending·0 cites
- 4852US2020078901A1Polishing pad for wafer polishing apparatusSK SILTRON CO LTD·Filed 2019·Application pending·0 cites
- 4951US11955386B2Method for evaluating defective region of waferSK SILTRON CO LTD·Filed 2018·Granted Apr 9, 2024·0 cites·10 claims
- 5051US11815429B2Pin hole inspection apparatus and methodSK SILTRON CO LTD·Filed 2022·Granted Nov 14, 2023·0 cites·12 claims
Showing the top 50 of 94 patent records by PatentIndex Score.
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